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51. 发明申请

US20090101070A1 Member for a Plasma Processing Apparatus and Method of Manufacturing the Same 审中-公开
标题翻译：等离子体处理装置的成员及其制造方法
公开(公告)号：US20090101070A1
公开(公告)日：2009-04-23
申请号：US12224784
申请日：2007-02-20
申请人： Tadahiro Ohmi , Masafumi Kitano , Yoshihumi Tsutai , Keisuke Satou , Mabito Iguchi
发明人： Tadahiro Ohmi , Masafumi Kitano , Yoshihumi Tsutai , Keisuke Satou , Mabito Iguchi
IPC分类号： C23C28/04
CPC分类号： C04B41/87 , C03C17/25 , C03C2217/228 , C03C2218/113 , C04B41/009 , C04B41/5031 , C04B41/5045 , C23C4/10 , C23C18/1208 , C23C18/1254 , C23C18/1279 , C23C28/042 , C04B41/4531 , C04B41/4537 , C04B35/10 , C04B35/00
摘要： A member for a plasma processing apparatus, which is excellent in film-formability, durability, and reliability, is provided.On a substrate, a ceramic film having a purity not less than 98% is provided. In the ceramic film, grains constituting the film have a grain diameter not greater than 50 nm and the amount of moisture released from the film is not more than 1019 molecules/cm2.
摘要翻译：提供了一种等离子体处理装置的成膜性，耐久性和可靠性优异的构件。在基材上提供纯度不低于98％的陶瓷膜。在陶瓷膜中，构成膜的晶粒的粒径不大于50nm，从膜释放的水分量不大于1019分子/ cm 2。

52. 发明申请

US20060127245A1 Pump 审中-公开
标题翻译：泵
公开(公告)号：US20060127245A1
公开(公告)日：2006-06-15
申请号：US10548764
申请日：2004-03-05
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Masafumi Kitano
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Masafumi Kitano
IPC分类号： F04B17/00
CPC分类号： F04C18/16 , F04C2220/12 , F04C2230/92 , F04C2280/04 , F05C2201/903 , F05C2203/0869
摘要： A vacuum pump having a high corrosion resistance is disclosed. A member constituting the vacuum pump is composed of aluminum or an aluminum alloy, and the surface of the member is subjected to a plasma oxidation treatment such as an oxidation treatment using oxygen radicals, so that a dense and smooth aluminum oxide coating film is formed thereon.
摘要翻译：公开了一种耐腐蚀性高的真空泵。构成真空泵的构件由铝或铝合金构成，并且使用氧自由基进行诸如使用氧自由基的氧化处理的等离子体氧化处理，从而在其上形成致密且平滑的氧化铝涂层。

53. 发明申请

US20110177355A1 AL ALLOY MEMBER, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND METHOD OF MANUFACTURING AN ANODIC OXIDE FILM COATED AL ALLOY MEMBER 有权
标题翻译： AL合金会员，电子设备制造设备及制造阳极氧化膜涂层合金成员的方法
公开(公告)号：US20110177355A1
公开(公告)日：2011-07-21
申请号：US13055582
申请日：2009-07-28
申请人： Tadahiro Ohmi , Masafumi Kitano , Minoru Tahara , Hisakazu Ito , Kota Shirai , Masayuki Saeki
发明人： Tadahiro Ohmi , Masafumi Kitano , Minoru Tahara , Hisakazu Ito , Kota Shirai , Masayuki Saeki
IPC分类号： B32B1/02 , C25D11/04 , C25D11/06 , C22C21/00
CPC分类号： C25D11/04 , C22C21/00 , H05K1/053 , H05K2203/0315 , Y10T428/12
摘要： Provided is an Al alloy member with an excellent mechanical strength that is sufficient for use in large-scale manufacturing apparatuses. The Al alloy member is characterized in that, in mass %, Mg concentration is 5.0% or less, Ce concentration is 15% or less, Zr concentration is 0.15% or less, the balance comprises Al and unavoidable impurities, the elements of the unavoidable impurities are respectively 0.01% or less, and the Vickers hardness of the Al alloy member is greater than 30.
摘要翻译：提供具有优异的机械强度的Al合金构件，其足以用于大规模制造装置。 Al合金构件的特征在于，以质量％计，Mg浓度为5.0％以下，Ce浓度为15％以下，Zr浓度为0.15％以下，余量由Al和不可避免的杂质构成，不可避免的元素杂质分别为0.01％以下，Al合金构件的维氏硬度大于30。

54. 发明申请

US20110041768A1 HEAT EQUALIZER AND ORGANIC FILM FORMING APPARATUS 有权
标题翻译：热平衡器和有机膜成型设备
公开(公告)号：US20110041768A1
公开(公告)日：2011-02-24
申请号：US12934190
申请日：2008-04-11
申请人： Tadahiro Ohmi , Masafumi Kitano , Hisaaki Yamakage , Yoshihito Yamada
发明人： Tadahiro Ohmi , Masafumi Kitano , Hisaaki Yamakage , Yoshihito Yamada
IPC分类号： C23C16/00 , F28D15/00
CPC分类号： C23C14/243 , C23C14/12 , C23C14/228
摘要： A heat equalizer includes a container structure having a heating block in which a working fluid is held for heating and vaporizing a material to be heated, a heater placed at the bottom of the container structure, and a material feed pipe allowing the outside and the inside of the container structure to communicate with each other. In the heating block, as a flow path in which the material to be heated flows, a main header pipe connected to the material feed pipe and extending in the horizontally, and a riser pipe branching from the main header pipe and extending vertically are formed. As a condensation path in which the working fluid is cooled and condensed, condensation holes formed respectively on the opposite sides of the riser pipe and extending horizontally, and a condensation pit formed under the riser pipe are formed. Between the condensation holes and the condensation pit, the main header pipe is placed.
摘要翻译：热均衡器包括具有加热块的容器结构，其中保持工作流体用于加热和汽化待加热材料，放置在容器结构底部的加热器和允许外部和内部的材料供给管的容器结构相互通信。在加热块中，作为被加热材料流动的流路，形成有连接于原料供给管并在水平方向延伸的主集管，以及从主集管分支并竖直延伸的立管。作为其中工作流体被冷却和冷凝的冷凝路径，分别形成在提升管的相对侧并水平延伸的冷凝孔，以及形成在提升管下方的冷凝坑。在冷凝孔和冷凝槽之间，放置主集管。

55. 发明授权

US08714188B2 Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used 有权
标题翻译：流体通道的无水锤打开方法，以及用于提供化学溶液的方法和使用该方法的无水锤打开装置
公开(公告)号：US08714188B2
公开(公告)日：2014-05-06
申请号：US13239715
申请日：2011-09-22
申请人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
IPC分类号： G05D7/06
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从通过调节控制信号Sc进行电 - 气转换。

56. 发明申请

US20130084059A1 VAPORIZER 有权
标题翻译：蒸气器
公开(公告)号：US20130084059A1
公开(公告)日：2013-04-04
申请号：US13563983
申请日：2012-08-01
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
IPC分类号： C23C14/00 , F22B1/28
CPC分类号： C23C16/4483 , F22B1/284
摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.
摘要翻译：能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括网状，蜂窝状，网状或管状隔壁。

57. 发明申请

US20120241023A1 CONTROL VALVE DEVICE 审中-公开
标题翻译：控制阀装置
公开(公告)号：US20120241023A1
公开(公告)日：2012-09-27
申请号：US13508448
申请日：2010-10-29
申请人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
发明人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
IPC分类号： F16K31/128 , F16K1/34
CPC分类号： F16K31/126 , F16K1/34 , F16K25/005 , Y10T137/776
摘要： A control valve device develops opening/closing accuracy of a valve assembly. The valve head 310a is configured to open and close a transfer path formed in the valve housing 305 by transmitting the power to the valve assembly 310 from the power transmission member according to a pressure ratio between working fluid supplied to the first space Us and the second space Ls, respectively. The valve head has a Vickers hardness larger than a Vickers hardness of a valve seat of the transfer path to be in contact with the valve head, and a hardness difference therebetween is set to be about 200 Hv to about 300 Hv.
摘要翻译：控制阀装置产生阀组件的开/关精度。阀头310a被构造成通过根据供应到第一空间Us的工作流体与第二空间的第二压力之间的压力比将从动力传递构件传递到阀组件310的动力来打开和关闭形成在阀壳体305中的传送路径空间Ls。阀头的维氏硬度大于与阀头接触的传送路径的阀座的维氏硬度，并且其间的硬度差设定为约200Hv至约300Hv。

58. 发明授权

US08047225B2 Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used 有权
标题翻译：流体通道的无水锤打开方法，以及用于提供化学溶液的方法和使用该方法的无水锤打开装置
公开(公告)号：US08047225B2
公开(公告)日：2011-11-01
申请号：US12422136
申请日：2009-04-10
申请人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
IPC分类号： F16K31/42
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从通过调节控制信号Sc进行电 - 气转换。

59. 发明申请

US20100139775A1 FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS 有权
标题翻译：流量范围可变型流量控制装置
公开(公告)号：US20100139775A1
公开(公告)日：2010-06-10
申请号：US11913277
申请日：2006-06-22
申请人： Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
发明人： Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
IPC分类号： F15D1/00
CPC分类号： G05D7/0641 , G01F1/363 , G01F1/6842 , G01F1/6847 , G01F5/005 , G01F7/005 , G05D7/0635 , G05D7/0647 , G05D23/1927 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87314 , Y10T137/8741 , Y10T137/87499 , Y10T137/87684
摘要： A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc=KP1 (K is a proportionality factor) or Qc=KP2m(P1−P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice. For the control of the flow in the large flow area, the fluid in the large flow area is allowed to flow to the other orifice by switching the fluid passages.
摘要翻译：一种压力式流量控制装置，通过精确地控制在大流量范围内的流体的流动，能够减小尺寸和安装成本。具体地说，在孔（8）中流动的流体的流量被计算为Qc = KP1（K是比例因子）或Qc = KP2m（P1-P2）n（K是比例因子，m和n是常数）通过使用孔口上游侧的压力P1和孔口下游侧的压力P2。在流量控制装置的控制阀的下游侧和流体供给管之间的流体通道由彼此平行定位的至少两个或更多个流体通道形成。具有不同流体流动特性的孔口插入彼此平行定位的流体通道中。为了控制小流量区域中的流体，允许小流量区域中的流体流到一个孔口。为了控制大流量区域中的流动，通过切换流体通道允许大流量区域中的流体流向另一个孔口。

60. 发明申请

US20070151321A1 Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device 有权
标题翻译：用于压力传感器，压力控制装置和压力式流量控制装置的自动零点校正装置
公开(公告)号：US20070151321A1
公开(公告)日：2007-07-05
申请号：US10561602
申请日：2004-06-10
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Shoichi Hino , Eiji Takahashi , Makoto Saegusa , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama , Katsuyuki Sugita
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Shoichi Hino , Eiji Takahashi , Makoto Saegusa , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama , Katsuyuki Sugita
IPC分类号： G01L27/00 , G01F25/00
CPC分类号： G01L19/02 , G01L9/065 , G01L19/0023 , G05D7/0635
摘要： The invention provides an automatic zero point correction device that includes a pressure sensor, wherein output from the sensor is outputted and the sensor output is inputted to a time-varying zero point drift correction means of the sensor; a sensor output judgement means of the time-varying zero point drift correction means, wherein the sensor output judgement means operates to make a judgement determining whether the sensor output is larger than a set value; and operating condition judgement means of the time-varying zero point drift correction means, wherein the operating condition judgement means judges operating conditions of the sensor, wherein the time-varying zero point drift correction means operates to cancel time-varying zero point drift of the sensor when the sensor output judgement means determines sensor output is larger than the set value and the operating condition judgement means determines operating conditions of the sensor are within previously set operating conditions.
摘要翻译：本发明提供了一种自动零点校正装置，其包括压力传感器，其中输出来自传感器的输出，并且传感器输出被输入到传感器的时变零点漂移校正装置; 时变零点漂移校正装置的传感器输出判断装置，其中传感器输出判断装置进行判断，判断传感器输出是否大于设定值; 以及时变零点漂移校正装置的操作条件判断装置，其中操作条件判断装置判断传感器的操作条件，其中时变零点漂移校正装置操作以消除时变零点漂移校正装置的时变零点漂移传感器输出判断装置确定传感器输出大于设定值，并且操作条件判断装置确定传感器的操作条件在预先设定的操作条件下。

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