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    • 61. 发明授权
    • Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
    • 用于测量对准精度的装置和方法,以及用于制造半导体器件的方法和系统
    • US06897956B2
    • 2005-05-24
    • US10235656
    • 2002-09-06
    • Minori NoguchiMasahiko NakadaTakahiko SuzukiTaketo UenoToshihiko NakataShunji Maeda
    • Minori NoguchiMasahiko NakadaTakahiko SuzukiTaketo UenoToshihiko NakataShunji Maeda
    • G01B11/00G01B11/27H01L21/027H01L21/66H05K1/02H05K3/46
    • G01B11/272H05K1/0269H05K3/4638
    • An apparatus for measuring an alignment accuracy between overlaid alignment marks formed to each of alignment mark portions on every plural chip units or exposure units arranged on a substrate to be measured, comprising: an XY stage running in a direction x and in a direction y while mounting the substrate; an illumination optical system for illuminating each of the alignment mark portions in a state where the XY stage runs in a direction x which is a direction of arranging the chips; a detecting optical system having an objective lens for collecting a reflection light in the running state obtained from the overlaid alignment marks, a focusing optical system for focusing the reflection light in the running state obtained from the objective lens, a scanning optical system for scanning reflection light image in the running state focused by the focusing optical system in a direction opposite to that of the running and a linear image sensor receiving reflection light image substantially in a static state being scanned in the opposite direction by the scanning optical system and converting them into image signal; and an alignment accuracy calculation device for measuring the alignment accuracy between the overlaid alignment marks at least for a direction perpendicular to the running direction based on the image signal converted by the linear image sensor.
    • 一种用于测量在布置在待测量基板上的每个多个芯片单元或曝光单元上形成的每个对准标记部分上的重叠对准标记之间的对准精度的装置,包括:沿x方向和y方向运行的XY台, 安装基板; 照明光学系统,用于在XY台在作为排列芯片的方向的方向x上行进的状态下照亮每个对准标记部分; 一种检测光学系统,具有用于收集从重叠的对准标记获得的运行状态的反射光的物镜,用于将反射光聚焦在从物镜获得的运行状态的聚焦光学系统,用于扫描反射的扫描光学系统 聚焦光学系统以与行进方向相反的方向聚焦的运行状态的光图像和接收基本处于静止状态的反射光图像的线性图像传感器被扫描光学系统沿相反方向扫描并将其转换成 图像信号; 以及对准精度计算装置,用于根据由线性图像传感器转换的图像信号,至少对垂直于行进方向的方向测量重叠的对准标记之间的对准精度。
    • 68. 发明授权
    • Automatic sharp pencil
    • 自动锋利的铅笔
    • US4386865A
    • 1983-06-07
    • US215311
    • 1980-12-11
    • Hidehei KageyamaTakahiko Suzuki
    • Hidehei KageyamaTakahiko Suzuki
    • B43K21/027B43K21/22
    • B43K21/027B43K21/22
    • A knock type sharp pencil provided in its outer cylinder with a core holding mechanism composed of an inner cylinder coaxially arranged in the outer cylinder, a lead chuck inserted in the inner cylinder and including a chuck portion projecting out of the front end of the inner cylinder, a chuck ring inserted between a flange portion of the inner cylinder and the chuck portion of the lead chuck, a core case provided at its rear end with a knock portion and connected to the rear end of the lead chuck, and a spring means arranged in the inner cylinder and inserted between the flange portion of the inner cylinder and the front end portion of the core case, the spring means urging the core case backwardly.
    • 一种设置在其外筒中的爆震式尖笔,具有由同轴布置在外筒中的内筒构成的芯保持机构,插入在内筒中的引线卡盘,包括从内筒的前端突出的卡盘部 插入在所述内筒的凸缘部和所述引线卡盘的卡盘部之间的卡盘环,在其后端设置有与所述引线卡盘的后端连接的敲击部的芯壳,以及布置成 在内筒中并插入在内筒的凸缘部和芯壳的前端部之间的弹簧装置向后推动芯壳。