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    • 61. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS61253867A
    • 1986-11-11
    • JP9550685
    • 1985-05-07
    • HITACHI LTDHITACHI VLSI ENG
    • TAKEDA EIJIKUME HITOSHISHIMIZU AKIHIRO
    • H01L29/78H01L21/265
    • PURPOSE:To prevent transfer characteristics from deteriorating and to improve reliability of an LDD transistor, by burying in a substrate the peak concentration section of at least one of low concentration impurity layers of the source and drain. CONSTITUTION:On a P-type Si substrate, a gate oxide film 4 is grown on which conductor 6 is deposited. A photosensitive resin film is adhered thereon, under lying films 4, 6 are etched to form a gate section, the photosensitive resin film is removed, and the entire of the wafer is then oxidized. Next, P ions are implanted therein, the entire of the wafer is coated with CVD-SiO2 11 or PSG which is then isotropically-etched so that SiO2 is left only on the gate side wall and then the entire of the wafer is again oxidized to form an oxide film. As ions are implanted, phosphorus silicate glass 5 is deposited on the entire wafer as a protective film, a contact hole is opened for contacting the source and drain, and wiring aluminum is deposited to form a wiring. In this way, charges to be trapped in the gate side wall insulating film 11 can be reduced and deterioration of the transfer conductance can be reduced remarkably.
    • 69. 发明专利
    • Electrical path installation work design method, program, and electrical path installation work design apparatus
    • 电气路径安装工作设计方法,程序和电气路径安装工作设计设备
    • JP2010238048A
    • 2010-10-21
    • JP2009086464
    • 2009-03-31
    • Hitachi Ltd株式会社日立製作所
    • HIRATA TAKAHIROTSUBOTA SHINICHISHIMIZU AKIHIRO
    • G06F17/50
    • PROBLEM TO BE SOLVED: To automatically select an optimum electrical path to be installed in a plant or a route thereof, assemble the electrical paths into a block, while ensuring the safety of a worker to streamline electrical path installation work. SOLUTION: An automatic optimum electrical path design selecting unit 121 of an electrical path installation work design apparatus 1 extracts, when a device model configuring a plant is arranged by using a three-dimensional CAD, cable model data 112 and electrical path model data 116 corresponding to the device model from a material model database 102, and selects an optimum electrical path route, taking into consideration the space factor in design data 120. An optimum electrical path blocking design unit 122 automatically assembles the electrical paths into a block, on the basis of heavy-machine model data 118 of a heavy machine to be used for installation of the electrical paths and an installation space in the design data 120; shows an assembled electrical path installation work on a three-dimensional image 140, and calculates a work schedule, the number of workers and days to be required for the electrical path installation which is to be output as output data 130. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了自动选择要安装在工厂或其路线中的最佳电路,将电路组装成块,同时确保工人的安全性以简化电路安装工作。 电路安装工作设计装置1的自动最佳电路设计选择单元121当通过使用三维CAD来布置配置工厂的设备模型时,提取电缆模型数据112和电路径模型 数据116对应于来自材料模型数据库102的设备模型,并且考虑到设计数据120中的空间因素,选择最佳电路径路径。最佳电路阻挡设计单元122自动将电路组装成块, 基于用于安装电气路径的重型机器的重型机器型号数据118和设计数据120中的安装空间; 示出了三维图像140上的组装电路安装工作,并且计算作为输出数据130输出的电气路径安装所需的工作时间表,工作人员数和工作日数。版权所有: (C)2011,JPO&INPIT