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    • 52. 发明授权
    • Inductively coupled antenna and plasma processing apparatus using the same
    • 电感耦合天线和使用其的等离子体处理装置
    • US07740738B2
    • 2010-06-22
    • US10748277
    • 2003-12-31
    • Tae-wan KimYuri Nikolaevich TolmachevDong-joon Ma
    • Tae-wan KimYuri Nikolaevich TolmachevDong-joon Ma
    • C23C16/00H01L21/306
    • H01J37/321
    • An inductively coupled antenna for installation on a reaction chamber of an inductively coupled plasma (ICP) processing apparatus and for connection to a radio frequency (RF) power source to induce an electric field for ionizing a reactant gas injected into the reaction chamber and for generating plasma includes a coil having a plurality of turns including an outermost turn and a plurality of inner turns, wherein a current flowing through the outermost turn is larger than a current flowing through the plurality of inner turns. The outermost turn and the inner turns are connected to the RF power supply in parallel and the inner turns are connected to each other in series. The inductively coupled antenna further includes a conductive metal tube that has a cooling path and a conductive metal strip that is electrically and thermally connected to a lower portion of the metal tube.
    • 一种电感耦合天线,用于安装在电感耦合等离子体(ICP)处理装置的反应室上,并用于连接到射频(RF)电源,以诱发用于电离注入反应室的反应气体的电场并产生 等离子体包括具有多个匝的线圈,其包括最外匝和多匝,其中流过最外匝的电流大于流过多个内匝的电流。 最外圈和内圈与RF电源并联连接,内圈相互串联连接。 电感耦合天线还包括导电金属管,该导电金属管具有电连接和热连接到金属管的下部的导电金属带。
    • 54. 发明授权
    • Magnetic device using magnetic domain dragging and method of operating the same
    • 磁性装置使用磁畴拖曳及其操作方法
    • US07477539B2
    • 2009-01-13
    • US11657646
    • 2007-01-25
    • Kae-won KimTae-wan KimYoung-jin ChoIn-Jun Hwang
    • Kae-won KimTae-wan KimYoung-jin ChoIn-Jun Hwang
    • G11C11/00
    • G11C11/16G11C19/0808
    • Example embodiments may provide a magnetic device using magnetic domain dragging and a method of operating the same. An example embodiment magnetic device may include a data storage cell with a free layer having a switchable magnetization direction and a plurality of adjoining magnetic domains, a reference layer formed to correspond to a portion of the free layer and having a pinned magnetization direction, wherein a plurality of data bit regions may be formed in an array in the free layer, each of the data bit regions being formed with an effective size unit of the reference layer, so that the data storage cell may store a plurality of bits of data in an array, and a first input portion electrically connected to at least one of the data bit regions of the free layer and the reference layer to apply at least one of a writing signal and a reading signal; and a second input portion electrically connected to the free layer to drag data stored in data bit regions of the free layer toward an adjacent data bit region, and applying a dragging signal for magnetic domain dragging.
    • 示例性实施例可以提供使用磁畴牵引的磁性装置及其操作方法。 一个示例性实施例磁性装置可以包括具有自由层的数据存储单元,该自由层具有可切换的磁化方向和多个相邻的磁畴,所述参考层形成为对应于自由层的一部分并且具有钉扎的磁化方向,其中a 可以在自由层中的阵列中形成多个数据位区域,每个数据位区域由参考层的有效大小单位形成,使得数据存储单元可以在多个数据位区域中存储多个数据位 阵列,以及电连接到自由层和参考层的数据位区域中的至少一个的第一输入部分,以施加写信号和读信号中的至少一个; 以及第二输入部分,其电连接到所述自由层,以将存储在所述自由层的数据位区域中的数据拖向相邻数据位区域,以及施加用于磁畴拖动的拖动信号。