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    • 61. 发明申请
    • METHOD OF FORMING RESIST PATTERN
    • 形成电阻图案的方法
    • US20130189618A1
    • 2013-07-25
    • US13614017
    • 2012-09-13
    • Jiro YokoyaTsuyoshi NakamuraHiroaki ShimizuHideto Nito
    • Jiro YokoyaTsuyoshi NakamuraHiroaki ShimizuHideto Nito
    • G03F7/20G03F7/004
    • G03F7/20G03F7/004G03F7/0045G03F7/0397G03F7/38
    • A method of forming a resist pattern, including: step (1) in which a resist composition including a base component, a photobase generator component and an acid supply component is applied to a substrate to form a resist film; step (2) in which the resist film is subjected to exposure without being subjected to prebaking; step (3) in which baking is conducted after step (2), such that, at an exposed portion of the resist film, the base generated from the photobase generator component upon the exposure and an acid derived from the acid supply component are neutralized, and at an unexposed portion of the resist film, the solubility of the base component in an alkali developing solution is increased by the action of the acid derived from the acid supply component; and step (4) in which the resist film is subjected to an alkali development, thereby forming a negative-tone resist pattern.
    • 一种形成抗蚀剂图案的方法,包括:步骤(1),其中将包含基底组分,光碱产生剂组分和酸供应组分的抗蚀剂组合物施加到基底上以形成抗蚀剂膜; 步骤(2),其中抗蚀剂膜经受曝光而不经受预烘烤; 步骤(3),其中在步骤(2)之后进行烘烤,使得在抗蚀剂膜的暴露部分,曝光时由光产生剂组分产生的碱和源自酸供应组分的酸被中和, 并且在抗蚀剂膜的未曝光部分,通过来自酸供应成分的酸的作用,碱成分在碱性显影液中的溶解度增加; 和步骤(4),其中抗蚀剂膜经受碱显影,从而形成负色调抗蚀剂图案。
    • 64. 发明申请
    • IMAGE CAPTURING APPARATUS
    • 图像捕获设备
    • US20120206629A1
    • 2012-08-16
    • US13141458
    • 2010-09-29
    • Tsuyoshi Nakamura
    • Tsuyoshi Nakamura
    • H04N5/232H04N5/217H04N5/76
    • H04N5/3454H04N5/357
    • An image capturing apparatus includes: an image pickup section for converting, into image data, pixel signals obtained by picking up an image of an object; and an image processing section for performing predetermined image processing on the image data obtained as a result of conversion by the image pickup section. The image pickup section includes: an X-Y addressable image sensor for accumulating, in an image pickup area thereof, pixel signals of an object obtained by image pickup; and a conversion means for sequentially reading out pixel signals contained in each of processing units, converting the pixel signals into image data, and outputting the image data, the processing units each being an area of a predetermined size defined by dividing the image pickup area of the image sensor into rectangular blocks of a predetermined size and adding a predetermined number of pixels to each rectangular block in vertical and horizontal directions of the rectangular block. The image processing section includes: a memory for sequentially receiving and storing image data of each processing unit; and an image processing means for sequentially performing the predetermined image processing on the image data stored in the memory that is contained in the range of the rectangular block, and outputting the resultant image data.
    • 一种图像捕获装置包括:图像拾取部分,用于将通过拾取对象的图像获得的像素信号转换为图像数据; 以及图像处理部分,用于对由图像拾取部分转换的结果获得的图像数据执行预定的图像处理。 图像拾取部分包括:X-Y可寻址图像传感器,用于在图像拾取区域中累积通过图像拾取获得的对象的像素信号; 以及转换装置,用于顺序读出包含在每个处理单元中的像素信号,将像素信号转换成图像数据,并输出图像数据,每个处理单元是通过将图像拾取区域 图像传感器成为预定尺寸的矩形块,并且在矩形块的垂直和水平方向上向矩形块添加预定数量的像素。 图像处理部分包括:用于顺序地接收和存储每个处理单元的图像数据的存储器; 以及图像处理装置,用于对包含在矩形块的范围中的存储器中存储的图像数据顺序执行预定的图像处理,并输出所得到的图像数据。
    • 65. 发明授权
    • Sheet processing apparatus
    • 纸张处理设备
    • US08141863B2
    • 2012-03-27
    • US12397601
    • 2009-03-04
    • Tsuyoshi NakamuraToshio KawachidaniYoshimasa SasaokaRyuuichi ShiraishiMunetake Nagata
    • Tsuyoshi NakamuraToshio KawachidaniYoshimasa SasaokaRyuuichi ShiraishiMunetake Nagata
    • B65H37/04
    • B65H31/02B42B4/00B65H31/3009B65H2301/1635B65H2301/42261B65H2801/27
    • The sheet processing apparatus is provided with: a sheet aligning part that accumulates and aligns sheets so as to generate a bundle of sheets; an edge stitching processor that performs an edge stitching process by which the generated bundle of sheets is stitched together at one edge of the bundle of sheets; an apparatus housing that includes an opening portion through which the bundle of sheets is discharged to an outside of the apparatus housing; a saddle stitching processor that performs, outside of the apparatus housing, a saddle stitching process by which the discharged bundle of sheets is stitched together at a center portion of the bundle of sheets in a transporting direction of the bundle of sheets; and a stacking tray that is provided below the opening portion and outside the apparatus housing, and on which the bundles of sheets subjected to the edge stitching process and the saddle stitching process are capable of being stacked.
    • 片材处理装置设置有:片材对准部,其对片材进行积聚并排列,以生成一捆片材; 边缘缝合处理器,其执行边缘拼接处理,通过该边缘拼接处理,所生成的片材束在一束片的一个边缘处被缝合在一起; 装置壳体,其包括开口部分,所述纸张束通过所述开口部排出到所述装置壳体的外部; 骑马装订处理器,在所述装置壳体的外部执行马鞍缝合处理,通过所述马鞍缝合处理,所述马鞍缝合处理将所述排出的纸张束在所述纸张束的输送方向上的所述纸张束的中心部分处被缝合在一起; 以及设置在开口部的下方并位于装置壳体的外侧的堆叠托盘,并且能够堆叠经受边缘拼接处理和骑马装订处理的片材束。
    • 67. 发明授权
    • Positioning apparatus
    • 定位装置
    • US08021485B2
    • 2011-09-20
    • US11273332
    • 2005-11-15
    • Tsuyoshi NakamuraNobuhito Saji
    • Tsuyoshi NakamuraNobuhito Saji
    • F16J15/40C23C16/00F01D11/06F16J3/00
    • H01L21/67126F16C29/025F16C32/0614F16C33/748F16C2300/62F16J15/406G03F7/70816
    • In the present positioning apparatus, a positioning apparatus, comprising: a box body including a process chamber exposed to a decompression environment in the interior of the box body and an opening allowing said process chamber to communicate with an outside; a moving member for shielding said opening of said box body with a slight clearance between said box body and the moving member and movable with respect to said opening of said box body; and a differential pumping seal for sealing said slight clearance between said opening of said box body and said moving member, wherein a portion of said moving member to be moved into the interior of said process chamber, when said moving member moves, is formed as an adsorption preventive area.
    • 在本定位装置中,一种定位装置,包括:盒体,其包括暴露于箱体内部的减压环境的处理室和允许所述处理室与外部连通的开口; 移动构件,其用于屏蔽所述箱体的所述开口,所述盒体与所述移动构件之间具有微小的间隙,并且可相对于所述箱体的所述开口移动; 以及用于密封所述箱体的所述开口和所述移动构件之间的所述微小间隙的差动泵送密封件,其中当所述移动构件移动时,要移动到所述处理室内部的所述移动构件的一部分形成为 吸附预防区域。