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    • 61. 发明授权
    • Power recovery system
    • 电源恢复系统
    • US09097207B2
    • 2015-08-04
    • US13702501
    • 2011-05-27
    • Kazuo TakahashiRyota KokenawaNorio OiwaAkira Ishikawa
    • Kazuo TakahashiRyota KokenawaNorio OiwaAkira Ishikawa
    • F01B29/10F02G1/055
    • F02G1/055F02G2256/00
    • The power recovery system includes: a Stirling engine; and a vaporization device that stores a liquid therein in such a manner that the liquid is kept in contact with an upper portion of a cylinder and vaporizes the liquid by supplying the cold heat of the liquid to the upper portion of the cylinder. The vaporization device includes a liquid container which stores the liquid therein in such a manner that the liquid is kept in contact with the upper portion of the cylinder, and an outer container embracing the liquid container and defining a space portion around the liquid container. The space portion communicates with the liquid container and an exhaust vent. Gas vaporized in the liquid container passes between the liquid container and an outer wall surface of a heat insulating material during passage thereof from the liquid container to the exhaust vent through the space portion.
    • 动力回收系统包括:斯特林发动机; 以及蒸发装置,其中以液体与气缸的上部保持接触的方式存储液体,并且通过将液体的冷热供给到气缸的上部而使液体蒸发。 蒸发装置包括:液体容器,其以液体与气缸的上部保持接触的方式存储液体,以及容纳液体容器并限定液体容器周围的空间部分的外部容器。 空间部分与液体容器和排气口连通。 在液体容器中蒸发的气体在液体容器和绝热材料的外壁表面之间通过空间部分从液体容器通过排气口。
    • 62. 发明授权
    • Surface inspection apparatus and surface inspection method
    • 表面检查装置和表面检查方法
    • US09036141B2
    • 2015-05-19
    • US13526989
    • 2012-06-19
    • Terumi ObuchiHiroshi KikuchiYuji InoueNobuhiro ObaraKazuo Takahashi
    • Terumi ObuchiHiroshi KikuchiYuji InoueNobuhiro ObaraKazuo Takahashi
    • G01N21/00G01N21/88G01N21/95
    • G01N21/8851G01N21/9501
    • A surface inspection apparatus includes a blocking unit included in a subsequent processing unit that groups data items into having an arbitrary number of data items. The subsequent processing unit acquires a data item from each of the blocks. The blocking unit changes, in accordance with an instruction transmitted from a state monitoring unit, the number of data items to be blocked. A threshold processing unit acquires data items from the blocking unit that have values larger than a threshold, and transmits the data items to a memory. The state monitoring unit monitors an available capacity of the memory. When the state monitoring unit detects a reduction in the available capacity of the memory, it causes the blocking unit to increase the number of data items to be blocked into each of the blocks so that data does not overflow from the memory.
    • 表面检查装置包括在后续处理单元中包括的分组单元,其将数据项分组成具有任意数量的数据项。 后续处理单元从每个块获取数据项。 阻塞单元根据从状态监视单元发送的指令改变要被阻止的数据项的数量。 阈值处理单元从阻塞单元获取具有大于阈值的值的数据项,并将数据项发送到存储器。 状态监视单元监视存储器的可用容量。 当状态监视单元检测到存储器的可用容量的降低时,其使阻塞单元将要阻塞的数据项的数量增加到每个块中,使得数据不会从存储器溢出。
    • 63. 发明授权
    • Inspection apparatus and inspection method
    • 检验仪器和检验方法
    • US08563958B2
    • 2013-10-22
    • US13328768
    • 2011-12-16
    • Kazuo TakahashiTakahiro Jingu
    • Kazuo TakahashiTakahiro Jingu
    • G01N21/88
    • G01N21/9501G01N2021/8896G01N2021/8928
    • Reflected light caused by the state of the surface of a wafer, a foreign material, or a defect is superimposed on a haze frequency component caused by the type and thickness of a film or a surface irregularity. In order to detect a haze frequency component caused by a haze present on the surface of an object to be inspected, light propagating from the object to be inspected is detected and converted into an electric signal. The electric signal is sampled at a predetermined sampling time interval and converted into digital data. A frequency component caused by a foreign material, a defect or the like is separated from the digital data to ensure that a haze frequency component is selected. The haze frequency component is caused by a stain attached to the surface of the wafer, hazy tarnish, a surface irregularity or the like.
    • 由晶片的表面状态,异物或缺陷引​​起的反射光叠加在由膜的类型和厚度或表面不规则性引起的雾度频率分量上。 为了检测由待检查物体的表面上存在的雾度引起的雾度频率分量,检测从被检查物体传播的光,并将其转换为电信号。 以预定的采样时间间隔采样电信号并将其转换为数字数据。 由异物引起的频率分量,缺陷等与数字数据分离,以确保选择雾度频率分量。 雾度频率分量由附着在晶片表面的污迹,模糊晦暗,表面不规则等引起。
    • 66. 发明授权
    • Guide-layer separated optical recording medium, optical recording medium drive apparatus, and recording layer access method
    • 导向层分离光记录介质,光记录介质驱动装置和记录层访问方法
    • US08411551B2
    • 2013-04-02
    • US13380729
    • 2009-06-25
    • Kazuo Takahashi
    • Kazuo Takahashi
    • G11B7/24
    • G11B7/00736G11B7/0945G11B7/24038G11B7/2405
    • A guide-layer separated optical recording medium includes a guide layer with a guide track formed therein and a plurality of recording layers, these layers being separately deposited from each other. A layer position information region for indicating position information of each of the recording layers, is formed on the guide track within a different range of the guide layer for each of the recording layers. Each of the recording layers includes a preformat region having a predetermined signal written on a record track along the guide track, and the preformat region on each of the recording layers is provided in a region corresponding to the layer position information region. An optical recording medium drive apparatus and a recording layer access method for the guide-layer separated optical recording medium are also provided. The apparatus and method implement: determining whether a reproduced signal has been obtained, based on the detection level of a reflected beam from the preformat region by a read/write optical system; acquiring position information of one of the plurality of recording layers based on the detection level of a reflected beam from a layer position information region by a servo optical system; and causing a second laser beam to access a desired one of the plurality of recording layers in accordance with the determination result of the reproduced signal and the position information.
    • 引导层分离的光记录介质包括其中形成有导轨的引导层和多个记录层,这些层彼此分开沉积。 用于指示每个记录层的位置信息的层位置信息区域形成在每个记录层的引导层的不同范围内的导轨上。 每个记录层包括具有沿着导轨写入记录轨道的预定信号的预格式化区域,并且每个记录层上的预格式化区域设置在对应于层位置信息区域的区域中。 还提供了用于引导层分离的光学记录介质的光记录介质驱动装置和记录层存取方法。 该装置和方法实现:通过读/写光学系统,基于来自预格式化区域的反射光束的检测电平,确定是否已经获得再现信号; 基于来自层位置信息区域的反射光束的检测水平,通过伺服光学系统获取多个记录层中的一个记录层的位置信息; 以及根据再现信号和位置信息的确定结果使第二激光束访问多个记录层中期望的一个。
    • 68. 发明授权
    • Inspection apparatus and inspection method
    • 检验仪器和检验方法
    • US08101935B2
    • 2012-01-24
    • US12272211
    • 2008-11-17
    • Kazuo TakahashiTakahiro Jingu
    • Kazuo TakahashiTakahiro Jingu
    • G01N21/88
    • G01N21/9501G01N2021/8896G01N2021/8928
    • Reflected light caused by the state of the surface of a wafer, a foreign material or a defect is superimposed on a haze frequency component caused by the type and thickness of a film or a surface irregularity. It has therefore been difficult to accurately measure the haze frequency component by use of a fixed threshold value. In order to detect a haze frequency component caused by a haze present on the surface of an object to be inspected, light propagating from the object to be inspected is detected and converted into an electric signal. The electric signal is sampled at a predetermined sampling time interval and converted into digital data. A frequency component caused by a foreign material, a defect or the like is separated from the digital data to ensure that a haze frequency component is selected. The haze frequency component is caused by a stain attached to the surface of the wafer, hazy tarnish, a surface irregularity or the like.
    • 由晶片表面的状态,异物或缺陷引​​起的反射光叠加在由膜的类型和厚度或表面不规则性引起的雾度频率分量上。 因此,难以通过使用固定的阈值来精确地测量雾度频率分量。 为了检测由待检查物体的表面上存在的雾度引起的雾度频率分量,检测从被检查物体传播的光,并将其转换为电信号。 以预定的采样时间间隔采样电信号并将其转换为数字数据。 由异物引起的频率分量,缺陷等与数字数据分离,以确保选择雾度频率分量。 雾度频率分量由附着在晶片表面的污迹,模糊晦暗,表面不规则等引起。
    • 69. 发明申请
    • OPTICAL DISK DRIVE DEVICE AND ADDITIONAL RECORDING METHOD
    • 光盘驱动装置及附加记录方法
    • US20110188358A1
    • 2011-08-04
    • US13122101
    • 2008-10-03
    • Kazuo TakahashiMasaharu Nakano
    • Kazuo TakahashiMasaharu Nakano
    • G11B7/09
    • G11B7/0945G11B7/08505G11B2007/0013
    • Disclosed herein are an optical recording medium driving device and an additional recording method, which performs tracking servo control for moving an objective lens in a direction orthogonal to a tangential direction of a guide track so that a guide tracking error signal is decreased with respect to a guide track of a guide layer separation type recording medium, detects an additional recording start position subsequent to a recorded track if the recorded track is present in a recording layer of the optical recording medium, generates a tracking correction signal according to the reproduction tracking error signal upon tracking servo control of the recorded track just before the additional recording start position, and corrects tracking servo control according to the tracking correction signal upon additional recording start.
    • 本文公开了一种光记录介质驱动装置和附加记录方法,其执行跟踪伺服控制,用于在与导轨的切线方向正交的方向上移动物镜,使得引导跟踪误差信号相对于 引导层分离型记录介质的引导轨迹,如果记录的轨道存在于光记录介质的记录层中,则检测记录轨道之后的附加记录开始位置,根据再现跟踪误差信号产生跟踪校正信号 在附加记录开始位置之前跟踪记录的轨道的伺服控制,并且在附加记录开始时根据跟踪校正信号来校正跟踪伺服控制。