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    • 56. 发明授权
    • Carrier tape and method of manufacturing semiconductor device employing
the same
    • 载带及使用该半导体器件的半导体器件的制造方法
    • US5126824A
    • 1992-06-30
    • US437620
    • 1989-11-17
    • Tetsuya Ueda
    • Tetsuya Ueda
    • H01L21/56H01L21/60H01L23/495
    • H01L24/86H01L21/565H01L23/49572H01L2924/01029H01L2924/01033H01L2924/01082H01L2924/181
    • A carrier tape and a method of manufacturing a semiconductor device employing the same. The carrier tape has an insulating film and a plurality of leads. The film has an opening for receiving a semiconductor chip therein, a plurality of outer lead holes formed at the periphery of the opening, a lead supporting portion positioned between the opening and the outer lead holes, and at least one tie bar separating a pair of mutually opposing outer lead holes. The tie bar divides the associated outer lead hole and is connected to the lead supporting portion to prevent the lead supporting portion from sagging. The plurality of leads of the carrier tape are supported on the lead supporting portion of the film, projecting into the opening of the film. During manufacture, a semiconductor chip having a plurality of electrodes is positioned within the opening, and the one end portion of each lead is electrically connected to one of the electrodes of the semiconductor chip. The chip and carrier tape are placed within a cavity of a mold, and resin is injected into the cavity along the tie bar.
    • 一种载带及其制造方法。 载带具有绝缘膜和多个引线。 薄膜具有用于接收半导体芯片的开口,形成在开口周边的多个外部引线孔,位于开口和外部引线孔之间的引线支撑部分,以及至少一个分离一对 相互相对的外引线孔。 连接杆将相关联的外引线分开并连接到引线支撑部分,以防止引线支撑部分下垂。 载带的多个引线被支撑在胶片的引线支撑部分上,突出到胶片的开口中。 在制造中,具有多个电极的半导体芯片位于开口内,并且每个引线的一个端部电连接到半导体芯片的一个电极。 将芯片和载带放置在模具的空腔内,并将树脂沿着连接杆注入空腔。
    • 57. 发明授权
    • Microwave plasma film deposition system
    • 微波等离子体膜沉积系统
    • US5125358A
    • 1992-06-30
    • US384699
    • 1989-07-25
    • Tetsuya UedaNaoki SuzukiKohsaku Yano
    • Tetsuya UedaNaoki SuzukiKohsaku Yano
    • C23C16/511H01J37/32
    • H01J37/32211C23C16/511H01J37/32192H01J37/32678
    • A microwave plasma film deposition system comprises a waveguide for feeding microwaves through a microwave feeding window provided at one end of the waveguide, and a plasma cavity in communication with the other end of the waveguide and having a discharge gas inlet which is not in communication with the waveguide. The system further includes a specimen chamber which is in communication with the plasma cavity and which has a substrate setting rest therein and a material gas inlet, and a magnetic field applying device provided near the plasma cavity. Stable film deposition occurs because the plasma cavity is at the end of the waveguide which is remote from the microwave feeding window, whereby deposition on the microwave feeding window is prevented. Deposition on the microwave feeding window is further prevented by a ferromagnetic material which is placed around the waveguide and which reduces the strength of the magnetic field in the waveguide.
    • 微波等离子体膜沉积系统包括用于通过设置在波导的一端处的微波馈电窗口馈送微波的波导和与波导的另一端连通的等离子体腔,并且具有不与 波导。 该系统还包括与等离子体空腔连通并且具有衬底固定在其中的试样室和材料气体入口,以及设置在等离子体腔附近的磁场施加装置。 发生稳定的膜沉积,因为等离子体空腔位于远离微波馈电窗口的波导的末端,从而防止微波馈电窗口上的沉积。 通过放置在波导周围的铁磁材料进一步防止微波馈电窗上的沉积,并降低波导中的磁场的强度。
    • 58. 发明授权
    • Semiconductor device
    • 半导体器件
    • US5083191A
    • 1992-01-21
    • US442708
    • 1989-11-28
    • Tetsuya Ueda
    • Tetsuya Ueda
    • H01L21/56H01L23/24H01L23/28H01L23/31H01L23/495
    • H01L21/565H01L23/24H01L23/3164H01L23/49572H01L2224/16
    • A semiconductor device includes an insulating film having an opening and first and second surfaces, a semiconductor chip positioned inside the opening and having first and second surfaces and a plurality of electrodes formed on its first surface, a plurality of leads supported on the first surface of the insulation film and connected to the electrodes of the semiconductor chip, first and second protective films facing the first and second surfaces of the insulating film, respectively, and a bonding agent disposed between the first and second protective films sealing the semiconductor chip and bonding the films together.
    • 半导体器件包括具有开口和第一和第二表面的绝缘膜,位于开口内部并具有第一和第二表面的半导体芯片和形成在其第一表面上的多个电极,多个引线被支撑在第一表面的第一表面上 所述绝缘膜分别与所述半导体芯片的电极连接,所述第一和第二保护膜分别与所述绝缘膜的所述第一表面和所述第二表面相对;以及粘合剂,其设置在所述第一和第二保护膜之间,密封半导体芯片并将 一起拍电影