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    • 53. 发明授权
    • Oil deterioration sensor
    • 油劣化传感器
    • US6151956A
    • 2000-11-28
    • US148508
    • 1998-09-04
    • Toshimitsu TakahashiTakuya Kondo
    • Toshimitsu TakahashiTakuya Kondo
    • G01N29/00G01N29/024G01N29/32G01N33/26G01N33/30G01N3/56G01N9/24G01N29/18
    • G01N33/26G01N29/024G01N29/326G01N2291/011G01N2291/0222G01N2291/0226G01N2291/0258G01N2291/02818G01N2291/02881
    • The present invention relates to a sensor for detecting the degree of deterioration of oil, and more particularly, provides an oil deterioration sensor which can detect the deterioration of oil and/or the liquid surface of oil by utilizing the fact that the sound velocity of ultrasonic waves change according to the alkalinity of the oil, the oil deterioration sensor for determining deterioration characteristics of oil by utilizing ultrasonic waves, which is characterized in that a deterioration sensor reflecting surface for reflecting ultrasonic waves transmitted from an ultrasonic wave transmitting portion is placed in oil so as to detect deterioration of the oil, and characterized by comprising: an oil deterioration detecting portion for evaluating a transmission velocity of an ultrasonic wave in the oil by receiving ultrasonic waves from the aforesaid deterioration sensor reflecting surface and for evaluating a degree of deterioration of oil from said transmission velocity of the oil.
    • 本发明涉及一种用于检测油的劣化程度的传感器,更具体地说,提供一种油劣化传感器,其可以通过利用超声波的声速来检测油和/或油表面的劣化 波根据油的碱度变化,通过利用超声波确定油的劣化特性的油劣化传感器,其特征在于,将用于反射从超声波传递部发射的超声波的劣化传感器反射面放置在油中 以检测油的劣化,其特征在于包括:油劣化检测部分,用于通过接收来自所述劣化传感器反射表面的超声波来评估油中的超声波的传播速度,并评估油的劣化程度 油从oi的传播速度 l。
    • 54. 发明授权
    • Piezoelectric end point sensor for detection of breakthrough of fluid,
and fluid processing apparatus comprising same
    • 用于检测液体穿透的压电端点传感器,以及包括其的流体处理装置
    • US5977687A
    • 1999-11-02
    • US678572
    • 1996-07-12
    • Glenn M. TomCynthia A. Miller
    • Glenn M. TomCynthia A. Miller
    • G01N27/00G01N29/036H01L41/08
    • G01N29/036G01N2291/0222
    • A sensor for detection of a trace fluid component in a fluid environment, comprising: a piezoelectric crystal having a fundamental resonant frequency in response to an applied oscillating electric field; a coating on the piezoelectric crystal of a sensor material which is reactive with the trace fluid component to yield a solid interaction product of changed mass in relation to initial mass of the sensor material interacting with the trace fluid component to yield the solid interaction product; means for applying an oscillating electric field to the piezoelectric crystal which generates an output resonant frequency therefrom; means for (i) sampling the output resonant frequency of the piezoelectric crystal while the oscillating electric field is applied thereto, (ii) determining the change in resonant frequency from the fundamental resonant frequency that occurs on formation of the solid interaction product when the sensor material interacts with the trace fluid component in the fluid environment, and (iii) generating an output indicative of the presence of the trace fluid component in the environment; and means for flowing fluid from the fluid environment to the coating on the piezoelectric crystal so that the trace fluid component when present reacts with the coating to form the solid interaction product; wherein the coated piezoelectric crystal exhibits a frequency response rate to the trace fluid component in the range of from about 0.001 to about 1000 Hertz/min/(part-per-million of the fluid component). The sensor may be utilized for sensing of breakthrough in dry scrubbing of gases in semiconductor manufacturing, as well as for sensing of contaminant and hazardous gas species in ambient fluid environments, for environmental monitoring applications.
    • 一种用于在流体环境中检测痕量流体组分的传感器,包括:响应于所施加的振荡电场而具有基本共振频率的压电晶体; 传感器材料的压电晶体上的涂层,其与微量流体组分反应以产生相对于与微量流体组分相互作用的传感器材料的初始质量而质量变化的固体相互作用产物,以产生固体相互作用产物; 用于将振荡电场施加到从其产生输出谐振频率的压电晶体的装置; 用于(i)在施加振荡电场时对压电晶体的输出谐振频率进行采样的装置,(ii)当传感器材料形成时,确定在形成固体相互作用产物时发生的基本共振频率的谐振频率的变化 与流体环境中的痕量流体组分相互作用,和(iii)产生指示在环境中痕量流体组分的存在的输出; 以及用于将流体从流体环境流动到压电晶体上的涂层的装置,使得当存在的痕量流体组分与涂层反应以形成固体相互作用产物; 其中涂覆的压电晶体对痕量流体组分的频率响应速率在约0.001至约1000赫兹/分/(流体组分的百万分之一)的范围内。 该传感器可用于感测半导体制造中的气体干洗中的突破,以及用于感测环境流体环境中的污染物和有害气体物质的环境监测应用。
    • 55. 发明授权
    • Piezoelectric enviromental fluid monitoring assembly and method
    • 压电式环境监测装置及方法
    • US5817921A
    • 1998-10-06
    • US679258
    • 1996-07-12
    • Glenn M. TomCynthia A. Miller
    • Glenn M. TomCynthia A. Miller
    • G01N27/00G01N29/036G01N29/02
    • G01N29/036G01N2291/0222
    • An environmental gas monitor for detection of a trace fluid component in a fluid environment, comprising: a piezoelectric crystal having a fundamental resonant frequency in response to an applied oscillating electric field; a coating on the piezoelectric crystal of a sensor material which is reactive with the trace fluid component to yield a solid interaction product; means for applying an oscillating electric field to the piezoelectric crystal which generates an output resonant frequency therefrom; means for (i) sampling the output resonant frequency of the piezoelectric crystal while the oscillating electric field is applied thereto, (ii) determining the change in resonant frequency from the fundamental resonant frequency that occurs on formation of the solid interaction product when the sensor material interacts with the trace fluid component in the fluid environment, and (iii) generating an output indicative of the presence of the trace fluid component in the environment; means, e.g., an eductor, for flowing fluid from the fluid environment at a constant flow rate to the coating on the piezoelectric crystal so that the trace fluid component when present reacts with the coating to form the solid interaction product; wherein the coated piezoelectric crystal exhibits a frequency response rate to the trace fluid component in the range of from about 0.001 to about 1000 Hertz/min/(part-per-million of the fluid component).
    • 一种用于检测流体环境中痕量流体成分的环境气体监测器,包括:响应于所施加的振荡电场具有基本共振频率的压电晶体; 传感器材料的压电晶体上的涂层,其与微量流体组分反应以产生固体相互作用产物; 用于将振荡电场施加到从其产生输出谐振频率的压电晶体的装置; 用于(i)在施加振荡电场时对压电晶体的输出谐振频率进行采样的装置,(ii)当传感器材料形成时,确定在形成固体相互作用产物时发生的基本共振频率的谐振频率的变化 与流体环境中的痕量流体组分相互作用,和(iii)产生指示在环境中痕量流体组分的存在的输出; 意味着例如喷射器,用于将流体以恒定流速从流体环境流动到压电晶体上的涂层,使得当存在的痕量流体组分与涂层反应以形成固体相互作用产物时; 其中涂覆的压电晶体对痕量流体组分的频率响应速率在约0.001至约1000赫兹/分/(流体组分的百万分之一)的范围内。
    • 56. 发明授权
    • System for measuring acid concentration in an alkylation process
    • 用于测量烷基化过程中酸浓度的系统
    • US5760297A
    • 1998-06-02
    • US823087
    • 1997-03-24
    • Douglas D. Weerstra
    • Douglas D. Weerstra
    • C07C2/62G01N9/24G01N29/024G01N9/18C07C3/54
    • C07C2/62G01N29/024G01N9/24G01N2291/0222G01N2291/02818
    • A system for measuring acid concentration in an alkylation process by repeatedly measuring the density, viscosity or velocity of sound through a sample over time as volatile organic compounds (VOCs) are allowed to escape and the sample stratifies. A partial vacuum can be used to accelerate dissipation of light VOCs from the sample. A processor applies a predetermined function to a series of these sound velocity measurements to compute the acid concentration in the sample. The function can be determined by statistical regression against sound velocity measurements taken from samples having known acid concentrations. The system can be used either to generate a read-out to facilitate manual control of the alkylation process, or to automatically regulate the acid feed rate to maintain a desired acid concentration.
    • 用于通过随着挥发性有机化合物(VOC)随时间反复测量样品随时间的声音的密度,粘度或声速来测量烷基化过程中的酸浓度的系统,并且样品分层。 可以使用部分真空来加速来自样品的轻VOC的散逸。 处理器对一系列这些声速测量应用预定的功能,以计算样品中的酸浓度。 该功能可以通过对具有已知酸浓度的样品的声速测量的统计学回归来确定。 该系统可以用于产生读数以便于手动控制烷基化过程,或者自动调节酸进料速率以保持所需的酸浓度。