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51. 发明授权

US06583874B1 Spectrometer with holographic and echelle gratings 有权
标题翻译：光谱仪具有全息和梯形光栅
公开(公告)号：US06583874B1
公开(公告)日：2003-06-24
申请号：US09680932
申请日：2000-10-10
申请人： Toru Suzuki , Osamu Wakabayashi
发明人： Toru Suzuki , Osamu Wakabayashi
IPC分类号： G01J328
CPC分类号： G01J3/1809 , G01J3/14 , G01J3/1838
摘要： A spectrometer has higher resolving power without enlarging a size of the apparatus. This spectrometer has a slit board, a mirror, a collimator lens, a holographic grating, an Echelle grating, a magnifier lens and a line sensor. The holographic grating is arranged to diffract parallel light incident from the collimator lens toward the Echelle grating. The Echelle grating is arranged to reflect the parallel light incident from the holographic grating toward the holographic grating.
摘要翻译：光谱仪具有更高的分辨能力，而不增加设备的尺寸。该光谱仪具有狭缝板，反射镜，准直透镜，全息光栅，Echelle光栅，放大镜和行传感器。全息光栅布置成将从准直透镜入射的平行光衍射到Echelle光栅。 Echelle光栅布置成将从全息光栅入射的平行光反射到全息光栅。

52. 发明授权

US06317203B1 Narrowband module inspection device 有权
标题翻译：窄带模块检测装置
公开(公告)号：US06317203B1
公开(公告)日：2001-11-13
申请号：US09270656
申请日：1999-03-16
申请人： Osamu Wakabayashi , Takanori Nakaike
发明人： Osamu Wakabayashi , Takanori Nakaike
IPC分类号： G01J2100
CPC分类号： G03F7/70575 , G01M11/00
摘要： A light that radiates in the wavelength region of a narrowband laser beam is generated, this light is converted to a collimated beam after passing through a slit, and the converted light is incident on a narrowband module. The outputted light from the narrowband module is condensed, and this condensed light is incident on a light detector. A total reflection mirror is provided in a removable manner on the optical path in front of the narrowband module, the ratio between the output of the light detector in a state in which the total reflection mirror is provided on the optical path, and the output of the light detector in a state in which the total reflection mirror is removed, is determined, and the narrowband efficiency of the above-mentioned narrowband module is inspected based on the determined ratio.
摘要翻译：产生在窄带激光束的波长区域中发光的光，该光在通过狭缝后转换为准直光束，并且转换的光入射到窄带模块上。来自窄带模块的输出光被冷凝，并且该会聚的光入射到光检测器上。在窄带模块前面的光路上以可移动的方式设置全反射镜，在光路上设置全反射镜的状态下的光检测器的输出与输出确定去除全反射镜的状态下的光检测器，并且基于所确定的比率来检查上述窄带模块的窄带效率。

53. 发明授权

US06243163B1 Wavelength detector 有权
标题翻译：波长检测器
公开(公告)号：US06243163B1
公开(公告)日：2001-06-05
申请号：US09398191
申请日：1999-09-17
申请人： Osamu Wakabayashi , Tatsuo Enami , Shinji Nagai , Toru Suzuki , Takeshi Ohta , Hirokazu Kubo
发明人： Osamu Wakabayashi , Tatsuo Enami , Shinji Nagai , Toru Suzuki , Takeshi Ohta , Hirokazu Kubo
IPC分类号： G01J328
CPC分类号： G01J9/00 , G01J3/28
摘要： The present invention can accurately detect a wavelength of a light to be detected, which is output from a source of light to be detected, without an error even if there is a change in the characteristic of a spectroscope due to an individual difference among the spectroscopes or a change in the measuring environment. The device according to the invention emits at least two reference lights (Ln, La) having different wavelengths (&lgr;n, &lgr;a) as the reference lights by reference light source. And, actual characteristic value (D) of spectroscope is calculated on the basis of detection positions (Sn, Sa) of the at least two reference lights (Ln, La) on a sensor and the known wavelengths (&lgr;n, &lgr;a) of the at least two reference lights (Ln, La) (D=(&lgr;a−&lgr;n)/(Sa−Sn)). And, on the basis of the detection positions (Sn, SO) of the reference light (Ln) and the light to be detected (LO) on the sensor (10), the calculated actual characteristic value (D) of the spectroscope and the known wavelength (&lgr;n) of the reference light (Ln), wavelength (&lgr;O) of the light to be detected (LO) is calculated (&lgr;O=&lgr;n+(SO−Sn)·D).
摘要翻译：即使由于各分光器之间的个体差异而导致的分光器的特性发生变化，本发明也能够准确地检测从被检测光源输出的被检测光的波长或测量环境的变化。根据本发明的装置通过参考光源发射具有不同波长（lambdn，λ））的至少两个参考光（Ln，La）作为参考光。并且，基于传感器上的至少两个参考光（Ln，La）的检测位置（Sn，Sa）以及在传感器上的已知波长（lambdn，λ）来计算分光计的实际特征值（D）至少两个参考光（Ln，La）（D =（λ-lambdn）/（Sa-Sn）））。并且，基于传感器（10）上的基准光（Ln）和被检测光（LO）的检测位置（Sn，SO），计算出的分光器的实际特性值（D）和计算参考光（Ln）的已知波长（lambdn），待检测光（LO）的波长（lambd0）（lambdO = lambdn +（SO-Sn）.D）。

54. 发明授权

US6008497A Laser appartus 失效
标题翻译：激光appartus
公开(公告)号：US6008497A
公开(公告)日：1999-12-28
申请号：US29218
申请日：1998-02-25
申请人： Hakaru Mizoguchi , Osamu Wakabayashi , Yukio Kobayashi , Yoshiho Amada , Tatsuo Mimura
发明人： Hakaru Mizoguchi , Osamu Wakabayashi , Yukio Kobayashi , Yoshiho Amada , Tatsuo Mimura
IPC分类号： B23K26/03 , B23K26/06 , B23K26/42 , G03F7/20 , H01S3/134 , H01S3/225 , B23K26/00
CPC分类号： G03F7/70041 , B23K26/03 , B23K26/06 , B23K26/702 , G03F7/70025 , H01S3/134 , H01S3/225
摘要： A laser apparatus comprises storage means for storing a power source voltage of each pulse at the time of continuous pulse oscillation for one cycle, with each voltage correlated with an identifier which specifies the respective pulse, and output control means for, when a pulse is generated, reading from the storage means the source voltage of a pulse having the same identifier, and performing pulse oscillation on the basis of the source voltage. Thus the influence of the spiking phenomenon during a burst mode operation is eliminated as much as possible, and thereby the accuracy of laser beam machining is still more improved.
摘要翻译： PCT No.PCT / JP96 / 02820 Sec。 371日期：1998年2月25日 102（e）1998年2月25日PCT PCT 1996年9月27日PCT公布。公开号WO97 / 11810PC。日期1997年04月3日激光装置包括存储装置，用于在连续脉冲振荡时存储每个脉冲的电源电压一个周期，其中每个电压与指定相应脉冲的标识符相关，以及输出控制装置，当产生脉冲时，从存储装置读取具有相同标识符的脉冲的源电压，并且基于源电压执行脉冲振荡。因此，尽可能地消除了在突发模式操作期间的尖峰现象的影响，从而仍然进一步提高了激光束加工的精度。

55. 发明授权

US5642374A Excimer laser device 失效
标题翻译：准分子激光装置
公开(公告)号：US5642374A
公开(公告)日：1997-06-24
申请号：US420132
申请日：1995-04-10
申请人： Osamu Wakabayashi , Hakaru Mizoguchi
发明人： Osamu Wakabayashi , Hakaru Mizoguchi
IPC分类号： H01S3/104 , H01S3/10 , H01S3/134 , H01S3/225 , H01S3/22 , H01S3/223
CPC分类号： H01S3/134 , H01S3/225
摘要： Aimed at preventing a laser light beam profile from fluctuating, and by using the fact that there is a substantially proportional relation between the beam profile and the charging voltage as well as between the beam profile and the composition or the total pressure of the laser gases, an excimer laser device comprises a laser chamber containing laser gases which are excited by initiating an electric discharge in the laser chamber to output laser light, a beam profile detector for detecting a beam profile of the output laser light, and a controller for controlling a electric discharge voltage (excitation intensity) and composition or total pressure of the prescribed types of laser gases in such a way that the beam profile is shaped as desired based on detection results of the beam profile detector. An excimer laser feedback control circuit detects the output laser beam width and controls the beam width by controlling one or more of the laser voltage, composition of the laser gas, pressure or partial pressure of the laser gas, or feed rate of a laser gas. The laser gas may comprise a halogen, buffer, or rare gas.
摘要翻译：旨在防止激光束轮廓波动，并且通过使用光束轮廓和充电电压之间以及光束轮廓与激光气体的组成或总压力之间存在实质上成比例关系的事实，准分子激光装置包括激光室，其包含通过在激光室中引发放电而激发的激光气体输出激光，用于检测输出激光的光束分布的光束分布检测器，以及用于控制电放电电压（激发强度）和规定类型的激光气体的组成或总压力，使得根据光束轮廓检测器的检测结果，根据需要对光束轮廓进行成形。准分子激光反馈控制电路通过控制激光电压，激光气体的组成，激光气体的压力或分压或激光气体的进给速率中的一个或多个来检测输出激光束宽度并控制光束宽度。激光气体可以包括卤素，缓冲剂或稀有气体。

56. 发明授权

US5596596A Narrow band excimer laser 失效
标题翻译：窄带准分子激光器
公开(公告)号：US5596596A
公开(公告)日：1997-01-21
申请号：US573593
申请日：1995-12-15
申请人： Osamu Wakabayashi , Masahiko Kowaka , Yukio Kobayashi
发明人： Osamu Wakabayashi , Masahiko Kowaka , Yukio Kobayashi
IPC分类号： G03F7/20 , H01S3/08 , H01S3/1055 , H01S3/225
CPC分类号： G03F7/70025 , H01S3/08009 , H01S3/1055 , H01S3/225
摘要： A narrow-band excimer laser employing a diffraction grating as a wavelength selective element, which is particularly suited for a light source of a reduction projection aligner. The grating used in the narrow-band excimer laser of the invention is so disposed that the ruling direction of the grating is nearly perpendicular to the direction of laser discharge. When a beam expander is used to expand laser beam falling on the beam expander is so disposed that the direction of beam expansion is nearly perpendicular to that of discharge of the laser. Further, when an aperture is to be used in the laser cavity, the aperture is placed so that the longitudinal direction may be parallel to the direction of laser discharge. Moreover, the front mirror of the laser cavity is a cylindrical one, whose mechanical axis is in parallel with the direction of laser discharge. This makes it possible to provide a narrow-band excimer laser having very high efficiency and excellent durability.
摘要翻译：采用衍射光栅作为波长选择元件的窄带准分子激光器，其特别适用于还原投影对准器的光源。在本发明的窄带准分子激光器中使用的光栅被布置成使得光栅的光栅方向几乎垂直于激光放电的方向。当使用光束扩展器来扩展落在光束扩展器上的激光束时，光束扩展的方向几乎垂直于激光放电的方向。此外，当在激光腔中使用孔时，孔被放置成使得纵向方向可以平行于激光放电的方向。此外，激光腔的前镜是圆柱形的，其机械轴与激光放电的方向平行。这使得可以提供非常高的效率和优异的耐久性的窄带准分子激光器。

57. 发明授权

US09570884B2 Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light 有权
标题翻译：激光装置，极紫外光发生系统，激光装置的控制方法以及产生极紫外光的方法
公开(公告)号：US09570884B2
公开(公告)日：2017-02-14
申请号：US13817817
申请日：2012-01-25
申请人： Krzysztof Nowak , Osamu Wakabayashi
发明人： Krzysztof Nowak , Osamu Wakabayashi
IPC分类号： H01S5/06 , B82Y20/00 , G03F7/20 , H01S3/23 , H01S5/062 , H01S3/13 , H01S3/223 , H01S5/065 , H01S5/14 , H01S5/34 , H01S5/40 , H05G2/00
CPC分类号： H01S5/06 , B82Y20/00 , G03F7/70025 , G03F7/70033 , H01S3/1305 , H01S3/2232 , H01S3/2316 , H01S3/235 , H01S3/2375 , H01S5/0612 , H01S5/06216 , H01S5/0622 , H01S5/0653 , H01S5/0654 , H01S5/141 , H01S5/3402 , H01S5/4025 , H05G2/003 , H05G2/005 , H05G2/008
摘要： A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate, the master oscillator including at least one semiconductor laser apparatus; at least one amplifier configured to amplify the pulsed laser beam from the master oscillator, the at least one amplifier being configured to include at least one gain bandwidth; and a controller for controlling a parameter affecting an output wavelength of the pulsed laser beam from the master oscillator such that a wavelength chirping range of the pulsed laser beam from the master oscillator overlaps at least a part of the at least one gain bandwidth.
摘要翻译：激光装置可以包括：主振荡器，其被配置为以重复频率输出脉冲激光束，所述主振荡器包括至少一个半导体激光装置; 至少一个放大器被配置为放大来自所述主振荡器的所述脉冲激光束，所述至少一个放大器被配置为包括至少一个增益带宽; 以及控制器，用于控制影响来自主振荡器的脉冲激光束的输出波长的参数，使得来自主振荡器的脉冲激光束的波长啁啾范围与至少一个增益带宽的至少一部分重叠。

58. 发明授权

US09113540B2 System and method for generating extreme ultraviolet light 有权
公开(公告)号：US09113540B2
公开(公告)日：2015-08-18
申请号：US13492067
申请日：2012-06-08
申请人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi
发明人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi
IPC分类号： B82Y10/00 , H05G2/00 , H01S3/10 , H01S3/131 , H01S3/23
CPC分类号： H05G2/008 , H01S3/02 , H01S3/094026 , H01S3/10061 , H01S3/1106 , H01S3/131 , H01S3/1636 , H01S3/1643 , H01S3/2232 , H01S3/2316 , H01S3/2383 , H05G2/003 , H05G2/005
摘要： A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

59. 发明申请

US20150188274A1 METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS 有权
标题翻译：控制激光装置和激光装置的方法
公开(公告)号：US20150188274A1
公开(公告)日：2015-07-02
申请号：US14579698
申请日：2014-12-22
申请人： Osamu Wakabayashi , Hiroaki Tsushima , Kouji Kakizaki
发明人： Osamu Wakabayashi , Hiroaki Tsushima , Kouji Kakizaki
IPC分类号： H01S3/00 , H01S3/10 , H01S3/034 , H01S3/134 , H01S3/225 , H01S3/036
CPC分类号： H01S3/0014 , H01S3/034 , H01S3/036 , H01S3/10069 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A method of controlling a laser apparatus may include: exchanging a gain medium in a chamber configured to output a laser beam by exciting the gain medium; first measuring, after the exchanging, pulse energy of a laser beam which is oscillated in the chamber under a specific gas pressure and a specific charge voltage; calculating an approximate expression indicating a relationship between the pulse energy of the laser beam and the gas pressure in the chamber and the charge voltage, or a table representing a correlationship between the pulse energy, the gas pressure and the charge voltage, based on the specific pressure, the specific charge voltage and the pulse energy in the first measuring; storing the approximate expression or the table; second measuring, after the first measuring, pulse energy Er of a laser beam oscillated in the chamber; calculating pulse energy Eec which is supposed to be obtained directly after the exchanging under the gas pressure and the charge voltage in the second measuring based on the approximate expression or the table; calculating a reduction amount ΔEd of pulse energy based on the pulse energy Eec and the pulse energy Er using ΔEd=Eec−Er; and calculating a partial gas exchange amount Q for partial gas exchange in the chamber based on the reduction amount ΔEd of pulse energy.
摘要翻译：控制激光装置的方法可以包括：在配置成通过激励增益介质输出激光束的腔室中交换增益介质; 在交换之后，首先测量在特定气体压力和特定充电电压下在腔室中振荡的激光束的脉冲能量; 计算表示激光束的脉冲能量与腔室中的气体压力与充电电压之间的关系的近似表达式，或表示脉冲能量，气体压力和充电电压之间的相关性的表格，压力，第一次测量中的具体充电电压和脉冲能量; 存储近似表达式或表格; 在第一次测量之后，第二次测量激光束的脉冲能量Er在腔室中振荡; 基于近似表达式或表格，计算在气体压力下的交换和第二测量中的充电电压之间直接获得的脉冲能量Eec; 使用＆Dgr; Ed = Eec-Er计算基于脉冲能量Eec和脉冲能量Er的脉冲能量的减少量＆Dgr; Ed; 并且基于脉冲能量的减少量＆Dgr; Ed计算腔室中部分气体交换的部分气体交换量Q。

60. 发明授权

US08901522B2 Chamber apparatus and extreme ultraviolet light generation system 有权
标题翻译：室内设备和极紫外光发生系统
公开(公告)号：US08901522B2
公开(公告)日：2014-12-02
申请号：US13196311
申请日：2011-08-02
申请人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
发明人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
IPC分类号： H05G2/00 , G21K5/00 , G03F7/20
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70916 , H05G2/008
摘要： A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet through which a laser beam outputted from the laser apparatus enters the chamber; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a magnetic field generation unit for generating a magnetic field in the predetermined region; and a charged particle collection unit disposed in a direction of a magnetic flux of the magnetic field for collecting a charged particle thereinto, the charged particle being generated when the target material is irradiated with the laser beam inside the chamber and traveling along the magnetic flux.
摘要翻译：与激光装置一起使用的室装置可以包括：设置有至少一个入口的室，从激光装置输出的激光束通过该入口进入室; 目标供给单元，其设置在所述室中，用于将目标材料供应到所述室内的预定区域; 用于在预定区域中产生磁场的磁场产生单元; 以及带电粒子收集单元，其设置在所述磁场的磁通方向上，用于收集带电粒子，所述带电粒子是当所述靶材料被所述腔室内的所述激光束照射并且沿着所述磁通量行进时产生的。

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