专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

61. 发明专利

JPH10175721A OBJECT TO BE TRANSPORTED DETECTOR AND DETECTING METHOD THEREFOR 失效
公开(公告)号：JPH10175721A
公开(公告)日：1998-06-30
申请号：JP33794896
申请日：1996-12-18
申请人： HITACHI LTD
发明人： MATSUMURA YASUHIDE , KANETOMO MASABUMI , YAMAMOTO TATSUHARU , HARADA KUNIO , KASHIMA HIDEO , SUGAYA MASAKAZU
IPC分类号： G01V1/00 , B65G43/08 , G01R31/00 , H01L21/67 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To detect presence or absence of a substrate and deviation of the substrate from a blade on which the substrate is mounted while the substrate is transported by exciting the blade and measuring outputs of a vibration frequency and each frequency by a vibration detector. SOLUTION: A vibration exciter 4 and a vibration detector 5 are fixed to the rear surface of a blade 2 of a wafer carrier robot 3. When a wafer is placed at its normal location for the blade 2, the blade 2 is exited by the vibration exciter 4, vibration of the blade 2 is measured by a vibration detector 5, the output is passed through a band pass filter and the output is defined as an output A. When a wafer is not mounted on the blade 2, a frequency changes for the natural frequency when the wafer is placed at its normal location in the natural frequency of this system. When the output of the vibration detector 5 is passed through the band pass filter, the output becomes smaller than A. Thus, a large difference is generated between an output in a state that the wafer is mounted and output in a state that the wafer, and presence or absence of the wafer can be detected.

62. 发明专利

JPH03104068A LOADING / UNLOADING METHOD AND DEVICE FOR MAGNETIC HEAD AND MAGNETO-OPTICAL DISK DEVICE WITH THE SAME 失效
公开(公告)号：JPH03104068A
公开(公告)日：1991-05-01
申请号：JP23999289
申请日：1989-09-18
申请人： HITACHI LTD
发明人： HARADA KUNIO , KAKU TOSHIMITSU , KASAI MASUO , OSHIMA MASAHIRO
IPC分类号： G11B11/10 , G11B21/12
摘要： PURPOSE:To enable high-speed access by loading a magnetic head according to the value of a head fitting part to a disk surface with rigidity more then a specified value and unloading the magnetic head with rigidity less than the specified value. CONSTITUTION:In an unload state that an upper plate 17 is moved so as to be separated from a magnetic head 8, fitting parts 12 of the upper plate 17, thin leaf spring 13, lower plate 15 and head 8 are dispersed mechanically and the head 8 is supported by the leaf spring 13. At such a time, the rigidity is less than 1g/mm at the left end of the fitting part. At such a time, the supporting point of the head 8 is set on the upper surface of the leaf spring 13, and at the right end of the upper plate 17. In a load state the upper plate 17 is moved so as to be close to the head 8, the fitting parts 12 of the upper plate 17, leaf spring 13, lower plate 13 and fitting part 12 are combined and made integral mechanically and at such a time, the rigidity is more than 5kg/mm at the left end of the fitting part 12. At such a time, the supporting point of the head 8 is the right end of the leaf spring 13.

63. 发明专利

JPH0373449A MAGNETIC FIELD MODULATION TYPE MAGNETO-OPTICAL DISK DEVICE 失效
公开(公告)号：JPH0373449A
公开(公告)日：1991-03-28
申请号：JP20779189
申请日：1989-08-14
申请人： HITACHI LTD
发明人： KAKU TOSHIMITSU , KASAI MASUO , HARADA KUNIO , OSHIMA MASAHIRO
IPC分类号： G11B11/10 , G11B5/02 , G11B11/105
摘要： PURPOSE:To prevent the occurrence of collision at the time of loading/ejecting a disk cartridge by providing the disk device with a mechanism capable of vertically moving a magnetic head at the time of loading the cartridge to the device. CONSTITUTION:Since the magnetic head 5 for modulating a magnetic field supplies a sufficiently large magnetic field to a recording film, the head 5 floats the surface of a magneto-optical disk 3 with a gap >= 10mu. In order to attain the replaceability of the disk 3, the disk 3 stored in a cartridge 17 is loaded/ ejected to/from the device. The disk device is provided with the mechanism for preventing the accurence of collision by moving an optical head 2 to the outermost periphery and vertically moving the magnetic head 5 at the time of loading/ejecting the disk 3 into/from the device. Consequently, the magnetic head 5 can be prevented from colliding with the disk cartridge 17 at the time of loading/ejecting the cartridge 17.

64. 发明专利

JPS6394543A PLASMA X-RAY GENERATOR 失效
公开(公告)号：JPS6394543A
公开(公告)日：1988-04-25
申请号：JP23919586
申请日：1986-10-09
申请人： HITACHI LTD
发明人： KATO YASUO , OCHIAI ISAO , MIYATA TOSHIMITSU , HARADA KUNIO
IPC分类号： H05G2/00 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/00
摘要： PURPOSE:To prevent the breakage of an insulator and improve the life and reliability of a discharge tube by insulating between plasma focusing coaxial electrodes and using porcelain as an insulator which triggers the plasma motion by the creeping discharge as the voltage is applied. CONSTITUTION:A discharge tube 4 containing electrodes 1, 2 arranged coaxially via an insulator 3 is filled with gas, the pulse voltage is applied across the electrodes 1, 2 from a capacitor 6 to generate plasma on the surface of the insulator 3, plasma is focused near the tips of the electrodes 1, 2 to form high- temperature and high-density plasma, and soft X-rays are generated. The insulator 3 is made of porcelain. By using porcelain as the insulator 3 insulating the coaxial electrodes 1, 2, a soft X-ray source which has high reliability and is stable and highly efficient can be obtained for the purpose to repeat a tremendous number of discharges at high frequencies such as lithography.

65. 发明专利

JPS6019682A LIFTING MAGNET 失效
公开(公告)号：JPS6019682A
公开(公告)日：1985-01-31
申请号：JP12936384
申请日：1984-06-25
申请人： HITACHI LTD , HITACHI ELECTRIC SYSTEMS
发明人： ITOU SUSUMU , AOSHIMA MASARU , SOTODATE AKIYOSHI , WACHI TADASHI , KADOWAKI TAKASHI , HARADA KUNIO , ABE TERUKI , KOBASHI MASARU , SHINOHARA YASUSHI , UEISHI ISAMU
IPC分类号： B66C1/06 , B66C1/00

66. 发明专利

JP2004012411A EMISSION DETECTING APPARATUS 审中-公开
公开(公告)号：JP2004012411A
公开(公告)日：2004-01-15
申请号：JP2002169752
申请日：2002-06-11
申请人： HITACHI LTD
发明人： KAMAHORI MASAO , HARADA KUNIO , KANBARA HIDEKI
IPC分类号： G01N33/53 , C12M1/00 , C12N15/09 , G01N21/76 , G01N27/416 , G01N33/566
摘要： PROBLEM TO BE SOLVED: To provide a compact, simple DNA sequence and modification detecting apparatus that simultaneously detects a number of samples with high sensitivity. SOLUTION: A plurality of reaction cells 27 for performing DNA extension reaction and bioluminescence reaction, and a photo detector 29 for detecting emission from the reaction cells are adherently arranged while they correspond by one to one in a vertical direction. Additionally, the plurality of reaction cells and a capillary 25 for injecting a chemical liquid are arranged while they correspond by one to one in a vertical direction, a chemical liquid is injected collectively and simultaneously to the reaction cells from an upper, vertical direction, and the emission from the reaction cells is detected from a lower, vertical direction. COPYRIGHT: (C)2004,JPO

67. 发明专利

JP2000277422A ELECTRON BEAM LITHOGRAPHY EQUIPMENT 失效
公开(公告)号：JP2000277422A
公开(公告)日：2000-10-06
申请号：JP8343799
申请日：1999-03-26
申请人： HITACHI LTD
发明人： SATO HIDETOSHI , TSUJI HIROSHI , HARADA KUNIO , HAYATA YASUNARI
IPC分类号： H01L21/027 , G03F7/20 , H01J37/18 , H01J37/20 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To raise the operation ratio of a device for improved productivity, with no degraded drawing precision. SOLUTION: The parts which directly contacts a wafer 10 on an X-Y stage such as an electrostatic chuck 7, an earth needle 6, a wafer rotation correcting mechanism 8 (upper part of stage) are detachable from the X-Y stage. The upper part of stage can be carried to a stage adjusting chamber 30 of a small volume newly provided independent of a large-volume vacuum chamber where an electron beam drawing is performed, or to a sample exchange chamber, and the small-volume chamber is allowed to be atmospheric condition for replacement of the earth needle 6 of the stage upper part, as well as cleaning of an attractive surface of the electrostatic chuck 7.

68. 发明专利

JPH11219998A METHOD OF TRANSFERRING THIN PLATE WORK TO PROCESSING HOLDER 失效
公开(公告)号：JPH11219998A
公开(公告)日：1999-08-10
申请号：JP2295498
申请日：1998-02-04
申请人： HITACHI LTD
发明人： ISHIDA YOSHIHIRO , MORIYAMA SHIGEO , HARADA KUNIO , SUGAYA MASAKAZU , KUGAYA TAKASHI , OTSUKI SHIGEO , KAWAI AKINARI , NISHIMURA SADAYUKI
IPC分类号： H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To keep the centers of a processing holder and a transfer pad aligned with each other by a method wherein a wafer is restrained from moving sideways in a horizontal direction by a surface tension layer formed between the upside of the transfer pad and the underside of the water, and a main centering operation is carried out resting on the basis of the outer shape of a control ring provided to the underside of a processing holder. SOLUTION: A small amount of pure water 4 is made to flow constantly over the upside of a transfer pad 2 to form a surface tension layer 4a. In this state, when a wafer 1 is placed thereon, the wafer 1 is prevented from moving sideways in a horizontal direction by the physical action of a surface tension. Then, the transfer pad 2 is made to descend according to the timing of a processing holder 3, and a tapered ring 5 and a press pin 23 are made to descend last. When the tapered ring 5 descends, a plate cam 19 descends together through the intermediary of a finger support 17 engaged with the tapered ring 5, a finger 6 moves in a closing direction along the shape of the plate cam 19 and stops when the upper inner wall 6a of the finger 6 is brought into contact with the outer shape of a control ring 7. At this point, the diameter of an inscribed circle formed with the middle inner wall 6b of the finger 6 is so set as to satisfy a formula, diameter of wafer

69. 发明专利

JPH08330395A SUBSTRATE MANIPULATOR 失效
公开(公告)号：JPH08330395A
公开(公告)日：1996-12-13
申请号：JP12999995
申请日：1995-05-29
申请人： HITACHI LTD
发明人： MIYATA TOSHIMITSU , HARADA KUNIO , FUJITA MINORU , MURAKAMI HIDEKAZU
IPC分类号： C30B25/10 , C30B25/12 , H01L21/203 , H01L21/205 , H01L21/68 , H01L21/683
摘要： PURPOSE: To reduce a heavy metal contamination to a substrate and make the quality of a semiconductor thin film formed on the substrate good, by covering with quartz a heating source and the portions of their temperatures being increased through the heating source. CONSTITUTION: In a substrate manipulator for performing the substrate heating of the device for forming a semiconductor thin film in a vacuum, a heating source 3 opposed to a substrate 6 and the portions of their temperatures being increased by the heating source 3 are covered with quartz to reduce a heavy metal contamination to the substrate 6. For example, the heating portion of the substrate manipulator has several sheets of thermal shield plates 9 on an SiC heater 3, and is fastened to a thermal insulation plate 10 made of alumina. The thermal insulation plate 10 is fastened to a metallic plate 12 via a spacer 11, and the whole of the heating portion has the structure of it being held by a holder 13. Further, the whole of the heating portion comprising the SiC heater 3 and the thermal shield plates 9, etc., is covered with a quartz cover 5, and the substrate 6 is mounted on a substrate holder 7 made of quartz to be heated by the SiC heater 3 via the quartz cover 5.

70. 发明专利

JPH08159231A SCREW FEEDING MECHANISM AND RECTILINEARLY MOVING STAND FOR ULTRA-HIGH-VACUUM HAVING ITS MECHANISM 失效
公开(公告)号：JPH08159231A
公开(公告)日：1996-06-21
申请号：JP30187094
申请日：1994-12-06
申请人： HITACHI LTD
发明人： HARADA KUNIO , MORIYAMA SHIGEO , ITO MASAAKI , KANETOMO MASABUMI , MATSUBARA TOSHIYUKI
IPC分类号： F16H25/20 , F16H25/22 , F16H25/24
摘要： PURPOSE: To provide a screw feeding mechanism by which discharge gas in a vacuum is reduced and rotational resistance is reduced by arranging a radial ball bearing instead of a screw thread of a nut part in the screw feeding mechanism to rectilinearly move the nut part by rotating a screw shaft. CONSTITUTION: In a screw feeding mechanism 3 composed of a screw shaft 7 and a nut part 6, a radial ball bearing 13 by which rolling resistance is reduced and discharge gas is reduced, is arranged between the screw shaft 7 and the nut part 6. An angle part formed by an inside surface 23 of an inner wheel ring 22 of the radial ball bearing 13 and end surfaces 24 and 24' and a screw groove of the screw shaft 7, are brought into rolling contact with each other, and are meshed with each other, and an outer ring 20 of the radial ball bearing 13 is connected to and held by the nut part 6, and the screw shaft 7 is rotated, and the nut part 6 is rectilinearly moved. According to this, rotational resistance can be reduced even in a vacuum where a friction coefficient becomes larger than in the atmosphere, and discharge gas generated from the screw part can be reduced.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式