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61. 发明专利

JPH01319675A VACUUM TREATMENT SYSTEM AND CONTROL METHOD THEREOF 失效
公开(公告)号：JPH01319675A
公开(公告)日：1989-12-25
申请号：JP15231188
申请日：1988-06-22
申请人： HITACHI LTD
发明人： KATAOKA HIROYUKI , FURUSAWA KENJI , ABE KATSUO , DAIROKU NORIYUKI , KAWANA TAKESHI , KOKADO YUICHI , NAKAZATO JUN , HAYASHI MASAAKI
IPC分类号： C23C14/52 , C23C14/56
摘要： PURPOSE:To allow the free additional installation and removal of vacuum chambers and to improve the treatment speed over the entire part of the system by connecting plural units of the vacuum chambers by connecting means and providing means of synchronizing the carry in and out of objects to be treated between the vacuum chambers. CONSTITUTION:The respective vacuum chambers including a charge heating chamber 3, a heating chamber 4, sputtering chambers 5, 6, a magnetic characteristic measuring atmosphere isolating chamber 7, a CVD chamber 8, a cooling chamber 9, a taking out chamber 10, etc., are joined by the means such as door valve-contg. flanges 11, etc., to form the vacuum treatment system. The operations of the flanges 11 are controlled by the vacuum chambers on the side the carry out ports of which are connected to the flanges 11. Chamber control computers 13 are mounted to the respective vacuum chambers and are connected with each other by communication circuits 31; further, a host computer 14 to control the entire part of the system is connected. The operations to repeat the operations for the carry in of pallets, treatment or measurement and carry out of the pallets are programmed in the chamber control computers 13. The above-mentioned two computers 13, 14 operate cooperatively to synchronize the carry in and out operations between two units of the vacuum chambers.

62. 发明专利

JPH01259167A SPUTTERING ELECTRODE 失效
公开(公告)号：JPH01259167A
公开(公告)日：1989-10-16
申请号：JP8503988
申请日：1988-04-08
申请人： HITACHI LTD
发明人： KATAOKA HIROYUKI , ABE KATSUO , FURUSAWA KENJI
IPC分类号： C23C14/36 , C23C14/35
摘要： PURPOSE:To keep the intensity of a magnetic field constant with a simple mechanism by separating a magnet unit into a magnetic pole part and a yoke part and providing the transferring mechanisms by which the former and the latter are transferred in the specified directions respectively. CONSTITUTION:A magnet unit is separated into a magnetic pole part 1 and a yoke part 5 and the magnetic pole part 1 is constituted by integrally joining a central magnet 2 to the peripheral magnets 3 with the fixing members 4. A first and second transferring mechanisms 6, 9 are connected to the magnetic pole part 1 and the yoke part 9 respectively so that the magnetic pole part 1 and the yoke part 9 can be transferred. The magnetic pole part 1 is reciprocated and transferred by the transferring mechanism 6 on the straight line shown by an arrow (a) via a shaft 8 with a motor 7 in the face parallel to the surface of a target plate 13. On the other hand, the yoke part 5 is reciprocated and transferred by the transferring mechanism 9 on the straight line shown in an arrow (b) via a shaft 11 with a motor 10 to the vertical direction for the magnetic pole part 1.

63. 发明专利

JPS62165590A SCROLL TYPE FLUID MACHINE 失效
公开(公告)号：JPS62165590A
公开(公告)日：1987-07-22
申请号：JP864286
申请日：1986-01-17
申请人： SHIN MEIWA IND CO LTD , HITACHI LTD
发明人： TANIGUCHI TADASHI , KATAOKA HIROYUKI , MACHIDA SHIGERU , MATSUBARA KATSUMI
IPC分类号： F04C25/02 , F04C18/02
摘要： PURPOSE:To reduce noise, by providing a means for communicating a center chamber communicated with a discharge port formed between the laps of a pair of scroll members, with a closed chamber outside thereof. CONSTITUTION:Grooves 20a-20c are formed in the wind starting sections of the laps 1b, 2b of stationary and turning scrolls along the winding directions thereof. With the grooves 20a-20c a center chamber B communicated with a discharge port 3 and a closed chamber A outside the chamber B are communicated with each other. Accordingly, the wind starting sections of both laps 1b, 2b are separated from each other after the pressure differential between both chambers A, B has lowered. Therefore, the displacement of gas which occurs during the separation is made to be moderate in comparison with that of conventional one, thereby it is possible to reduce noise.

64. 发明专利

JPS61294638A PRODUCTION OF MAGNETIC DISK 失效
公开(公告)号：JPS61294638A
公开(公告)日：1986-12-25
申请号：JP13408985
申请日：1985-06-21
申请人： HITACHI LTD
发明人： KATAOKA HIROYUKI , YONEKAWA TAKAO , ABE KATSUO
IPC分类号： G11B5/72 , C09D171/02 , G11B5/82 , G11B5/84
摘要： PURPOSE:To decrease the adhesive power of a magnetic disk to a magnetic head by alternately laminating films consisting of an oxide, nitride or carbide and having different hardnesses on the surface of a magnetic medium and forming a lubricating layer on the uppermost layer. CONSTITUTION:Silicon nitride layers 104 and silicon oxide layers 103 are formed into 4 layers on the surface of the magnetic disk substrate 2. These layers are made into the multi-layered structure consisting of the thin films having the high hardness and the thin films having the low hardness and are so formed that the uppermost layer acts as the protective film exhibiting the low adhesive power by destructing the low hardness surface of said layer when the magnetic head tightly contacts with the surface of the protective film. The destruction is made difficultly propagable to the lower parts by the generation of shears on the adhered surfaces between the films of the multi layers. The magnetic disk having the small adhesive power to the magnetic head is thus obtd.

65. 发明专利

JPS61174373A AC SPUTTERING DEVICE 失效
公开(公告)号：JPS61174373A
公开(公告)日：1986-08-06
申请号：JP16493384
申请日：1984-08-08
申请人： HITACHI LTD
发明人： KATAOKA HIROYUKI , YONEKAWA TAKAO , ABE KATSUO
IPC分类号： C23C14/54 , C23C14/40
摘要： PURPOSE:To control precisely a film forming speed by measuring the DC bias voltage to be applied to a sputtering electrode, comparing the measured voltage with a set value and controlling the bias voltage according to the deviation therebetween. CONSTITUTION:The AC voltage generated by an AC power source 7 is applied via a coaxial cable 5 and a transmission type watthour meter 6 to an impedance matching device 4. The matched AC voltage is applied to the sputtering electrode 3. Energy is thereby exerted to the plasma in a vacuum vessel 1 and a target 31 disposed on the electrode 3 is sputtered, by which the film is formed on a substrate 21. The DC bias voltage applied to the electrode 3 is measured by a measuring means 9 and the output thereof is applied to a means 10 for controlling the output of an AC power source. The means 10 compares the output of the measuring means 9 and the predetermined DC bias voltage and regulates the output of the AC power source 7 according to the deviation therebetween. The film forming speed is thus precisely controlled without being affected by the generation of Joule heat, etc., of the electrode 3, etc.

66. 发明专利

JPS56161271A DETECTOR FOR PASSENGER IN CAGE OF ELEVATOR 失效
公开(公告)号：JPS56161271A
公开(公告)日：1981-12-11
申请号：JP6058280
申请日：1980-05-09
申请人： HITACHI LTD
发明人： KATAOKA HIROYUKI , YUMINAKA TAKEO
IPC分类号： B66B3/00 , G06M11/00

67. 发明专利

JPS56132276A DETECTOR FOR LOCATION OF ELEVATOR 失效
公开(公告)号：JPS56132276A
公开(公告)日：1981-10-16
申请号：JP3408380
申请日：1980-03-19
申请人： HITACHI LTD
发明人： KATAOKA HIROYUKI , YAHIRO SEINOSUKE , YUMINAKA TAKEO
IPC分类号： B66B3/02 , B66B1/52 , B66B3/00

68. 发明专利

JPS56127568A ANNUNCIATOR FOR LOCATION OF ELEVATOR 失效
公开(公告)号：JPS56127568A
公开(公告)日：1981-10-06
申请号：JP2668480
申请日：1980-03-05
申请人： HITACHI LTD
发明人： YAHIRO SEINOSUKE , YUMINAKA TAKEO , KATAOKA HIROYUKI
IPC分类号： B66B3/02

69. 发明专利

JPS5393547A APPARATUS FOR CONTROLLING ELEVATORS 失效
公开(公告)号：JPS5393547A
公开(公告)日：1978-08-16
申请号：JP679577
申请日：1977-01-26
申请人： HITACHI LTD
发明人： HIDA KENJI , KATAOKA HIROYUKI , YAHIRO SEINOSUKE
IPC分类号： B66B1/46 , B66B1/48
摘要： PURPOSE:To accomplish reduction of time required for positioning of the position detector by making a means equipped with a plurality of position detectors movable in the direction of the elevator moves.

70. 发明专利

JPS51139051A FLOOR CONTROLLER 失效
公开(公告)号：JPS51139051A
公开(公告)日：1976-12-01
申请号：JP6295575
申请日：1975-05-28
申请人： HITACHI LTD
发明人： KATAOKA HIROYUKI , YAHIRO SEINOSUKE
IPC分类号： B66B1/46 , B66B1/52
摘要： PURPOSE:When the engaging element, which engages the preceding panel with the story floor hang fitting, is withdrawn, the vibration is arranged to be given to the preceding panel, so that the operating action of the engaging piece may by reduced and the abrasion between the engaging piece and story floor hang fitting may be decreased.

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