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    • 54. 发明授权
    • Mold, casting apparatus, and method for producing cast rod
    • 模具,铸造装置和铸造棒的制造方法
    • US08991217B2
    • 2015-03-31
    • US13702019
    • 2012-05-09
    • Yuma KamiyamaKazuyoshi HondaDaisuke Suetsugu
    • Yuma KamiyamaKazuyoshi HondaDaisuke Suetsugu
    • C03B19/02C01B33/02B22D11/045
    • B22D11/045C01B33/02C03B19/02
    • Arnold (13) includes a recessed portion (21) for receiving a melt (2). The recessed portion (21) is constituted by an inner wall surface (29) for converting the melt (2) into a solidified portion when the inner wall surface (29) contacts the melt (2), and opens in a withdrawal direction (D1) of the solidified portion. A curved line formed by a first contour (23p) and a second contour (25p) has a cusp at a position of start points (43 and 45). The distance between the first contour (23p) and the second contour (25p) in a width direction (D2) increases continuously from an upstream side to a downstream side of the withdrawal direction (D1). The shape of the inner wall surface (29) of the recessed portion (21) is determined so that a cast rod (3) can be rotationally displaced clockwise or counterclockwise about an axis passing through a first end point (33) or a second end point (35) and perpendicular to a section of the mold 13.
    • Arnold(13)包括用于接收熔体(2)的凹部(21)。 凹部(21)由内壁面(29)构成,内壁面(29)在内壁面(29)与熔体(2)接触时将熔体(2)变形为固化部,并且在抽出方向(D1 )固化部分。 由第一轮廓(23p)和第二轮廓(25p)形成的曲线在起始点(43和45)的位置具有尖点。 第一轮廓(23p)和第二轮廓(25p)之间的宽度方向(D2)之间的距离从抽出方向(D1)的上游侧到下游侧连续地增加。 确定凹部(21)的内壁表面(29)的形状,使得铸造杆(3)能够绕通过第一端点(33)或第二端(33)的轴顺时针或逆时针旋转地移动 (35)并且垂直于模具13的一部分。
    • 55. 发明授权
    • Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
    • 制造薄膜的方法,其抑制源材料的不必要的散射和沉积
    • US08877291B2
    • 2014-11-04
    • US13390633
    • 2011-06-01
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • C23C16/00C23C14/56C23C14/24C23C14/54
    • C23C14/562C23C14/24C23C14/243C23C14/54H01M4/0423H01M4/139
    • The present invention provides a thin film manufacturing method which realizes stable, highly-efficient film formation using a nozzle-type evaporation source while avoiding unnecessary scattering and deposition of a film formation material before the start of the film formation. Used is a film forming apparatus including: an evaporation chamber 16; a film forming chamber 17 in which a substrate 21 is provided; an evaporation source 19 holding a film formation material 15 and including an opening surface 14; a moving mechanism 35 configured to cause the evaporation source 19 to move; and a conductance variable structure 34. The film forming chamber 17 and the evaporation chamber 16 are evacuated. In a state where the differential pressure between these chambers can be secured by the conductance variable structure 34, the nonreactive gas is introduced to the evaporation chamber 16 to adjust the pressure in the evaporation chamber 16 to predetermined pressure or more. Thus, the evaporation of the film formation material is suppressed. In the same state as above, the nonreactive gas is introduced to the film forming chamber 17 to adjust the pressure in the film forming chamber 17 to the predetermined pressure or more. The conductance variable structure 34 is activated to cancel the above state. Then, the evaporation source 19 is moved by the moving mechanism 35, so that the opening surface 14 is located close to the substrate 21. The pressure in each chamber is decreased to less than the predetermined pressure. Thus, the suppression of the evaporation of the film formation material is canceled, and the film formation is started.
    • 本发明提供一种薄膜制造方法,其使用喷嘴型蒸发源实现稳定,高效的成膜,同时避免在成膜开始之前成膜材料的不必要的散射和沉积。 使用的成膜装置包括:蒸发室16; 设置有基板21的成膜室17; 保持成膜材料15并包括开口表面14的蒸发源19; 构造成使蒸发源19移动的移动机构35; 和导电可变结构34.成膜室17和蒸发室16被抽真空。 在通过电导可变结构34可以确保这些室之间的压差的状态下,将非反应性气体引入蒸发室16,以将蒸发室16中的压力调节至预定压力或更大。 因此,抑制了成膜材料的蒸发。 在与上述相同的状态下,将非反应性气体引入成膜室17,以将成膜室17中的压力调节至预定压力或更大。 电导变量结构34被激活以消除上述状态。 然后,蒸发源19被移动机构35移动,使得开口表面14位于靠近基板21的位置。每个室中的压力降低到小于预定压力。 因此,抑制成膜材料的蒸发被消除,并且开始成膜。