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    • 51. 发明授权
    • Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit
    • 镜面单元,其制造方法以及使用该镜单元的曝光装置和方法
    • US07628497B2
    • 2009-12-08
    • US11938439
    • 2007-11-12
    • Takeshi YamamotoAkiri Miyake
    • Takeshi YamamotoAkiri Miyake
    • G02B5/08
    • G02B26/0825G21K1/062Y10S359/90
    • Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, and a substrate deforming device for producing deformation of a shape of the substrate of the mirror, wherein, in the multilayered film, the number of laminated layers in a predetermined region of the substrate differs from that in another region of the substrate. A mirror unit producing method according to another preferred embodiment includes forming a multilayered film on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, providing substrate deforming means in association with the substrate, the deforming means having a function for producing deformation of the shape of the substrate, and partially removing the multilayered film.
    • 公开了镜单元及其制造方法。 在一个优选实施例中,反射镜单元包括具有在基板上形成的多层膜的反射镜,该多层膜具有在基板上周期层压的两种材料,以及用于产生基板的形状变形的基板变形装置 其特征在于,在所述多层膜中,所述基板的规定区域的层叠层数与所述基板的其他区域的层叠数不同。 根据另一优选实施例的镜单元制造方法包括在基板上形成多层膜,所述多层膜具有在基板上周期层压的两种材料,提供与基板相关联的基板变形装置,变形装置具有 产生基板形状的变形,并且部分地去除多层膜。
    • 53. 发明申请
    • DATA REPRODUCTION APPARATUS LOADABLE WITH CARD-SHAPED STORAGE MEDIUM
    • 数据复制装置,可存储卡形存储介质
    • US20090094625A1
    • 2009-04-09
    • US12238332
    • 2008-09-25
    • Takeshi Yamamoto
    • Takeshi Yamamoto
    • G11B17/04
    • G11B25/04G11B17/0408
    • A data reproduction apparatus for reproducing audio data includes an insertion slot, formed to open horizontally, for loading a card-shaped storage medium. An ejector ejects the card-shaped storage medium through the insertion slot when operated externally. A cover is positioned outside the insertion slot, rotatable between open and closed positions, having a receiving surface, for extending outwards from a lower edge of the insertion slot when in the open position, to support a lower surface of the card-shaped storage medium moving inwards or outwards through the insertion slot on the receiving surface, and for covering the insertion slot when in the closed position, to close the insertion slot. Also, the cover includes first and second side guide projections, positioned on the receiving surface, for contacting lateral edges of the card-shaped storage medium, to guide during insertion and ejection.
    • 用于再现音频数据的数据再现装置包括形成为水平打开的用于加载卡形存储介质的插入槽。 当从外部操作时,喷射器通过插槽将卡形存储介质弹出。 盖子位于插槽的外侧,可在打开和关闭位置之间旋转,具有接收表面,用于当处于打开位置时从插入槽的下边缘向外延伸,以支撑卡形存储介质的下表面 通过接收表面上的插槽向内或向外移动,并且在处于关闭位置时覆盖插入槽以封闭插入槽。 此外,盖包括定位在接收表面上的第一和第二侧引导突起,用于接触卡形存储介质的横向边缘,以在插入和弹出期间引导。
    • 58. 发明授权
    • Encoder count error detection circuitry and encoder count error detection method
    • 编码器计数错误检测电路和编码器计数错误检测方法
    • US07397393B2
    • 2008-07-08
    • US11636112
    • 2006-12-08
    • Takeshi Yamamoto
    • Takeshi Yamamoto
    • H03M1/22
    • G01D5/24466G01D5/2451G05B2219/37154H03M1/1071H03M1/143H03M1/30
    • To provide encoder count error detection circuitry and an encoder count error detection method capable of realizing a highly reliable encoder by providing detection of the count errors of count signals used to measure displacement, an encoder count error detection circuitry and detection method configured as count error detection circuitry for an encoder outputting pulse trains according to the displacement of a measured object, doubles, triples, or quadruples one or more fundamental signals used for measuring displacement to convert to count signals, and compares the output signals of the counter counting these count signals with the level of these fundamental signals to detect count errors in the count signals.
    • 为了提供编码器计数错误检测电路和编码器计数错误检测方法,能够通过提供用于测量位移的计数信号的计数误差的检测来实现高度可靠的编码器,编码器计数错误检测电路和配置为计数错误检测的检测方法 用于根据测量对象的位移输出脉冲串的编码器电路,将用于测量位移的一个或多个基本信号加倍,三倍或四倍以转换为计数信号,并将计数这些计数信号的计数器的输出信号与 这些基本信号的电平检测计数信号中的计数误差。
    • 59. 发明授权
    • Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit
    • 镜面单元,其制造方法以及使用该镜单元的曝光装置和方法
    • US07311407B2
    • 2007-12-25
    • US11113113
    • 2005-04-22
    • Takeshi YamamotoAkira Miyake
    • Takeshi YamamotoAkira Miyake
    • G02B5/08G02B7/182
    • G02B26/0825G21K1/062Y10S359/90
    • Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, and a substrate deforming device for producing deformation of a shape of the substrate of the mirror, wherein, in the multilayered film, the number of laminated layers in a predetermined region of the substrate differs from that in another region of the substrate. A mirror unit producing method according to another preferred embodiment includes forming a multilayered film on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, providing substrate deforming means in association with the substrate, the deforming means having a function for producing deformation of the shape of the substrate, and partially removing the multilayered film.
    • 公开了镜单元及其制造方法。 在一个优选实施例中,反射镜单元包括具有在基板上形成的多层膜的反射镜,该多层膜具有在基板上周期层压的两种材料,以及用于产生基板的形状变形的基板变形装置 其特征在于,在所述多层膜中,所述基板的规定区域的层叠层数与所述基板的其他区域的层叠数不同。 根据另一优选实施例的镜单元制造方法包括在基板上形成多层膜,所述多层膜具有在基板上周期层压的两种材料,提供与基板相关联的基板变形装置,变形装置具有 产生基板形状的变形,并且部分地去除多层膜。