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    • 51. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US5900549A
    • 1999-05-04
    • US760972
    • 1996-12-05
    • Kazufumi Moriya
    • Kazufumi Moriya
    • G01C19/56G01C19/5755H01P9/04
    • G01C19/5719
    • An angular velocity sensor includes a movable bi-directional electrode and a fixed bi-directional electrode wherein L-shaped electrode plates of the movable bi-directional vibration-urging electrode mesh in spaced relationship with L-shaped electrode plates of the fixed bi-directional electrode. In one embodiment in response to a vibration driving signal applied between the electrodes, a vibration plate vibrates with a large amplitude in one direction parallel to the direction in which bent parts of the L-shaped electrode plates extend. If an angular velocity .OMEGA..sub.Z about the Z axis is applied to the vibration plate, the vibration plate is greatly displaced in the Y direction by Coriolis force. This displacement is detected by a displacement detecting part with high accuracy. In another embodiment, the bi-directional electrodes serve as the displacement detecting part.
    • 角速度传感器包括可移动双向电极和固定双向电极,其中可移动双向振动电极的L形电极板与固定双向振动电极的L形电极板间隔开来 电极。 在一个实施例中,响应于施加在电极之间的振动驱动信号,振动板在与L形电极板的弯曲部分延伸的方向平行的一个方向上以大幅度振动。 如果围绕Z轴的角速度OMEGA Z施加到振动板上,则振动板通过科里奥利力在Y方向上大大移位。 该位移由位移检测部以高精度检测。 在另一个实施例中,双向电极用作位移检测部分。
    • 52. 发明授权
    • Planar-shielded meander slow-wave structure
    • 平面屏蔽的MEASER慢波结构
    • US3736534A
    • 1973-05-29
    • US3736534D
    • 1971-10-13
    • LITTON SYSTEMS INC
    • CHAFFEE E
    • H01J29/70H01P9/04H03H7/30
    • H01J29/708H01P9/04
    • A novel slow wave structure capable of ultrabroadband operation includes a meander line of a predetermined length on a layer of insulative material, a first series of spaced metal fingers forming a comb line are attached to the layer and extend in parallel from a front edge of the layer into the facing concave portions of the meander line and a second series of spaced metal fingers forming a comb line are attached to the layer and extend in parallel into the concave portions of the meander line from the opposed back edge of the layer. A metal layer or ground plane is connected to the underside of the layer and both series of metal projecting fingers are placed electrically in common together with the bottom ground plane. In a preferred method of manufacturing of the invention the insulative layer is completely coated or covered with metal on all surfaces and using a photoresist etching process the insulative spaces between the meander lines and the fingers are etched out leaving the desired structure.
    • 能够进行超宽带操作的新型慢波结构包括在绝缘材料层上的预定长度的曲折线,形成梳线的第一系列间隔开的金属指状物附接到该层并且从 层形成曲折线的相对的凹部,并且形成梳线的第二系列间隔开的金属指状物附接到该层并且从该层的相对的后边缘平行延伸到曲折线的凹部中。 金属层或接地平面连接到层的下侧,并且两个金属突出指状物的两个电极共同地与底部接地平面放置在一起。 在本发明的优选制造方法中,绝缘层在所有表面上被完全涂覆或被金属覆盖,并且使用光致抗蚀剂蚀刻工艺,将曲折线和指状物之间的绝缘空间蚀刻掉,留下所需的结构。