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    • 61. 发明公开
    • 다이아몬드상 카본 필름 코팅 장치 및 방법
    • 用于涂覆金刚石碳膜的装置和方法
    • KR1020020013981A
    • 2002-02-25
    • KR1020000046263
    • 2000-08-10
    • 한국과학기술연구원
    • 이광렬은광용
    • C23C16/34
    • C23C16/0281C23C16/0272C23C16/26C23C16/509Y10S427/106
    • PURPOSE: Apparatus and method for coating a diamond-like carbon film are provided which increase an adhesive force of the diamond-like carbon film by inserting a tungsten layer and a mixture layer of tungsten and carbon between a substrate and the diamond-like carbon film as adhesive force increasing layers. CONSTITUTION: In an apparatus for coating a diamond-like carbon film on a substrate(1), the apparatus comprises a vacuum chamber(20) in which the substrate is arranged; a vacuum means maintaining the inside of the vacuum chamber as the vacuum state suitable for coating; a means(50) laying up a first adhesive force increasing layer consisting of certain elements on the substrate; and a means(50) laying up the diamond-like carbon film on the first adhesive force increasing layer, wherein the apparatus further comprises a means for laying up a second adhesive force increasing layer consisting of a mixture of the elements composing the first adhesive force increasing layer and hydrocarbon on the first adhesive force increasing layer, wherein the certain elements are one or more elements selected from the group consisting of W, Mo, Pd and Ta included in Group IV to Group VI in the periodic table, the hydrocarbon is methane (CH4), the means laying up a first adhesive force increasing layer lays up the first adhesive force increasing layer by sputtering using an argon gas a sputtering gas, the means for laying up a second adhesive force increasing layer lays up the second adhesive force increasing layer by sputtering using a mixed gas of argon and hydrocarbon as a sputtering gas, and wherein the hydrocarbon gas has a content of 10 to 60%.
    • 目的:提供用于涂覆类金刚石碳膜的装置和方法,其通过在基底和类金刚石碳膜之间插入钨层和钨和碳的混合层来增加类金刚石碳膜的粘附力 作为粘合力增加层。 构成:在用于在基板(1)上涂覆类金刚石碳膜的装置中,该装置包括其中布置基板的真空室(20); 真空装置将真空室内部保持为适于涂覆的真空状态; 在所述基板上铺设由某些元素组成的第一粘合力增加层的装置(50) 以及在所述第一增粘层上铺设所述类金刚石碳膜的装置(50),其中所述装置还包括用于铺设由构成所述第一粘合力的所述元素的混合物构成的第二粘合力增加层的装置 在第一粘合力增加层上增加层和烃,其中某些元素是选自元素周期表IV至VI族中的W,Mo,Pd和Ta的一种或多种元素,烃是甲烷 (CH4),设置第一粘合力增加层的装置通过使用氩气的溅射气体溅射来放置第一粘合力增加层,用于铺设第二粘合力增加层的装置铺设第二粘合力增加 使用氩和烃的混合气体作为溅射气体进行溅射,其中烃气体的含量为10〜60%。
    • 67. 发明公开
    • 고체 전해질 인터페이스 시뮬레이션 방법 및 이를 지원하는 전자 장치
    • 固体电解质界面模拟方法及其配套电子装置
    • KR1020170085238A
    • 2017-07-24
    • KR1020160004597
    • 2016-01-14
    • 한국과학기술연구원
    • 이광렬한상수이민호
    • G01R31/36G06F17/50H01M10/42H01M4/02
    • 본발명은음극고체전해질인터페이스시뮬레이션방법및 이를지원하는전자장치에관한것이다. 본발명에따른음극고체전해질인터페이스시뮬레이션을지원하는전자장치는음극고체전해질인터페이스의시뮬레이션분석을컴퓨팅장치기반으로수행하는데관련된적어도하나의데이터를저장하는메모리와, 메모리에전기적으로연결되는프로세서를포함한다. 프로세서는사용자입력에따라음극고체전해질인터페이스의이전작업리스트또는현재작업리스트를포함하는로비페이지를출력하거나또는사용자입력에따라음극고체전해질인터페이스의생성, 시뮬레이션, 및분석중 적어도하나를수행할수 있는작업페이지를출력하도록설정된다.
    • 本发明涉及阴极固体电解质界面模拟方法和支持其的电子装置。 的是,根据本发明支持阳极的固体电解质界面模拟电子装置至少包括用于存储一条数据的存储器,处理器,其电耦合到参与到基于所述计算设备执行所述阳极的固体电解质界面的模拟分析存储器 。 可以根据用户的输入,模拟和阳极的固体电解质界面的分析响应于用户输入执行上述任务列表中的至少一个,或者输出包含当前任务列表大厅页面或创建一个阴极的固体电解质界面的处理器任务 并设置为输出一个页面。