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61. 发明申请

US20110287374A1 FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE 有权
标题翻译：浮动接口的浮动阀门
公开(公告)号：US20110287374A1
公开(公告)日：2011-11-24
申请号：US13195592
申请日：2011-08-01
申请人： John M. White , Shinichi Kurita , Takayuki Matsumoto
发明人： John M. White , Shinichi Kurita , Takayuki Matsumoto
IPC分类号： F26B11/00
CPC分类号： F16K51/02 , Y10S438/905 , Y10T29/49412
摘要： The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.
摘要翻译：本发明通常包括用于与室连接的浮动狭缝阀。浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。狭缝阀可以联接在两个腔室之间。当与狭缝阀联接的室被加热时，狭缝阀也可以通过传导加热。当狭缝阀被加热时，它可以热膨胀。当在室中抽真空时，狭缝阀可能由于真空偏转而变形。通过在室和狭缝阀之间设置低摩擦材料间隔件，狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室，因此不会产生不期望的颗粒污染物。此外，穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。

62. 发明授权

US07988129B2 Floating slit valve for transfer chamber interface 有权
标题翻译：用于传送室接口的浮动狭缝阀
公开(公告)号：US07988129B2
公开(公告)日：2011-08-02
申请号：US12040291
申请日：2008-02-29
申请人： John M. White , Shinichi Kurita , Takayuki Matsumoto
发明人： John M. White , Shinichi Kurita , Takayuki Matsumoto
IPC分类号： F16K3/00
CPC分类号： F16K51/02 , Y10S438/905 , Y10T29/49412
摘要： The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.
摘要翻译：本发明通常包括用于与室连接的浮动狭缝阀。浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。狭缝阀可以联接在两个腔室之间。当与狭缝阀联接的室被加热时，狭缝阀也可以通过传导加热。当狭缝阀被加热时，它可以热膨胀。当在室中抽真空时，狭缝阀可能由于真空偏转而变形。通过在室和狭缝阀之间设置低摩擦材料间隔件，狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室，因此不会产生不期望的颗粒污染物。此外，穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。

63. 发明申请

US20100327162A1 IN-LINE ELECTRON BEAM TEST SYSTEM 有权
标题翻译：在线电子束测试系统
公开(公告)号：US20100327162A1
公开(公告)日：2010-12-30
申请号：US12826635
申请日：2010-06-29
申请人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01N23/00
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

64. 发明申请

US20100281683A1 ELECTRONIC DEVICE MANUFACTURING CHAMBER AND METHODS OF FORMING THE SAME 审中-公开
标题翻译：电子设备制造室及其形成方法
公开(公告)号：US20100281683A1
公开(公告)日：2010-11-11
申请号：US12840262
申请日：2010-07-20
申请人： John M. White , Donald Verplancken , Shinichi Kurita
发明人： John M. White , Donald Verplancken , Shinichi Kurita
IPC分类号： B23P19/00
CPC分类号： H01L21/67236 , H01L21/67196 , Y10S414/135 , Y10S414/139 , Y10T29/49826 , Y10T29/53
摘要： A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.
摘要翻译：提供非多边形形状的多片式室。非多边形多片式室可以包括（1）具有第一侧和第二侧的中心件，（2）适于与中心件的第一侧连接的第一侧件，以及（3）适于与中心件的第二侧联接的第二侧件。当连接在一起时，中心件，第一侧件和第二侧件形成圆柱形的整体形状。提供了许多其他方面。

65. 发明授权

US07681986B2 Methods and apparatus for depositing ink onto substrates 失效
标题翻译：用于在基材上沉积墨的方法和设备
公开(公告)号：US07681986B2
公开(公告)日：2010-03-23
申请号：US11761832
申请日：2007-06-12
申请人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
发明人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
IPC分类号： B41J2/25
CPC分类号： B41J2/2132
摘要： Embodiments of an ink jet printing system include a motion stage adapted to move a substrate having a display object in a printing direction and a first printing assembly mounted over the motion stage including a set of print heads aligned and arranged consecutively in the printing direction such that the display object moves under the print heads sequentially. Embodiments of a method of ink jet printing include moving a substrate under the print heads of printing assembly sequentially in a printing direction, activating alternate ink jetting channels within each print head of the first printing assembly, activating corresponding channels within adjacent print heads in the first printing assembly alternately, and depositing ink in alternating sub-pixels within one or more pixels on the substrate.
摘要翻译：喷墨打印系统的实施例包括适于在打印方向上移动具有显示对象的基板的运动台和安装在运动台上的第一印刷组件，该第一印刷组件包括在打印方向上对齐和排列的一组打印头，使得显示对象顺序地在打印头下移动。喷墨打印方法的实施例包括在打印方向上顺序地移动印刷组件的打印头下的基板，激活第一印刷组件的每个打印头内的交替喷墨通道，在第一印刷组件的相邻打印头内激活相应的通道交替地印刷组件，并且在基板上的一个或多个像素内的交替子像素中沉积墨。

66. 发明申请

US20100050534A1 SLOTTED TSSL DOOR TO COUPLE O-RING WITH MOVING MATING PART 有权
标题翻译：滑动TSSL门与移动部件接合O形圈
公开(公告)号：US20100050534A1
公开(公告)日：2010-03-04
申请号：US12548553
申请日：2009-08-27
申请人： Mehran Behdjat , Shinichi Kurita , John M. White , Suhail Anwar , Makoto Inagawa
发明人： Mehran Behdjat , Shinichi Kurita , John M. White , Suhail Anwar , Makoto Inagawa
IPC分类号： E06B7/16 , E06B3/00
CPC分类号： H01L21/67201 , F16K15/147 , F16K51/02 , H01L21/67126
摘要： Embodiments disclosed herein generally relate to a slit valve door assembly for sealing an opening in a chamber. A slit valve door that is pressed against the chamber to seal the slit valve opening moves with the chamber as the slit valve opening shrinks so that an o-ring pressed between the slit valve door and the chamber may move with the slit valve door and the chamber. Thus, less rubbing of the o-ring against the chamber may occur. With less rubbing, fewer particles may be generated and the o-ring lifetime may be extended. With a longer lifetime for the o-ring, substrate throughput may be increased.
摘要翻译：本文公开的实施例通常涉及用于密封腔室中的开口的狭缝阀门组件。当狭缝阀开口收缩时，被压靠在腔室上以密封狭缝阀开口的狭缝阀门随着腔室移动，使得压紧在狭缝阀门和腔室之间的O形环可以与狭缝阀门一起移动，并且房间。因此，可能会发生O形环相对于室的摩擦较少。随着摩擦的减少，可能产生更少的颗粒，并且可以延长O形环的寿命。随着O形圈的寿命更长，衬底产量可能会增加。

67. 发明申请

US20090321397A1 LASER-SCRIBING PLATFORM 审中-公开
标题翻译：激光扫描平台
公开(公告)号：US20090321397A1
公开(公告)日：2009-12-31
申请号：US12422200
申请日：2009-04-10
申请人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Bejamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang
发明人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Bejamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang
IPC分类号： B23K26/38
CPC分类号： B23K26/0838 , B23K26/082 , B23K26/364 , B23K26/40 , B23K2103/172
摘要： Laser-scribing systems and translation stages operable to support a workpiece during laser scribing are provided. A laser-scribing system includes a base section, a bed supported by the base section, a laser, a first driving mechanism operable to move a workpiece longitudinally along the bed, and a second driving mechanism. The bed comprises a movable section configured to translate with respect to the base section. The movable section comprises a gap to allow a laser beam to pass through. The laser is positioned to direct the laser beam through the gap. The second driving mechanism is operable to laterally translate the laser and the movable section in order to scribe a pattern on the workpiece.
摘要翻译：提供激光划线系统和可操作以在激光划线期间支撑工件的平移台。激光划线系统包括基部，由基部支撑的床，激光器，可操作以沿着床沿纵向移动工件的第一驱动机构和第二驱动机构。该床包括被配置为相对于基部平移的可移动部分。可移动部分包括允许激光束通过的间隙。激光被定位成将激光束引导通过间隙。第二驱动机构可操作以横向平移激光器和可移动部分，以便在工件上刻划图案。

68. 发明申请

US20090114153A1 METHOD AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER 审中-公开
标题翻译：用于密封加工室的开口的方法和装置
公开(公告)号：US20090114153A1
公开(公告)日：2009-05-07
申请号：US12252055
申请日：2008-10-15
申请人： Shinichi Kurita , Takayuki Matsumoto , Robin L. Tiner , John M. White , Suhail Anwar
发明人： Shinichi Kurita , Takayuki Matsumoto , Robin L. Tiner , John M. White , Suhail Anwar
IPC分类号： C23C16/513 , B65D51/00 , B65D53/00 , B65D43/14 , B65D43/26
CPC分类号： C23C16/54 , C23C16/45517
摘要： A method and apparatus for sealing an opening of a processing chamber are provided. In one embodiment, the invention generally provides a closure member integrated within a wall of a process chamber for sealing an opening within the wall of the chamber. In another embodiment, the invention provides a closure member configured to seal an opening in the wall of a processing chamber from the inside of the chamber.
摘要翻译：提供一种用于密封处理室的开口的方法和装置。在一个实施例中，本发明通常提供集成在处理室的壁内的封闭构件，用于密封腔室壁内的开口。在另一个实施例中，本发明提供了一种封闭构件，其构造成将处理室的壁中的开口与室的内部密封。

69. 发明申请

US20070222817A1 METHODS AND APPARATUS FOR INKJET PRINTING USING MULTIPLE SETS OF PRINT HEADS 审中-公开
标题翻译：使用多组打印头进行喷墨打印的方法和装置
公开(公告)号：US20070222817A1
公开(公告)日：2007-09-27
申请号：US11690507
申请日：2007-03-23
申请人： Shinichi Kurita , Quanyuan Shang , John M. White
发明人： Shinichi Kurita , Quanyuan Shang , John M. White
IPC分类号： B41J2/15
CPC分类号： B41J2/15 , B41J2/2135 , B41J3/28 , B41J3/543 , B41J11/008 , B41J11/0085 , B41J11/06 , G02F1/133516
摘要： In a first aspect, a system is provided for inkjet printing. The system includes (1) a first set including a first inkjet print head having a first plurality of nozzles adapted to selectively dispense a first ink, and a second inkjet print head having a second plurality of nozzles adapted to selectively dispense a second ink, (2) a second set including a third inkjet print head having a third plurality of nozzles adapted to selectively dispense a third ink and a fourth inkjet print head having a fourth plurality of nozzles adapted to selectively dispense a fourth ink and (3) a stage adapted to support and transport the substrate below the first and second sets during a printing pass such that the first set and second sets are adapted to dispense respective first/second and third/fourth inks into adjacent color wells of a display pixel on a substrate.
摘要翻译：在第一方面，提供一种用于喷墨打印的系统。该系统包括（1）第一组，其包括具有适于选择性地分配第一油墨的第一多个喷嘴的第一喷墨打印头和具有适于选择性分配第二墨的第二多个喷嘴的第二喷墨打印头（ 2）包括第三喷墨打印头的第二组，其具有适于选择性地分配第三墨的第三多个喷嘴和具有适于选择性地分配第四墨的第四多个喷嘴的第四喷墨打印头，以及（3）适于以在打印通过期间支撑并运输基板在第一和第二组之下，使得第一组和第二组适于将相应的第一/第二和第三/第四墨水分配到基板上的显示像素的相邻色阱中。

70. 发明申请

US20070166133A1 Decoupled chamber body 有权
标题翻译：解耦室体
公开(公告)号：US20070166133A1
公开(公告)日：2007-07-19
申请号：US11332781
申请日：2006-01-13
申请人： Jae-Chull Lee , Shinichi Kurita , John M. White , Suhail Anwar
发明人： Jae-Chull Lee , Shinichi Kurita , John M. White , Suhail Anwar
IPC分类号： H01L21/677 , H01L21/306 , C23C16/00 , B65H1/00
CPC分类号： H01L21/67201 , Y10S414/139
摘要： Embodiments of the invention include a chamber body having at least one of a top or bottom decoupled from the sidewalls of the chamber body. The invention is suitable for use as a load lock chamber, substrate transfer chamber and vacuum processing chambers, among others.
摘要翻译：本发明的实施例包括室主体，其具有从腔体的侧壁分离的顶部或底部中的至少一个。本发明适用于负载锁定室，基板传送室和真空处理室等。

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