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    • 51. 发明授权
    • Manufacturing method of ink jet printer head
    • 喷墨打印头的制造方法
    • US06497019B1
    • 2002-12-24
    • US09594644
    • 2000-06-15
    • Sang Kyeong Yun
    • Sang Kyeong Yun
    • G01D1520
    • B41J2/1626B41J2/161B41J2/1631B41J2/1643B41J2/1646Y10T29/42Y10T29/49401
    • A method for manufacturing an ink jet printer head is disclosed which the method comprises steps of providing a substrate; forming a crater layer by photolighography and plating under the substrate; forming a nozzle plate by photolighography and plating under the crater layer; forming a channel plate by photolighography and plating under the nozzle plate; forming a reserver plate by photolighography and plating under the channel plate; forming a restrictor plate by photolighography and plating under the reserver plate; forming a chamber plate by photolighography and plating under the restrictor plate; forming a vibration plate by plating under the chamber plate; removing the substrate; removing all photoresist remaining; forming a piezoelectric/electrostrictive film to actuate when electrified upon the vibration plate; and forming an upper electrode upon the piezoelectric/electrostrictive film.
    • 公开了一种制造喷墨打印头的方法,该方法包括提供基板的步骤; 通过在底物下进行光刻和电镀形成火山口层; 通过光刻技术在火山口层下形成喷嘴板; 在喷嘴板下通过光刻和电镀形成通道板; 在通道板下通过光刻和电镀形成储存板; 通过视网膜和储存板下的电镀形成限流板; 通过在限流板下的电子照相和电镀形成室板; 通过在室板下面电镀形成振动板; 去除衬底; 去除所有残留的光刻胶; 形成压电/电致伸缩膜以在振动板通电时致动; 并在压电/电致伸缩膜上形成上电极。
    • 52. 发明授权
    • Method for forming piezoelectric/electrostrictive film element at low temperature using electrophoretric deposition
    • 使用电泳沉积在低温下形成压电/电致伸缩膜元件的方法
    • US06349455B1
    • 2002-02-26
    • US09417415
    • 1999-10-13
    • Sang Kyeong YunDong Hoon Kim
    • Sang Kyeong YunDong Hoon Kim
    • H01L4100
    • B82Y30/00C01G25/006C01G33/006C01P2004/52C01P2004/62C01P2004/64C04B35/6264C04B2235/3206C04B2235/3232C04B2235/3244C04B2235/3251C04B2235/3296H01L41/1876H01L41/317Y10T29/42
    • A method for forming piezoelectric/electrostrictive film element at low temperature using electrophoretic deposition includes the steps of: dissolving or dispersing the raw material of constituent ceramic elements in a solvent or a dispersion medium; adding citric acid into the solution or the dispersed mixture; obtaining ultrafine ceramic oxide powder of particle size less than 1 &mgr;m with uniform particle diameter size distribution by forming ceramic oxide by a nonexplosive oxidative-reductive combustion reaction by thermally treating the mixed solution at 100-500° C.; preparing a suspension by dispersing the ultrafine ceramic oxide powder in an organic dispersant; preparing ceramic sol solution by dissolving constituent ceramic elements of the same or similar constituent as the ultrafine ceramic oxide powder in water or an organic solvent; mixing the suspension with the ceramic sol solution; forming a piezoelectric/electrostrictive film element by submerging a substrate into this mixture and then by performing electrophoretic deposition; and thermally treating the piezoelectric/electrostrictive film element at 100-600° C.
    • 使用电泳沉积法在低温下形成压电/电致伸缩膜元件的方法包括以下步骤:将构成陶瓷元件的原料溶解或分散在溶剂或分散介质中; 在溶液或分散的混合物中加入柠檬酸; 通过在100-500℃下热处理混合溶液,通过非爆炸性氧化还原性燃烧反应形成陶瓷氧化物,获得粒度小于1μm的超细陶瓷氧化物粉末,具有均匀的粒径分布。 通过将超细陶瓷氧化物粉末分散在有机分散剂中制备悬浮液; 通过将与超细陶瓷氧化物粉末相同或相似的组分的组分陶瓷元素溶解在水或有机溶剂中来制备陶瓷溶胶溶液; 将悬浮液与陶瓷溶胶溶液混合; 通过将衬底浸入该混合物中,然后通过进行电泳沉积来形成压电/电致伸缩膜元件; 并在100-600℃下对压电/电致伸缩膜元件进行热处理。
    • 54. 发明申请
    • HYBRID LIGHT MODULATOR
    • 混合光调制器
    • US20080186561A1
    • 2008-08-07
    • US12099048
    • 2008-04-07
    • Sang Kyeong Yun
    • Sang Kyeong Yun
    • G02B26/00
    • G02B26/0808
    • The present invention provides a hybrid light modulator. The hybrid light modulator of the present invention includes an element having a protrusion to diffract incident light even at an early light receiving stage and to control the diffractive angle of the light using a microactuator, unlike conventional diffractive light modulators which reflect and diffract incident light using a plurality of micromirror actuators. Therefore, the present invention realizes device miniaturization and assures easy digital operation. Furthermore, piezoelectric force may be used to provide an actuating force to the element of the hybrid light modulator. Alternatively, electrostatic or electromagnetic force may be used as an actuating force for the hybrid light modulator.
    • 本发明提供一种混合光调制器。 本发明的混合光调制器包括具有突起的元件,即使在早期光接收级也衍射入射光,并且使用微致动器控制光的衍射角,与使用反射和衍射入射光的常规衍射光调制器不同 多个微镜致动器。 因此,本发明实现了装置小型化,并且确保了容易的数字操作。 此外,可以使用压电力来向混合光调制器的元件提供致动力。 或者,可以使用静电或电磁力作为混合光调制器的致动力。
    • 55. 发明授权
    • Hybrid light modulator
    • 混合光调制器
    • US07382517B2
    • 2008-06-03
    • US11152831
    • 2005-06-13
    • Sang Kyeong Yun
    • Sang Kyeong Yun
    • G02B26/00
    • G02B26/0808
    • The present invention provides a hybrid light modulator. The hybrid light modulator of the present invention includes an element having a protrusion to diffract incident light even at an early light receiving stage and to control the diffractive angle of the light using a microactuator, unlike conventional diffractive light modulators which reflect and diffract incident light using a plurality of micromirror actuators. Therefore, the present invention realizes device miniaturization and assures easy digital operation. Furthermore, piezoelectric force may be used to provide an actuating force to the element of the hybrid light modulator. Alternatively, electrostatic or electromagnetic force may be used as an actuating force for the hybrid light modulator.
    • 本发明提供一种混合光调制器。 本发明的混合光调制器包括具有突起的元件,即使在早期光接收级也衍射入射光,并且使用微致动器控制光的衍射角,与使用反射和衍射入射光的常规衍射光调制器不同 多个微镜致动器。 因此,本发明实现了装置小型化,并且确保了容易的数字操作。 此外,可以使用压电力来向混合光调制器的元件提供致动力。 或者,可以使用静电或电磁力作为混合光调制器的致动力。