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51. 发明授权

US06829034B2 Exposure apparatus and device manufacturing method 失效
标题翻译：曝光装置和装置制造方法
公开(公告)号：US06829034B2
公开(公告)日：2004-12-07
申请号：US09819671
申请日：2001-03-29
申请人： Yoshinori Miwa , Eiji Sakamoto
发明人： Yoshinori Miwa , Eiji Sakamoto
IPC分类号： G03B2752
CPC分类号： G03F7/70933 , G03F7/70883
摘要： An exposure apparatus to be used with an excimer laser as a light source includes an optical system disposed along a path of excimer laser light, a chamber for accommodating the optical system therein and having an inside space being able to be replaced by a predetermined gas, a gas circulation mechanism having a gas circulation path for connecting a gas discharging port for discharging a gas from the chamber and a gas supplying port for supplying a gas into the chamber, and a switching device for selectively using plural purifiers disposed in the gas circulation path.
摘要翻译：以准分子激光器作为光源使用的曝光装置包括沿着准分子激光的路径设置的光学系统，用于将光学系统容纳在其中并具有能够被预定气体代替的内部空间的室，气体循环机构，具有用于连接用于从腔室排出气体的气体排出口的气体循环路径和用于向室供给气体的气体供给口，以及用于选择性地使用设置在气体循环路径中的多个净化器的开关装置。

52. 发明授权

US6081319A Illumination system and scan type exposure apparatus 失效
标题翻译：照明系统和扫描型曝光装置
公开(公告)号：US6081319A
公开(公告)日：2000-06-27
申请号：US578339
申请日：1995-12-26
申请人： Kunitaka Ozawa , Eiji Sakamoto , Kazuhiro Takahashi , Youzou Fukagawa
发明人： Kunitaka Ozawa , Eiji Sakamoto , Kazuhiro Takahashi , Youzou Fukagawa
IPC分类号： G03F7/20 , H01L21/027 , G03B27/54 , G03B27/42 , G03B27/72
CPC分类号： G03F7/70558 , G03F7/70358
摘要： An illumination system includes a light source for providing pulse light, and a scanning system for relatively and scanningly moving an article, to be illuminated, relative to an illumination region to be defined by the pulse light, wherein, in a light intensity distribution defined in the illumination region with respect to a scan direction, the light intensity changes non-linearly from an least one end portion to a highest light intensity point in the distribution, wherein the light intensity distribution includes a first point at the one end portion, a second point whereat light intensity increase changes, a third point whereat light intensity increase changes, and a fourth point whereat the light intensity is highest, and wherein at least one of a width Wa between the first and second points and a width Wb between the third and fourth points substantially corresponds to or is greater than the relative movement amount between the illumination region and the article per pulse.
摘要翻译：照明系统包括用于提供脉冲光的光源和用于相对于扫描地移动要被照明的物品的扫描系统相对于由脉冲光限定的照明区域，其中在以所述照明区域相对于扫描方向，所述光强度从所述分布中的至少一个端部到最高光强度点非线性地变化，其中所述光强度分布包括在所述一个端部处的第一点，光强度增加变化的点，光强度增加变化的第三点，以及光强度最高的第四点，并且其中第一和第二点之间的宽度Wa和第三和第二点之间的宽度Wb中的至少一个第四点基本上对应于或大于照明区域和物品/脉冲之间的相对移动量。

53. 发明授权

US5907390A Positioning apparatus, exposure apparatus and method of manufacturing semiconductor device 失效
标题翻译：定位装置，曝光装置及制造半导体装置的方法
公开(公告)号：US5907390A
公开(公告)日：1999-05-25
申请号：US941208
申请日：1997-09-30
申请人： Eiji Sakamoto
发明人： Eiji Sakamoto
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , G03B27/52
CPC分类号： G03F7/70358 , G03F7/70716 , G03F7/70858 , G03F7/70891 , G03F9/70
摘要： Positioning accuracy of a scanning stage is improved as a result of reducing error by reducing a non-uniformity in the temperature of air on an optical path of length measurement of the stage. An apparatus for measuring the position of a reticle stage and adjusting the position of the stage based upon the results of measurement includes a reflecting mirror secured to the stage, an interferometer for measuring the distance between a reference position and the reflecting mirror using light, and an air conditioner for supplying a temperature-regulated air stream to an optical path of length measurement connecting the reference position and the reflecting mirror, the air stream being supplied at a speed higher than the speed at which the stage is scanned.
摘要翻译：作为通过降低阶段的长度测量的光路上的空气温度的不均匀性来减小误差的结果，提高了扫描级的定位精度。基于测量结果测量标线片台的位置和调整台的位置的装置包括固定到舞台的反射镜，用于使用光测量参考位置和反射镜之间的距离的干涉仪，以及用于将温度调节空气流提供给连接基准位置和反射镜的长度测量光路的空气调节器，所述气流以比扫描台的速度高的速度供应。

54. 发明授权

US5637142A Nonaqueous emulsified surface treating agent composition 失效
标题翻译：非水乳化表面处理剂组合物
公开(公告)号：US5637142A
公开(公告)日：1997-06-10
申请号：US433513
申请日：1995-05-11
申请人： Motonobu Kubo , Masamichi Morita , Masayuki Yamana , Eiji Sakamoto , Ikuo Yamamoto
发明人： Motonobu Kubo , Masamichi Morita , Masayuki Yamana , Eiji Sakamoto , Ikuo Yamamoto
IPC分类号： B29C33/58 , C09K3/18 , C10M169/04 , D06M13/02 , D06M15/227 , D06M15/256 , D06M15/277 , D06M15/53 , C09D5/00 , C09D191/00
CPC分类号： D06M15/53 , B29C33/58 , C09K3/18 , C10M169/04 , D06M13/02 , D06M15/227 , D06M15/256 , D06M15/277 , C10M2203/003 , C10M2203/02 , C10M2203/022 , C10M2203/024 , C10M2203/04 , C10M2203/06 , C10M2203/10 , C10M2203/102 , C10M2203/104 , C10M2203/106 , C10M2203/108 , C10M2207/021 , C10M2207/08 , C10M2207/281 , C10M2207/282 , C10M2207/283 , C10M2207/286 , C10M2211/003 , C10M2211/022 , C10M2211/06 , C10M2213/00 , C10M2213/04 , C10M2213/06 , C10M2215/04 , C10M2215/08 , C10M2215/082 , C10M2215/26 , C10M2215/28 , C10M2219/044 , Y10T428/2933 , Y10T428/2967 , Y10T428/2969
摘要： A surface treating agent composition of fluorine-containing-oil-in-hydrocarbon-containing-oil type emulsion prepared by emulsifying a liquid fluorine-containing oil and a liquid hydrocarbon-containing oil by using a polymeric surfactant having a fluorine-containing segment and a hydrocarbon-containing segment in a molecule has excellent long-term stability.
摘要翻译： PCT No.PCT / JP93 / 01621 Sec。 371日期1995年5月11日 102（e）日期1995年5月11日PCT提交1993年11月9日PCT公布。公开号WO94 / 11456 日本1994年5月26日利用具有含氟烃的含氟油型乳液的聚合物表面活性剂乳化含氟油包含油的油性乳液的表面处理剂组合物，分子中的含烃链段和含烃链段具有优异的长期稳定性。

55. 发明授权

US5231291A Wafer table and exposure apparatus with the same 失效
标题翻译：晶圆台和曝光装置相同
公开(公告)号：US5231291A
公开(公告)日：1993-07-27
申请号：US821888
申请日：1992-01-17
申请人： Mitsuaki Amemiya , Eiji Sakamoto , Koji Uda , Kunitaka Ozawa , Kazunori Iwamoto , Shunichi Uzawa , Mitsuji Marumo
发明人： Mitsuaki Amemiya , Eiji Sakamoto , Koji Uda , Kunitaka Ozawa , Kazunori Iwamoto , Shunichi Uzawa , Mitsuji Marumo
IPC分类号： G03F7/20 , H01L21/00 , H01L21/687
CPC分类号： H01L21/67109 , G03F7/2041 , G03F7/707 , G03F7/70866 , G03F7/70875
摘要： A wafer table includes a wafer holding surface for holding a wafer by attraction; a flow passageway through which a temperature adjusting medium flows to remove any heat in the wafer table; a temperature measuring system for measuring the temperature of the wafer held by the wafer holding surface; a temperature adjusting system disposed between the wafer holding surface and the flow passageway; a temperature setting system for setting a temperature related to the wafer held by the wafer holding surface; a flow rate controlling system for controlling the flow rate of the temperature adjusting medium to be circulated through the flow passageway; and a temperature controlling system for controlling the operation of the temperature adjusting system related to heat, on the basis of a value set by the temperature setting system and a value measured by the temperature measuring system.
摘要翻译：晶片台包括用于通过吸引保持晶片的晶片保持表面; 流动通道，温度调节介质通过该通道流动以去除晶片台中的任何热量; 用于测量由晶片保持表面保持的晶片的温度的温度测量系统; 设置在晶片保持表面和流动通道之间的温度调节系统; 用于设定与晶片保持面保持的晶片有关的温度的温度设定系统; 流量控制系统，用于控制温度调节介质流过所述流动通道的流量; 以及温度控制系统，用于基于由温度设定系统设定的值和由温度测量系统测量的值来控制与热量相关的温度调节系统的操作。

56. 发明授权

US4829485A Method of reading signals in a charge-storage line sensor in which each storage device is sequentially read and then reset during a subsequent dead time interval 失效
标题翻译：在其中每个存储装置被顺序读取然后在随后的死区时间间隔期间复位的电荷存储线传感器中读取信号的方法
公开(公告)号：US4829485A
公开(公告)日：1989-05-09
申请号：US68929
申请日：1987-07-01
申请人： Katsunori Hatanaka , Naoto Abe , Eiji Sakamoto , Toshihiro Saika
发明人： Katsunori Hatanaka , Naoto Abe , Eiji Sakamoto , Toshihiro Saika
IPC分类号： H04N1/19 , H04N1/028 , H04N1/193 , H04N1/40 , H04N5/335 , H04N5/341 , H04N5/353 , H04N5/369 , H04N5/374
CPC分类号： H04N1/40056 , H04N1/1931
摘要： A method of reading signals from a plurality of charge-storage devices in a charge-storage line sensor circuit so as to cause a switching device respectively corresponding to the plurality of charge-storage devices to sequentially read the stored signals and to sequentially reset the storage devices during a line read period. Dead time intervals are provided in the line read period between successive device read periods. A resetting operation for each storage device is performed in a dead time interval after the read operation for that storage device is completed.
摘要翻译：一种从电荷存储线传感器电路中的多个电荷存储装置读取信号的方法，以使分别对应于多个电荷存储装置的开关装置依次读取所存储的信号，设备在线读取期间。在连续设备读取周期之间的行读取周期中提供死区间隔。在该存储装置的读取操作完成之后，在死区时间间隔内执行每个存储装置的复位操作。

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