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    • 70. 发明授权
    • Circular arc illumination apparatus
    • 圆弧照明装置
    • US5390044A
    • 1995-02-14
    • US70686
    • 1993-06-02
    • Tatsuo ItoToshiyuki WatanabeMasaki Suzuki
    • Tatsuo ItoToshiyuki WatanabeMasaki Suzuki
    • G02B17/00G02B26/10G03F7/20G02B26/08
    • G02B26/10
    • A circular arc illumination apparatus includes a light source device, a condensing optical system for condensing rays emitted by the light source device, and a scanning optical system for transmitting the rays to an object to be scanned. The scanning optical system includes a driving device, a rotating mirror driven by the driving device, an angular velocity detecting device for detecting an angular velocity of the rotating mirror, a controller for controlling the driving device based on an angular velocity of the rotating mirror detected by the angular velocity detecting device so as to vary the angular velocity in one time scanning, and a circular arc-shaped bending mirror for reflecting scanning rays reflected by the rotating mirror to the object. The axis of the bending mirror is coincident with a rotary axis of the rotating mirror.
    • 一种圆弧照明装置,包括:光源装置,用于聚光由光源装置发射的光的聚光光学系统;以及用于将光线传输到被扫描物体的扫描光学系统。 扫描光学系统包括驱动装置,由驱动装置驱动的旋转镜,用于检测旋转镜的角速度的角速度检测装置,用于基于检测到的旋转镜的角速度来控制驱动装置的控制器 通过角速度检测装置对一次扫描中的角速度进行变化;以及圆弧形弯曲镜,用于将由旋转镜反射的扫描光线反射到物体。 弯曲镜的轴线与旋转镜的旋转轴线重合。