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    • 58. 发明授权
    • Bipolar junction transistors having base electrode extensions
    • 具有基极扩展的双极结晶体管
    • US06255716B1
    • 2001-07-03
    • US09502343
    • 2000-02-10
    • Hee-Seog Jeon
    • Hee-Seog Jeon
    • H01L27102
    • H01L29/66272H01L29/42304
    • Methods of forming bipolar junction transistors having preferred base electrode extensions include the steps of forming a base electrode of second conductivity type (e.g., P-type) on a face of a substrate. A conductive base electrode extension layer is then formed in contact with a sidewall of the base electrode. The base electrode extension layer may be doped or undoped. An electrically insulating base electrode spacer is then formed on the conductive base electrode extension layer, opposite the sidewall of the base electrode. The conductive base electrode extension layer is then etched to define a L-shaped base electrode extension, using the base electrode spacer as an etching mask. Dopants of second conductivity type are then diffused from the base electrode, through the base electrode extension and into the substrate to define an extrinsic base region therein. This diffusion step can be performed in a carefully controlled manner to limit the extent to which the extrinsic base region dopants adversely effect the electrical characteristics of surrounding regions or contribute to parasitic capacitance. Dopants of second conductivity type are also preferably implanted into the substrate to define an intrinsic base region therein. This dopant implant step is preferably performed using the base electrode spacer as an implant mask. Accordingly, the base electrode spacer is used advantageously as an etching mask and as a dopant implantation mask. An emitter region of first conductivity type is also preferably formed in the intrinsic base region.
    • 形成具有优选的基极延伸部的双极结型晶体管的方法包括以下步骤:在衬底的表面上形成第二导电类型的基极(例如P型)。 然后形成与基极的侧壁接触的导电基极延伸层。 基极延伸层可以是掺杂的或未掺杂的。 然后,在与基极的侧壁相对的导电基极延伸层上形成电绝缘基极间隔物。 然后,使用基极间隔件作为蚀刻掩模,蚀刻导电基极延伸层以限定L形基极延伸。 然后,第二导电类型的掺杂剂从基极通过基极延伸扩散到衬底中以在其中限定非本征基区。 该扩散步骤可以以仔细控制的方式进行,以限制外部碱性区域掺杂对其周围区域的电特性的不利影响或有助于寄生电容的程度。 也优选将第二导电类型的掺杂剂注入到衬底中以在其中限定其内部基极区域。 该掺杂剂注入步骤优选使用基极间隔物作为植入掩模进行。 因此,基极隔离器有利地用作蚀刻掩模和掺杂剂注入掩模。 也优选在本征基区形成第一导电类型的发射极区域。