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    • 55. 发明授权
    • Semiconductor integrated circuit and manufacturing method thereof
    • 半导体集成电路及其制造方法
    • US6110772A
    • 2000-08-29
    • US16512
    • 1998-01-30
    • Tadayoshi TakadaTsuyoshi TakahashiYasunari TagamiHirotsugu HataSatoru Kaneko
    • Tadayoshi TakadaTsuyoshi TakahashiYasunari TagamiHirotsugu HataSatoru Kaneko
    • H01L27/04H01L21/02H01L21/265H01L21/822H01L27/06H01L21/70
    • H01L27/0635H01L28/20H01L28/40
    • A semiconductor IC including a resistance element on a circuit substrate. The resistance element includes a resistance layer formed on an insulating layer. The resistance layer is formed using a Si layer obtained by forming an a-Si layer, doping the a-Si layer with impurities, and heating the doped a-Si layer to diffuse the impurities while substantially preserving the fineness of the a-Si layer surface. Preferably, a SiN layer is provided lying beneath the resistance layer. A capacitor may be integrated on the same circuit substrate where the resistance element is formed. In this case, a lower electrode, a SiN dielectric layer, and an upper electrode are formed in this order to constitute a capacitor. The SiN dielectric layer of the capacitor is formed extending from a capacitor formation region to another region, so that the resistance layer of the resistance element is formed on the extending SiN dielectric layer. The lower and upper electrodes of the capacitor may be formed using an a-Si layer, similar to the resistance layer.
    • 一种在电路基板上包括电阻元件的半导体IC。 电阻元件包括形成在绝缘层上的电阻层。 电阻层使用通过形成a-Si层获得的Si层,用杂质掺杂a-Si层并加热掺杂的a-Si层以扩散杂质而形成,同时基本上保持a-Si层的细度 表面。 优选地,设置在电阻层下方的SiN层。 电容器可以集成在形成电阻元件的同一电路基板上。 在这种情况下,依次形成下电极,SiN电介质层和上电极,构成电容器。 电容器的SiN介质层形成为从电容器形成区域延伸到另一区域,使得电阻元件的电阻层形成在延伸的SiN电介质层上。 可以使用类似于电阻层的a-Si层来形成电容器的下电极和上电极。
    • 58. 发明授权
    • Guide arm with affixed printed circuit board for magnetic disk drive
    • 导向臂带有固定的电路板用于磁盘驱动器
    • US5140482A
    • 1992-08-18
    • US592914
    • 1990-10-04
    • Hideyuki KimuraTakuji ToriiTsuyoshi TakahashiHiroshi NishidaKenji MoriYuzo YamaguchiYokuo SaitohKihachiro TanakaShinobu Yoshida
    • Hideyuki KimuraTakuji ToriiTsuyoshi TakahashiHiroshi NishidaKenji MoriYuzo YamaguchiYokuo SaitohKihachiro TanakaShinobu Yoshida
    • G11B5/48
    • G11B5/486
    • A head arm for use in a magnetic disk drive, comprising a guide arm disposed between a magnetic head and an actuator so as to transmit actuating force of the actuator to the magnetic head thereby guiding the magnetic head along a plane of a magnetic disk, a printed circuit fixed to the guide arm, and deflection compensating member for making the coefficients of thermal expansion of said guide arm and said printed circuit substantially equal to each other in at least the direction of seek of the head arm. No thermal deformation in an out-of-plane direction occurs on such a head arm regardless of any variation in the temperature of the environment in which the magnetic disk drive is installed. The head arm may also comprise a guide arm and a printed circuit formed of a moisture absorptive material and covered at all or part of its surfaces with a covering layer formed of a moisture resistive material not permeable to moisture. No deformation in an out-of-plane direction occurs on such a head arm regardless of any variation in the humidity of the environment in which the magnetic disk drive is installed. Therefore, the possibility of occurrence of off-track can be minimized.
    • 一种用于磁盘驱动器的头臂,包括设置在磁头和致动器之间的引导臂,以将致动器的致动力传递到磁头,从而沿着磁盘的平面引导磁头, 固定到引导臂的印刷电路和用于使所述引导臂和所述印刷电路的热膨胀系数至少在头臂的寻找方向上彼此基本相等的偏转补偿构件。 在这种头臂上不发生面外方向的热变形,而不管安装有磁盘驱动器的环境的温度如何变化。 头臂还可以包括引导臂和由吸湿材料形成的印刷电路,并在其全部或部分表面上覆盖由不透湿水分的防潮材料形成的覆盖层。 在这种头臂上不发生面外方向的变形,而不管安装有磁盘驱动器的环境的湿度是否变化。 因此,可以使偏离轨迹的发生的可能性最小化。