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61. 发明申请

US20060120425A1 Micro oscillating element 有权
标题翻译：微振荡元件
公开(公告)号：US20060120425A1
公开(公告)日：2006-06-08
申请号：US11290489
申请日：2005-12-01
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： H01S5/00
CPC分类号： G02B26/0841
摘要： A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.
摘要翻译：从由第一导电层，第二导电层和布置在第一导电层和第二导电层之间的绝缘层构成的材料基板一体地形成微振荡元件。该振动元件包括振动部，振动部支承框和扭转接合部。振荡部包括可动功能部。扭转接合部连接振动部和框架，并且还限定振动部的摆动动作的摆动轴。可动功能部是形成在第一导电层中的部分，而框架是形成在第二导电层中的部分。

62. 发明授权

US07453182B2 Micro oscillating element 有权
标题翻译：微振荡元件
公开(公告)号：US07453182B2
公开(公告)日：2008-11-18
申请号：US11290489
申请日：2005-12-01
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： G02B26/0841
摘要： A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.
摘要翻译：从由第一导电层，第二导电层和布置在第一导电层和第二导电层之间的绝缘层构成的材料基板一体地形成微振荡元件。该振动元件包括振动部，振动部支承框和扭转接合部。振荡部包括可动功能部。扭转接合部连接振动部和框架，并且还限定振动部的摆动动作的摆动轴。可动功能部是形成在第一导电层中的部分，而框架是形成在第二导电层中的部分。

63. 发明授权

US08142670B2 Micro-oscillating element and method of making the same 有权
标题翻译：微振动元件及其制造方法
公开(公告)号：US08142670B2
公开(公告)日：2012-03-27
申请号：US12292540
申请日：2008-11-20
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
IPC分类号： B44C1/22 , C25F3/00
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/047 , B81B2203/0109 , B81B2203/058
摘要： A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.
摘要翻译：微振动元件包括框架，可移动功能部分和用于连接框架和功能部分的扭转接头。微振动元件还包括用于产生用于可动功能部分围绕扭转接头的摆动运动的驱动力的第一和第二梳齿电极。第一梳齿电极包括多个第一电极齿，每个第一电极齿具有沿振荡运动方向层叠的第一导体，绝缘体和第二导体，其中第一导体和第二导体彼此电连接。第二梳齿电极包括在不操作期间不面向第二导体而是面对第一电极齿的第一导体的多个第二电极齿。第二电极齿在摆动运动方向上比第一导体长。

64. 发明授权

US08049394B2 Micro oscillating comb tooth element with two interesecting oscillation axes 有权
标题翻译：具有两个整体摆动轴的微型摆动梳齿元件
公开(公告)号：US08049394B2
公开(公告)日：2011-11-01
申请号：US12659975
申请日：2010-03-26
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： G02B26/08 , H02N1/00
CPC分类号： H02N1/008 , G02B26/0841
摘要： A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.
摘要翻译：微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。振荡部包括可动功能部，臂部和第一梳齿电极。臂部分从功能部分延伸。第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。微振荡元件还包括第二梳齿电极，与第一梳齿电极配合，用于使振动部分围绕由扭转接合部分限定的摆动轴线摆动。第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。

65. 发明申请

US20060180883A1 Micro-oscillating element and method of making the same 有权
公开(公告)号：US20060180883A1
公开(公告)日：2006-08-17
申请号：US11352200
申请日：2006-02-13
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
IPC分类号： H01L29/84 , H01L21/00
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/047 , B81B2203/0109 , B81B2203/058
摘要： A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.

66. 发明授权

US09348135B2 Micro movable device and optical switching apparatus 有权
标题翻译：微动移动装置和光开关装置
公开(公告)号：US09348135B2
公开(公告)日：2016-05-24
申请号：US12555246
申请日：2009-09-08
申请人： Tsuyoshi Matsumoto , Norinao Kouma , Osamu Tsuboi
发明人： Tsuyoshi Matsumoto , Norinao Kouma , Osamu Tsuboi
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B2201/042
摘要： A micro movable device includes: a micro movable substrate including a micro movable unit, the micro movable unit including a frame section, a movable section, and a coupling section which couples the frame section and the movable section to each other; a support base; a first spacer and a second spacer which are provided between the frame section of the micro movable substrate and the base, the first and second spacers joining the frame section and the base to each other; and a fixation member provided between the frame section of the micro movable substrate and the base, the fixation member including a spacer portion which joins the frame section and the base to each other and an adhesive portion which covers the spacer portion and joins the frame section and the base to each other, the fixation member being provided between the first and second spacers.
摘要翻译：微型可移动装置包括：微型可移动基板，包括微型可移动单元，微型可移动单元包括框架部分，可移动部分和将框架部分和可移动部分彼此连接的联接部分; 支持基地第一间隔件和第二间隔件，设置在微移动基板的框架部分和基座之间，第一和第二间隔件将框架部分和基座彼此接合; 以及固定构件，其设置在所述微动移动基板的框架部与所述基座之间，所述固定构件包括将所述框架部与所述基部连结的间隔部，以及覆盖所述间隔部的粘合部，并且所述基座彼此相对，所述固定构件设置在所述第一和第二间隔件之间。

67. 发明申请

US20100208347A1 MICRO MOVABLE DEVICE AND INTERFEROMETER 有权
标题翻译： MICRO可移动设备和干扰仪
公开(公告)号：US20100208347A1
公开(公告)日：2010-08-19
申请号：US12614903
申请日：2009-11-09
申请人： Norinao Kouma , Osamu Tsuboi , Tsuyoshi Matsumoto
发明人： Norinao Kouma , Osamu Tsuboi , Tsuyoshi Matsumoto
IPC分类号： G02B27/00 , H02N1/00
CPC分类号： G02B26/0841 , G01J3/4535 , H02N1/006
摘要： A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.
摘要翻译：微型可移动装置包括可移动部件，固定部分和连接到可移动部件和固定部分的连接部分。可动构件包括一对电极。固定部分包括与可动构件的电极配合的一对电极，以产生用于在可移动构件的厚度方向上平移的驱动力。各连接部分连接到可移动部件的连接点彼此间隔开。当沿着两个连接点的间隔方向观察时，可动构件的电极位于两个相互间隔的连接点之间。

68. 发明授权

US08520279B2 Micro movable device and interferometer 有权
标题翻译：微动移动装置和干涉仪
公开(公告)号：US08520279B2
公开(公告)日：2013-08-27
申请号：US12614903
申请日：2009-11-09
申请人： Norinao Kouma , Osamu Tsuboi , Tsuyoshi Matsumoto
发明人： Norinao Kouma , Osamu Tsuboi , Tsuyoshi Matsumoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G01J3/4535 , H02N1/006
摘要： A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.
摘要翻译：微型可移动装置包括可移动部件，固定部分和连接到可移动部件和固定部分的连接部分。可动构件包括一对电极。固定部分包括与可动构件的电极配合的一对电极，以产生用于在可移动构件的厚度方向上平移的驱动力。各连接部分连接到可移动部件的连接点彼此间隔开。当沿着两个连接点的间隔方向观察时，可动构件的电极位于两个相互间隔的连接点之间。

69. 发明申请

US20110222137A1 MICRO-MIRROR ARRAY AND OPTICAL SWITCH 有权
标题翻译：微镜阵列和光开关
公开(公告)号：US20110222137A1
公开(公告)日：2011-09-15
申请号：US12999854
申请日：2010-12-17
申请人： Tsuyoshi Matsumoto , Norinao Kouma , Osamu Tsuboi , Hiroshi Miyata
发明人： Tsuyoshi Matsumoto , Norinao Kouma , Osamu Tsuboi , Hiroshi Miyata
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A micro-mirror array including a plurality of micro-mirror elements and each of the micro-mirror elements includes a mirror rotating around two axes and a support unit connected to an outer frame and supporting the mirror. The support unit extends between the mirror of the micro-mirror elements including the support unit and one of two mirrors adjacent to the mirror, and both ends of the support unit are connected to the outer frame.
摘要翻译：包括多个微镜元件和每个微镜元件的微镜阵列包括围绕两个轴线旋转的镜子和连接到外框架并支撑镜子的支撑单元。支撑单元在包括支撑单元的微反射镜元件的反射镜和与反射镜相邻的两个反射镜中的一个之间延伸，并且支撑单元的两端连接到外框架。

70. 发明授权

US08390911B2 Micro movable element array and a communication apparatus 有权
标题翻译：微动元件阵列和通信装置
公开(公告)号：US08390911B2
公开(公告)日：2013-03-05
申请号：US13225097
申请日：2011-09-02
申请人： Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
发明人： Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
IPC分类号： G02B26/08 , G02B26/10 , G02B26/12
CPC分类号： G02B26/0841
摘要： A micro movable element array includes a first frame; a second frame; a first movable part row including plural first movable parts and a second movable part row including plural second movable parts. The first movable parts include first movable main parts. The second movable parts include second movable main parts. The first and second frames are stacked such that the first and second movable part rows are opposed to each other. In the first movable part row, the first movable parts are located such that the first movable main parts are arranged in a first direction and the first movable main parts and gaps are disposed alternately. In the second movable part row, the second movable parts are located such that the second movable main parts are arranged in the first direction and the second movable main parts are opposed to the corresponding gaps.
摘要翻译：微型可移动元件阵列包括第一框架; 第二帧; 包括多个第一可移动部分的第一可移动部分行和包括多个第二可移动部分的第二可移动部分行。第一可移动部件包括第一可移动主要部件。第二可移动部件包括第二可移动主体部件。第一和第二框架被堆叠成使得第一和第二可移动部件行彼此相对。在第一可动部分行中，第一可移动部分被定位成使得第一可移动主体部分沿第一方向布置，并且第一可移动主体部分和间隙交替设置。在第二可移动部分行中，第二可移动部分被定位成使得第二可移动主体部分沿第一方向布置，并且第二可移动主体部分与相应的间隙相对。

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