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    • 63. 发明申请
    • PIEZOELECTRIC FILTER AND METHOD FOR MANUFACTURING THE SAME
    • 压电过滤器及其制造方法
    • US20100052476A1
    • 2010-03-04
    • US12523798
    • 2008-11-19
    • Tomohiro IwasakiHiroshi NakatsukaKeiji Onishi
    • Tomohiro IwasakiHiroshi NakatsukaKeiji Onishi
    • H01L41/04H01L41/22H01Q1/50
    • H03H3/04H03H9/02086H03H9/0519H03H9/13H03H9/131H03H9/56H03H9/564H03H2003/0428Y10T29/42
    • A piezoelectric filter of the present invention is provided with first and second piezoelectric vibrators, each having a substrate, a lower load film formed on the substrate, a lower electrode formed on the lower load film, a piezoelectric element formed on the lower electrode, an upper electrode formed on the piezoelectric element and an upper load film formed on the upper electrode, and the piezoelectric filter is configured by electrically connecting the first and second piezoelectric vibrators to each other, and the piezoelectric element of the first piezoelectric vibrator and the piezoelectric element of the second piezoelectric vibrator correspond to respectively different areas of the same piezoelectric element; thus, the resonance frequencies of the first and second piezoelectric vibrators are adjusted by the respective lower load films and upper load films of the first piezoelectric vibrator and the second piezoelectric vibrator so that the resonance frequencies of the first and second piezoelectric vibrators are made different from each other.
    • 本发明的压电滤波器设置有第一和第二压电振动器,每个具有基板,形成在基板上的下载荷膜,形成在下载荷膜上的下电极,形成在下电极上的压电元件, 形成在压电元件上的上电极和形成在上电极上的上载荷膜,并且压电滤波器通过将第一和第二压电振动器彼此电连接而构成,并且第一压电振动器的压电元件和压电元件 的第二压电振子分别对应于同一压电元件的不同区域; 因此,第一和第二压电振动器的谐振频率由第一压电振动器和第二压电振动器的相应的下负载薄膜和上载荷薄膜调节,使得第一和第二压电振动器的谐振频率不同于 彼此。
    • 65. 发明授权
    • Coupled FBAR filter
    • 耦合FBAR滤波器
    • US07408429B2
    • 2008-08-05
    • US11453064
    • 2006-06-15
    • Tomohiro IwasakiHiroshi NakatsukaKeiji OnishiHiroyuki Nakamura
    • Tomohiro IwasakiHiroshi NakatsukaKeiji OnishiHiroyuki Nakamura
    • H03H9/00
    • H03H9/564H03H9/0207
    • A coupled FBAR filter 100 includes first and second input/output vibration portions 110 and 111 respectively including first and second lower electrodes 104 and 106, first and second upper electrodes 105 and 107, and a piezoelectric thin film 103 interposed therebetween; and a cavity 102 for commonly guaranteeing vibrations of the first and second input/output vibration portions 110 and 111 so as to couple the vibrations. The first and second input/output vibration portions 110 and 111 are located adjacently in contact with each other with a step therebetween, such that the first and second lower electrodes 104 and 106 are not electrically connected to each other and such that the first and second upper electrodes 105 and 107 are not electrically connected to each other. Insulators 108 and 109 are provided in the vicinity of the step.
    • 耦合的FBAR滤波器100包括分别包括第一和第二下部电极104和106的第一和第二输入/输出振动部分110和111,第一和第二上部电极105和107以及介于其间的压电薄膜103; 以及用于共同地保证第一和第二输入/输出振动部分110和111的振动以便耦合振动的空腔102。 第一和第二输入/输出振动部分110和111彼此相邻地彼此接触地定位,使得第一和第二下部电极104和106彼此不电连接,并且使得第一和第二输入/输出振动部分110和111 上电极105和107彼此不电连接。 绝缘体108和109设置在台阶附近。
    • 66. 发明申请
    • Coupled FBAR filter
    • 耦合FBAR滤波器
    • US20060284702A1
    • 2006-12-21
    • US11453064
    • 2006-06-15
    • Tomohiro IwasakiHiroshi NakatsukaKeiji OnishiHiroyuki Nakamura
    • Tomohiro IwasakiHiroshi NakatsukaKeiji OnishiHiroyuki Nakamura
    • H03H9/70H03H9/58
    • H03H9/564H03H9/0207
    • A coupled FBAR filter 100 includes first and second input/output vibration portions110 and 111 respectively including first and second lower electrodes 104 and 106, first and second upper electrodes 105 and 107, and a piezoelectric thin film 103 interposed therebetween; and a cavity 102 for commonly guaranteeing vibrations of the first and second input/output vibration portions 110 and 111 so as to couple the vibrations. The first and second input/output vibration portions 110 and 111 are located adjacently in contact with each other with a step therebetween, such that the first and second lower electrodes 104 and 106 are not electrically connected to each other and such that the first and second upper electrodes 105 and 107 are not electrically connected to each other. Insulators 108 and 109 are provided in the vicinity of the step.
    • 耦合的FBAR滤波器100包括分别包括第一和第二下部电极104和106的第一和第二输入/输出振动部分110和111,第一和第二上部电极105和107以及介于其间的压电薄膜103; 以及用于共同地保证第一和第二输入/输出振动部分110和111的振动以便耦合振动的空腔102。 第一和第二输入/输出振动部分110和111彼此相邻地彼此接触地定位,使得第一和第二下部电极104和106彼此不电连接,并且使得第一和第二输入/输出振动部分110和111 上电极105和107彼此不电连接。 绝缘体108和109设置在台阶附近。
    • 68. 发明授权
    • Thin film elastic wave resonator
    • 薄膜弹性波谐振器
    • US07446455B2
    • 2008-11-04
    • US11666135
    • 2005-12-06
    • Tomohiro IwasakiKeiji OnishiHiroshi Nakatsuka
    • Tomohiro IwasakiKeiji OnishiHiroshi Nakatsuka
    • H01L41/08
    • H03H9/0095H03H9/02118H03H9/132H03H9/564H03H9/566
    • An upper electrode (50) includes a first electrode section (51) formed in a circular shape and a second electrode section (52) and a third electrode section (53) formed in a fan-shaped manner outside of the first electrode section (51). The first, second, and third electrode sections (51 to 53) are electrically separated from one another via an insulating region. A lower electrode (30) includes a fourth electrode section (31) formed in a circular shape and a fifth electrode section (32) and a sixth electrode section (33) formed in a fan-shaped manner outside of the fourth electrode section (31). Similarly, the fourth, fifth, and sixth electrode sections (31 to 33) are electrically separated from one another via an insulating region. Further, the fourth electrode section (31) is provided so as to face the first electrode section (51) via the piezoelectric body (40), the fifth electrode section (32) is provided so as to face the second electrode section (52) via the piezoelectric body (40), and the sixth electrode section (33) is provided so as to face the third electrode section (53) via the piezoelectric body (40), respectively.
    • 上部电极(50)包括形成为圆形的第一电极部(51)和第二电极部(52)以及第三电极部(53),第一电极部(51)以扇形形成在第一电极部 )。 第一,第二和第三电极部分(51至53)经由绝缘区域彼此电分离。 下电极30包括形成为圆形的第四电极部31和第四电极部31的扇形状的第五电极部32和第六电极部33, )。 类似地,第四,第五和第六电极部分(31至33)经由绝缘区域彼此电分离。 此外,第四电极部(31)经由压电体(40)与第一电极部(51)相对设置,第五电极部(32)设置成与第二电极部(52)相对, 经由压电体(40),第六电极部(33)分别经由压电体(40)与第三电极部(53)相对。