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    • 52. 发明授权
    • Control system for semiconductor substrate process line
    • 半导体衬底工艺线控制系统
    • US4672185A
    • 1987-06-09
    • US802374
    • 1985-11-27
    • Mitsuo SatoHiroshi Kamidoi
    • Mitsuo SatoHiroshi Kamidoi
    • H01L21/02G06K7/10H01L21/00
    • H01L21/67294G06K7/10861
    • A control system for a semiconductor substrate process line comprises a process line having processing units for processing a semiconductor wafer in accordance with preset data, a plurality of cassettes each for storing a plurality of semiconductor wafers and having an identification member on a surface thereof consisting of a plurality of projections arranged in a row, a non-contact type number reader provided at an entrance side of the processing unit for reading the cassette number designated by the identification member and generating a signal corresponding to the number, and a control unit in which processing conditions are input corresponding to the semiconductor wafers stored in the cassettes and which identifies the signal from the reader and controls the processing unit under processing conditions corresponding to the identified number.
    • 一种用于半导体衬底工艺线的控制系统包括具有根据预设数据处理半导体晶片的处理单元的处理线,多个用于存储多个半导体晶片并在其表面上具有识别元件的盒, 设置在行中的多个突起,设置在处理单元的入口侧的非接触型数字读取器,用于读取由识别构件指定的盒式磁带号,并产生与该数相对应的信号;以及控制单元,其中 对应于存储在盒中的半导体晶片输入处理条件,并且识别来自读取器的信号,并在对应于所识别的数字的处理条件下控制处理单元。
    • 57. 发明授权
    • Ultraviolet ray irradiation apparatus for fixing printed material
    • 用于固定印刷材料的紫外线照射装置
    • US07819517B2
    • 2010-10-26
    • US11679443
    • 2007-02-27
    • Mitsuo Sato
    • Mitsuo Sato
    • B41F23/04B41L23/20
    • B41J11/002B41J11/006B41J11/007
    • In an ultraviolet ray irradiation apparatus capable of forestalling printed material jams between a paper discharge unit of a printing apparatus and a reception unit of the ultraviolet ray irradiation apparatus, a signal line for exchanging electric signals with the printing apparatus is provided, and control is performed such that rotational driving of a paper conveyance belt of the ultraviolet ray irradiation apparatus is begun upon reception of a printing drum rotation start signal or a paper feeding unit paper conveyance start signal, and the rotational driving of the belt is halted after a predetermined amount of time has elapsed following reception of a printing completion signal.
    • 在能够防止印刷装置的排纸单元与紫外线照射装置的接收单元之间的打印材料卡纸的紫外线照射装置中,提供用于与打印装置交换电信号的信号线,并且进行控制 使得在接收到印刷鼓旋转开始信号或送纸单元纸张传送开始信号之后开始紫外线照射装置的传送带的旋转驱动,并且在预定量的 在接收到打印完成信号之后已经过去了。
    • 60. 发明授权
    • Method of fabricating a compound semiconductor having a plurality of
layers using a flow compensation technique
    • 使用流动补偿技术制造具有多层的化合物半导体的方法
    • US5866198A
    • 1999-02-02
    • US858574
    • 1997-05-19
    • Mitsuo SatoKiyoshi YoshikawaTomio Minohoshi
    • Mitsuo SatoKiyoshi YoshikawaTomio Minohoshi
    • C23C16/44C23C16/455C30B25/14H01L21/205B05D5/12
    • C23C16/455C30B25/14H01L21/02543H01L21/02546H01L21/0262
    • A vapor deposition device for fabricating a compound semiconductor has many organometallic gas supply systems, each of which for synthesizing and supplying more than one organometallic gas, a first group of valves connected to the organometallic gas supply systems, and the first group of valves for selecting a specific system from among the organometallic gas supply systems by opening and closing the relevant valve group, an organometallic gas supply line connected to the first valve group, a second group of valves connected to the first group of valves for selecting the next organometallic gas supply system to be used among the organometallic gas supply systems by opening and closing the relevant valve group, a vent line connected to the second valve group, a reaction furnace connected to the organometallic gas supply means for continuously propagating different types of thin-films by means of organometallic gases supplied from the organometallic gas supply line, a microcomputer system for controlling the operation of the first group of valves and the second group of valves.
    • 用于制造化合物半导体的气相沉积装置具有许多有机金属气体供应系统,每个用于合成和供应多于一个的有机金属气体,连接到有机金属气体供应系统的第一组阀以及用于选择的第一组阀 有机金属气体供给系统中的特定系统,通过打开和关闭相关阀组,连接到第一阀组的有机金属气体供应管线,连接到第一组阀的第二组阀,用于选择下一个有机金属气体供应 通过打开和关闭相关阀组在有机金属气体供应系统中使用的系统,连接到第二阀组的排气管线,连接到有机金属气体供应装置的反应炉,用于通过装置连续传播不同类型的薄膜 从有机金属气体供应管道提供的有机金属气体,微电脑系统 m,用于控制第一组阀和第二组阀的操作。