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    • 53. 发明专利
    • Scribing method, and blast processing apparatus for scribing process
    • SCRIBING方法和用于筛选过程的BLAST处理设备
    • JP2014046392A
    • 2014-03-17
    • JP2012190395
    • 2012-08-30
    • Fuji Seisakusho:Kk株式会社不二製作所
    • MASE KEIJINITTO MASATO
    • B24C1/04B24C5/02B24C5/04B24C11/00H01L31/06
    • B24C1/045B24C5/04B24C7/0038Y02E10/541
    • PROBLEM TO BE SOLVED: To provide a scribing method for forming a groove with high accuracy by blasting without performing masking.SOLUTION: A blast processing apparatus 1 having an ejection nozzle 20 with a slit-like ejection port 21 with a width of 10-500 μm and having a length long 5-5,000 folds with respect to the width is used, abrasive material with a median particle diameter of 1/2 or less with respect to the width of the ejection port 21 of the ejection nozzle 20 and with the maximum particle diameter less than the width δ of the ejection port 21 is ejected onto a surface of a workpiece W which is not masked together with compressed gas so that abrasive material volume per 1,000 cmof a discharged air amount corresponds a concentration of 0.25 cmor less within a range of 0.2 MPa-0.6 MPa of ejection pressure of the abrasive material while setting an ejection distance to 0.1 mm-3.0 mm.
    • 要解决的问题:提供一种在不进行掩蔽的情况下通过喷砂高精度地形成凹槽的划线方法。解决方案:一种具有喷嘴20的喷射处理装置1,其具有宽度为10-500的狭缝状喷射口21 使用相对于宽度为5-5,000倍的长度的长度,相对于喷嘴20的喷射口21的宽度具有中等粒径为1/2或更小的研磨材料,并且具有最大值 小于喷射口21的宽度δ的颗粒直径被喷射到工件W的未与压缩气体一起被遮蔽的表面上,使得排出空气量的每1000cm 3的研磨材料体积在一个 在喷射距离为0.1mm-3.0mm的同时,研磨材料的喷射压力为0.2MPa-0.6MPa的范围。
    • 58. 发明授权
    • ABRASIVE BLASTING APPARATUS
    • 颗粒机
    • EP1450988B1
    • 2005-10-05
    • EP02774971.2
    • 2002-11-01
    • Quill International Industries Plc
    • DORE, David J. Quill International Industries Plc
    • B24C7/00
    • B24C7/0038
    • A blasting apparatus comprises a pressure vessel (1) adapted to contain a particulate blasting medium and a liquid. The vessel (1) includes an inlet and a bottom outlet (7). The interior of the vessel (1) communicates via its bottom outlet (7) with an opening (37) in a conduit (11) along which conduit (11) an entraining pressurized gas can be fed from a pressurizing gas source. The flow of pressurized fluid through the conduit (11) entrains the contents of the vessel (1) for dispersal into the fluid flow for blasting through a delivery line connected to the conduit (11). A pressurizing means (13) is provided to pump liquid from a liquid source into the vessel (1) behing its contents in terms of its contents' outflow from the vessel (1) through the bottom outlet (7). A valve means (18, 19) is provided to control the flow of pressurized gas along the conduit (11). Immediately upstream of the opening (37) in the conduit is located a venturi (38) so that the velocity of the pressurized gas is increased as it passes over the opening (37) thereby increasing the quantity of particulate blasting medium entrained by the gas.