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    • 63. 发明授权
    • Method of forming polycrystalline silicon layer on semiconductor wafer
    • 在半导体晶片上形成多晶硅层的方法
    • US5167758A
    • 1992-12-01
    • US364558
    • 1989-06-08
    • Yasuhiro MaedaTakashi YokoyamaIchiro HideTakeyuki MatsuyamaKeiji Sawaya
    • Yasuhiro MaedaTakashi YokoyamaIchiro HideTakeyuki MatsuyamaKeiji Sawaya
    • B22D19/08C30B11/00
    • C30B29/06B22D19/08C30B11/00
    • A method of forming a polycrystalline silicon layer on a semiconductor wafer is disclosed having the steps of placing the semiconductor wafers in a predetermined number of recesses formed on a mold body, then creating a mold by securing a mold cover in contact with the front surface of the mold body, rotating the mold by a rotor in the heating inert gas of a melting furnace, maintaining the wafer temperature in the range of 1300.degree. C. to 1350.degree. C., pouring heated melted silicon from an inlet opened at the center of the mold cover into a passage recessed at the center of the mold body, flowing the heated melted silicon radially by centrifugal force to fill the melted silicon in a laminated layer air gap formed between the surface of the wafer placed in the recess and the mold cover, cooling to solidify the melted silicon and obtain a product with the polycrystalline silicon layer formed from the melted silicon on the wafer, and opening the mold cover from the mold body to remove the product from the mold body. Thus, the method can readily form an accumulated layer of the thickness of 100 micron at an extremely high speed with sufficient economy.
    • 公开了一种在半导体晶片上形成多晶硅层的方法,该方法具有以下步骤:将半导体晶片放置在形成在模体上的预定数量的凹槽中,然后通过将模具盖与前表面接触而形成模具 模具体,通过在熔化炉的加热惰性气体中的转子旋转模具,将晶片温度保持在1300℃至1350℃的范围内,从在中心开口的入口浇注加热的熔融硅 模具盖成为在模具主体的中心凹陷的通道,通过离心力使加热的熔融硅径向流动,以将填充在位于凹槽中的晶片表面与模具盖之间的层叠气隙中填充熔融的硅 冷却固化熔融的硅并获得由晶片上的熔融硅形成的多晶硅层的产品,并从模具体上打开模具盖以除去 产品从模具体。 因此,该方法可以以足够的经济性以极高的速度容易地形成厚度为100微米的累积层。
    • 65. 发明授权
    • Apparatus for fabricating polycrystalline silicon wafer
    • 多晶硅晶片制造装置
    • US4519764A
    • 1985-05-28
    • US644548
    • 1984-08-27
    • Yasuhiro MaedaTakashi YokoyamaShinichi Yagihashi
    • Yasuhiro MaedaTakashi YokoyamaShinichi Yagihashi
    • C01B33/02B28B1/54C30B11/00H01L31/04B29C5/04
    • C30B11/008C30B11/00C30B29/06C30B29/605
    • A method of fabricating a polycrystalline silicon wafer, which method advantageously has the steps of radially outwardly flowing molten liquid of silicon base material on the wafer forming surface of a turntable mechanism by means of centrifugal force, thereby forming a thin molten liquid layer in a prescribed atmosphere, and cooling and solidifying the same. An apparatus for fabricating the wafer is used to carry out the method with a recover tray arranged at the wafer forming surface for receiving the excessive silicon liquid scattered, and a wafer tray placed on the recovery tray, and the wafer forming surface is cooled with coolant flowing in the wafer forming mechanism. Thus, large crystalline grains can be grown on the wafer in free states with the atmosphere from the inner surfaces of the casting mold as the conventional method.
    • 一种制造多晶硅晶片的方法,该方法有利地具有通过离心力将硅基材料的熔融液体径向向外流动在转台机构的晶片形成表面上的步骤,从而在规定的条件下形成薄的熔融液体层 气氛,冷却固化相同。 用于制造晶片的装置用于利用布置在晶片形成表面处的用于接收过量硅液体散射的回收托盘和放置在回收托盘上的晶片托盘来执行该方法,并且用冷却剂冷却晶片形成表面 在晶片形成机构中流动。 因此,作为常规方法,可以从铸模的内表面的气氛以自由状态在晶片上生长大晶粒。
    • 70. 发明授权
    • Remote virtual machine migration port management device and system
    • 远程虚拟机迁移端口管理设备和系统
    • US08972988B2
    • 2015-03-03
    • US13553656
    • 2012-07-19
    • Kozo IkegamiTakashi Yokoyama
    • Kozo IkegamiTakashi Yokoyama
    • G06F9/455G06F15/173G06F7/00
    • G06F9/45545G06F9/45558G06F2009/4557
    • A live migration process between different locations is realized without migrating data stored in a storage area to another location. A network device, which is included in each of locations, for coupling to another one of the locations, the network device stores a program for realizing an access processing module for managing accesses, and coupling management information for managing a coupling relationship between the plurality of virtual machines and the plurality of storage areas, and wherein the access processing module is configured to: receive a notification to start a live migration process, refer to the coupling management information to identify a port for accessing a storage area allocated to a virtual machine; acquire an address of a transfer destination device to which an access request is transferred; generate conversion information; and control the access request based on the conversion information.
    • 实现不同位置之间的实时迁移过程,而不会将存储在存储区域中的数据迁移到另一位置。 网络设备包括在每个位置中,用于耦合到另一个位置,网络设备存储用于实现用于管理访问的访问处理模块的程序,以及耦合用于管理多个站点之间的耦合关系的管理信息 虚拟机和多个存储区域,并且其中所述访问处理模块被配置为:接收启动实时迁移过程的通知,参考所述耦合管理信息以识别用于访问分配给虚拟机的存储区域的端口; 获取传送访问请求的传送目的地设备的地址; 生成转换信息; 并根据转换信息控制访问请求。