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    • 62. 发明公开
    • VERFAHREN ZUM PRÄZISEN MESSBETRIEB EINES MIKROMECHANISCHEN DREHRATENSENSORS
    • VERFAHREN ZUMPRÄZISENMESSBETRIEB EINES MIKROMECHANISCHEN DREHRATENSENSORS
    • EP2425206A1
    • 2012-03-07
    • EP10718943.3
    • 2010-04-28
    • Continental Teves AG & Co. oHGVTI Technologies Oy
    • SIVARAMAN, RamnathSCHMID, BernhardHILSER, RolandGÜNTHNER, StefanKLEMETTI, Petri
    • G01C19/56G01P9/04
    • G01C19/5755G01C19/5712
    • The invention relates to a method for the precise measuring operation of a micromechanical rotation rate sensor, comprising at least one deflectably suspended seismic mass (1, 15, 20), at least one drive system for driving the seismic mass (1, 15, 20), and at least one first (2, 11, 18) and one second (3, 12, 19) trimming electrode element, which are jointly associated directly or indirectly with the seismic mass (1, 15, 20), wherein a first electrical trimming voltage (U
      T01 , U
      TL01 , U
      TR01 ) is set between the first trimming electrode element (2, 11, 18) and the seismic mass (1, 15, 20) and a second electrical trimming voltage (U
      T02 , U
      TL02 , U
      TR02 ) is set between the second trimming electrode element (3, 12, 19) and the seismic mass (1, 15, 20), wherein the first and the second electrical trimming voltage are set at least according to a quadrature parameter (U
      T ) and a resonance parameter (U
      f ).
    • 一种微机电转速传感器的精确测量操作的方法和装置,包括至少一个偏转悬挂的地震质量块,用于驱动地震质量块的至少一个驱动装置,以及至少一个第一和第二修整电极元件, 被共同分配给所述地震质量块,设置在所述第一修整电极元件和所述地震块之间的第一修整电压(UTO1,UTLO1,UTRO1)和被设置为第二修整电压(UTO2,UTLO2,UTRO2) 在第二修整电极元件和地震块之间,第一和第二修整电压至少被设置为正交参数(UT)和共振参数(Uf)的函数。
    • 63. 发明公开
    • MIKROMECHANISCHER DREHRATENSENSOR
    • EP2193335A1
    • 2010-06-09
    • EP08787285.9
    • 2008-08-18
    • Continental Teves AG & Co. oHG
    • SCHMID, BernhardGÜNTHNER, Stefan
    • G01C19/56
    • G01C19/574
    • Micromechanical rate-of-rotation sensor comprising at least one substrate (30), wherein the base area of the substrate is oriented parallel to the x-y plane of a system of Cartesian coordinates, at least two seismic masses (1, 1a, 1b) and at least one respective suspension spring element (10, 11) for suspension of the seismic mass (1, 1a, 1b) on the substrate (30), wherein the at least two seismic masses (1, 1a, 1b) are coupled to one another by at least one coupling beam (2, 2a, 2b) and at least one of the suspension spring elements (10) comprises at least two beam sections (11) which, in the undeflected state, are oriented substantially parallel to one another or have an angular width of less than 45° with respect to one another, and one or a plurality of connecting sections (12) which connect the beam sections (11) to one another, wherein the beam sections can be displaced relative to one another with regard to their longitudinal direction.
    • 包括至少一个衬底(30)的微机械旋转速率传感器,其中衬底的底部区域平行于笛卡尔坐标系统的xy平面取向,至少两个震动质量块(1,1a,1b)和 至少一个用于将所述震动质量体(1,1a,1b)悬挂在所述基板(30)上的悬架弹簧元件(10,11),其中所述至少两个震动质量体(1,1a,1b)与一个 另一方面通过至少一个联接梁(2,2a,2b)并且至少一个悬挂弹簧元件(10)包括至少两个梁部分(11),所述梁部分在未偏转状态下彼此基本平行地定向或者 具有相对于彼此小于45°的角宽度,以及将所述梁部分(11)彼此连接的一个或多个连接部分(12),其中所述梁部分可以相对于彼此 关于它们的纵向。