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    • 67. 发明授权
    • Micro-electro-mechanical switch
    • 微机电开关
    • US07405641B1
    • 2008-07-29
    • US11112925
    • 2005-04-21
    • Tsung-Yuan HsuAdele SchmitzDavid ChangRobert Loo
    • Tsung-Yuan HsuAdele SchmitzDavid ChangRobert Loo
    • H01H51/22
    • H01H59/0009
    • A micro-electro-mechanical switch is described. The switch comprises a substrate, with a signal transmission portion and an activation portion attached with the substrate. The activation portion includes an armature activation electrode positioned above a substrate activation electrode. The signal transmission portion includes a metal contact extending from a conducting transmission line and through a bottom insulating layer of the signal transmission portion, thereby being exposed for electrical contact. A mechanical linkage connects the activation portion with the signal transmission portion so that the activation portion and the signal transmission portion move in concert. When an activation signal is applied along the activation portion, both the activation portion and the signal transmission portion are drawn toward the substrate to a substantially closed position, where the metal contact of the signal transmission portion electrically contacts a signal transmission electrode.
    • 描述了微机电开关。 开关包括具有信号传输部分和与基板连接的激活部分的基板。 激活部分包括位于基板激活电极上方的电枢激活电极。 信号传输部分包括从导电传输线延伸并通过信号传输部分的底部绝缘层的金属接触,从而暴露于电接触。 机械连杆将激活部分与信号传输部分相连接,使得激活部分和信号传输部分一起移动。 当沿着激活部分施加激活信号时,激活部分和信号传输部分都朝向基板被拉到基本关闭的位置,其中信号传输部分的金属接点与信号传输电极电接触。