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    • 61. 发明授权
    • Projection exposure apparatus
    • 投影曝光装置
    • US06441884B1
    • 2002-08-27
    • US09567000
    • 2000-05-09
    • Masato TakahashiFutoshi Mori
    • Masato TakahashiFutoshi Mori
    • G03B2742
    • G03F7/70066G03F7/2002G03F7/70766G03F7/70833G03F7/709
    • An optical system for illumination is divided into a first optical system (10A) and a second optical system (10B). The second optical system (10B) is fixed to an exposure apparatus main body (SP). The exposure apparatus main body (SP) is provided to a base frame (41) via hard rubbers (31A and 32B) and piezo actuators (32A and 32B), and isolates vibration from the surface of the floor. The first optical system (10A) is supported separately from the exposure apparatus (SP) via actuators such as air mounts (14A and 14B) and voice coil motors (VCMs) (12A, 12B, 13A, and 13B) etc. A control system (50) compensates for the relative positional deviation between the first optical system (10A) and the second optical system (10B) detected by displacement sensors (26A and 26B) by controlling the position of the first optical system (10A) by driving the above described actuators.
    • 用于照明的光学系统被分为第一光学系统(10A)和第二光学系统(10B)。 第二光学系统(10B)固定在曝光装置主体(SP)上。 曝光装置主体(SP)通过硬橡胶(31A和32B)和压电致动器(32A和32B)设置到基座框架(41),并且隔离来自地板表面的振动。 第一光学系统(10A)通过诸如空气支架(14A和14B)和音圈电机(VCM)(12A,12B,13A和13B)等的致动器与曝光装置(SP)分开支撑。控制系统 (50)通过驱动上述方式来控制第一光学系统(10A)的位置来补偿由位移传感器(26A和26B)检测到的第一光学系统(10A)和第二光学系统(10B)之间的相对位置偏差 描述的致动器。
    • 62. 发明授权
    • Projection exposure apparatus having active vibration isolator and method of controlling vibration by the active vibration isolator
    • 具有主动隔振器的投影曝光装置和主动隔振器控制振动的方法
    • US06392741B1
    • 2002-05-21
    • US09476211
    • 1999-12-30
    • Futoshi MoriMasato Takahashi
    • Futoshi MoriMasato Takahashi
    • G03B2742
    • G03F7/70725F16F15/02F16F15/03G03F7/70833G03F7/709
    • A projection exposure apparatus transferring a pattern from a reticle to a wafer includes at least three vibration isolating pads, a vibration isolating stand on the vibration stand, a plurality of actuators driving the vibration isolating stand in a vertical direction, at least two stages over the vibration isolating stand, the stages mounting the wafer and the reticle, at least one displacement sensor at the vibration isolating stand and detecting a displacement of the vibration isolating stand, at least one acceleration sensor at the vibration isolating stand and detecting an acceleration and deceleration of the vibration isolating stand, a vibration control system coupled to the displacement sensors and the acceleration sensors, and controlling the actuators based on outputs of the displacement sensors and the acceleration sensor, a position measuring device positioned on the vibration isolating pads and measuring a position of the stages, and a vibration compensating system coupled to the vibration control system and receiving a command value to cancel a reaction force caused by the acceleration and deceleration of the stages in advance.
    • 将图案从掩模版传送到晶片的投影曝光装置包括至少三个隔振垫,振动台上的隔振支架,在垂直方向上驱动隔振支架的多个致动器,至少两个阶段 隔振台,安装晶片和掩模版的台阶,隔振台上的至少一个位移传感器,并检测隔振台的位移,隔振台上的至少一个加速度传感器,并检测振动隔离台的加速和减速 隔振支架,耦合到位移传感器和加速度传感器的振动控制系统,并且基于位移传感器和加速度传感器的输出来控制致动器;位置测量装置,其位于振动隔离垫上并测量位置传感器的位置; 阶段和振动补偿系统耦合 d到振动控制系统并且接收预先取消由级的加速和减速引起的反作用力的指令值。
    • 68. 发明授权
    • Video conference system and method for performing the same
    • 视频会议系统及其执行方法
    • US09185345B2
    • 2015-11-10
    • US14022772
    • 2013-09-10
    • Kazuki KitazawaMasato Takahashi
    • Kazuki KitazawaMasato Takahashi
    • H04N7/14H04N7/15
    • H04N7/15H04N7/147H04N7/155
    • A video conference system comprising: a control device located at each of the at least two conference sites, the control device being connected to the video camera and the display device; and a server connected to the control device via a communication network, the control device comprising: a control terminal configured to control the display device; and an image display format selecting unit connected to the control terminal, wherein the image display format includes at least one format in which a predetermined process is performed to image data of the video image, the control device controls transmission and reception of the image data, and the display device located at a site displays the video image of another site with the selected image display format.
    • 一种视频会议系统,包括:控制设备,位于所述至少两个会场中的每一个处,所述控制设备连接到所述摄像机和所述显示设备; 以及经由通信网络连接到所述控制装置的服务器,所述控制装置包括:控制终端,被配置为控制所述显示装置; 以及连接到所述控制终端的图像显示格式选择单元,其中所述图像显示格式包括执行预定处理以对所述视频图像进行图像数据的至少一种格式,所述控制装置控制所述图像数据的发送和接收, 并且位于现场的显示装置以所选择的图像显示格式显示另一站点的视频图像。
    • 69. 发明授权
    • Lubricating oil composition for transmissions
    • 用于变速器的润滑油组成
    • US09102897B2
    • 2015-08-11
    • US11201345
    • 2005-08-10
    • Masato TakahashiShigeki Matsui
    • Masato TakahashiShigeki Matsui
    • C10M169/04C10M101/02
    • C10M169/04C10M101/02C10M101/025C10M2203/1006C10M2203/1025C10M2203/106C10M2203/1065C10M2207/026C10M2209/084C10M2209/086C10M2215/04C10M2215/28C10M2219/066C10M2219/08C10M2219/106C10M2223/02C10M2223/04C10N2230/02C10N2230/10C10N2240/02C10N2240/04
    • A lubricating oil composition for transmissions comprises a lubricating base oil comprising (A) a lubricating base oil so adjusted to have a kinematic viscosity at 100° C. of from 1.5 to 5 mm2/s and a % CN of from 10 to 60 (B) a mineral lubricating base oil having a kinematic viscosity at 100° C. of from 10 to 50 mm2/s and a sulfur content of from 0.3 to 1 percent by mass and (C) a synthetic oil composed of carbon and hydrogen and having a number average molecular weight of from 2,000 to 20,000, in respective specific amounts and (D) an extreme pressure additive of from 0.05 to 2 percent by mass, based on the total amount of the composition, of comprising a phosphorus-based extreme pressure additive, a sulfur-based extreme pressure additive and/or a phosphorus-sulfur-based extreme pressure additive, wherein in the composition, the phosphorus content (P) is from 0.01 to 0.05 percent by mass, the total sulfur content (S) is from 0.05 to 0.3 percent by mass, and the P/S ratio is from 0.10 to 0.40. The lubricating oil composition has both excellent fuel economy performance and satisfactory durability for gears and bearings and furthermore excellent low temperature viscosity and oxidation stability.
    • 用于变速器的润滑油组合物包括润滑基础油,其包含(A)润滑基础油,其被调节以使其在100℃下的运动粘度为1.5至5mm 2 / s,%CN为10至60(B )在100℃下的运动粘度为10〜50mm 2 / s,硫含量为0.3〜1质量%的矿物润滑油基油,(C)由碳和氢组成的合成油, 数均分子量为2000〜20,000,各特定量,(D)基于组合物总量0.05〜2质量%的极压添加剂,包含磷系极压添加剂, 硫基极压添加剂和/或磷硫基极压添加剂,其中,在该组成中,磷含量(P)为0.01〜0.05质量%,总硫含量(S)为0.05 至0.3质量%,P / S比为0。 10〜0.40。 润滑油组合物具有优异的燃料经济性能和令人满意的齿轮和轴承的耐久性,并且还具有优异的低温粘度和氧化稳定性。