会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 67. 发明授权
    • Semiconductor device manufacturing facility with a diagnosis system
    • 具有诊断系统的半导体器件制造设备
    • US06487472B1
    • 2002-11-26
    • US09299565
    • 1999-04-27
    • Jae-kwan SongHoon ChaYoo-keun WonDong-cheol Kim
    • Jae-kwan SongHoon ChaYoo-keun WonDong-cheol Kim
    • G06F1900
    • H01L21/67276
    • A facility for manufacturing semiconductor devices is provided with a diagnosis system for easily monitoring the operation states of various fabrication systems, and controlling them in case of abnormal operation states by means of a sensing signal from the fabrication systems and a control signal from a control system. The fabrication system outputs a sensing signal showing the operation states of the fabrication processes such as temperature, time, pressure, concentration, power, etc. The control system outputs a control signal to the fabrication systems for controlling their operation states via transmit lines connected thereto according to the sensing signal from the fabrication systems or an input signal from a host computer. The diagnosis system analyzes the sensing signal from the fabrication systems and the control signal from the control system so as to assess the operation states of the fabrication systems. The control system and the diagnosis system are connected to a LAN (Local Area Network) connected to a communication modem, and the fabrication systems are diagnosed via a communication network.
    • 一种用于制造半导体器件的设备设置有用于容易地监视各种制造系统的操作状态的诊断系统,并且在来自制造系统的感测信号和来自控制系统的控制信号的异常操作状态的情况下进行控制 。 制造系统输出表示制造过程的操作状态(例如温度,时间,压力,浓度,功率等)的感测信号。控制系统将控制信号输出到制造系统,以通过与其连接的发送线路来控制其操作状态 根据来自制造系统的感测信号或来自主机的输入信号。 诊断系统分析来自制造系统的感测信号和来自控制系统的控制信号,以评估制造系统的操作状态。 控制系统和诊断系统连接到连接到通信调制解调器的LAN(局域网),并且通过通信网络诊断制造系统。