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    • 52. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20120074418A1
    • 2012-03-29
    • US13298469
    • 2011-11-17
    • Shunpei YAMAZAKI
    • Shunpei YAMAZAKI
    • H01L27/12
    • H01L27/124H01L27/1214H01L27/127H01L29/42384H01L2029/7863
    • NTFT of the present invention has a channel forming region, n-type first, second, and third impurity regions in a semiconductor layer. The second impurity region is a low concentration impurity region that overlaps a tapered potion of a gate electrode with a gate insulating film interposed therebetween, and the impurity concentration of the second impurity region increases gradually from the channel forming region to the first impurity region. And, the third impurity region is a low concentration impurity region that does not overlap the gate electrode. Moreover, a plurality of NTFTs on the same substrate have different second impurity region lengths, respectively, according to difference of the operating voltages. That is, when the operating voltage of the second TFT is higher than the operating voltage of the first TFT, the length of the second impurity region is longer on the second TFT than on the first TFT.
    • 本发明的NTFT在半导体层中具有沟道形成区域,n型第一,第二和第三杂质区域。 第二杂质区域是与栅电极的锥形部分重叠的低浓度杂质区域,其间插入有栅极绝缘膜,并且第二杂质区域的杂质浓度从沟道形成区域逐渐增加到第一杂质区域。 并且,第三杂质区域是不与栅电极重叠的低浓度杂质区域。 此外,根据工作电压的差异,同一衬底上的多个NTFT分别具有不同的第二杂质区长度。 也就是说,当第二TFT的工作电压高于第一TFT的工作电压时,第二TFT上的第二杂质区域的长度比第一TFT长。
    • 54. 发明申请
    • METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20120064677A1
    • 2012-03-15
    • US13225703
    • 2011-09-06
    • Hidekazu MIYAIRIKoji DAIRIKIShunpei YAMAZAKIRyo ARASAWA
    • Hidekazu MIYAIRIKoji DAIRIKIShunpei YAMAZAKIRyo ARASAWA
    • H01L21/336
    • H01L29/78678H01L29/66765H01L29/78606H01L29/78648H01L29/78669H01L29/78696
    • Provided is a method for manufacturing a semiconductor device with fewer masks and in a simple process. A gate electrode is formed. A gate insulating film, a semiconductor film, an impurity semiconductor film, and a conductive film are stacked in this order, covering the gate electrode. A source electrode and a drain electrode are formed by processing the conductive film. A source region, a drain region, and a semiconductor layer, an upper part of a portion of which does not overlap with the source region and the drain region is removed, are formed by processing the upper part of the semiconductor film, while the impurity semiconductor film is divided. A passivation film over the gate insulating film, the semiconductor layer, the source region, the drain region, the source electrode, and the drain electrode are formed. An etching mask is formed over the passivation film. At least the passivation film and the semiconductor layer are processed to have an island shape while an opening reaching the source electrode or the drain electrode is formed, with the use of the etching mask. The etching mask is removed. A pixel electrode is formed over the gate insulating film and the passivation film.
    • 提供一种用于制造具有较少掩模的半导体器件的方法,并且在简单的过程中。 形成栅电极。 依次层叠栅绝缘膜,半导体膜,杂质半导体膜和导电膜,覆盖栅电极。 通过处理导电膜形成源电极和漏电极。 通过处理半导体膜的上部,形成源区域,漏极区域和半导体层,其部分的上部不与源极区域和漏极区域重叠,而杂质 半导体薄膜被划分。 形成栅极绝缘膜,半导体层,源极区域,漏极区域,源极电极和漏极电极之后的钝化膜。 在钝化膜上形成蚀刻掩模。 通过使用蚀刻掩模,至少钝化膜和半导体层被加工成具有岛状,同时形成到达源电极或漏电极的开口。 去除蚀刻掩模。 在栅极绝缘膜和钝化膜上形成像素电极。
    • 56. 发明申请
    • SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体器件及其制造方法
    • US20120058599A1
    • 2012-03-08
    • US13227585
    • 2011-09-08
    • Shunpei YAMAZAKIHidekazu MIYAIRIKengo AKIMOTOKojiro SHIRAISHI
    • Shunpei YAMAZAKIHidekazu MIYAIRIKengo AKIMOTOKojiro SHIRAISHI
    • H01L21/02H01L21/20
    • H01L29/7869H01L27/1225
    • The semiconductor device includes a thin film transistor which includes a gate electrode layer, a gate insulating layer over the gate electrode layer, a source electrode layer and a drain electrode layer over the gate insulating layer, a buffer layer over the source electrode layer and the drain electrode layer, and a semiconductor layer over the buffer layer. A part of the semiconductor layer overlapping with the gate electrode layer is over and in contact with the gate insulating layer and is provided between the source electrode layer and the drain electrode layer. The semiconductor layer is an oxide semiconductor layer containing indium, gallium, and zinc. The buffer layer contains a metal oxide having n-type conductivity. The semiconductor layer and the source and drain electrode layers are electrically connected to each other through the buffer layer.
    • 该半导体器件包括薄膜晶体管,该薄膜晶体管包括栅极电极层,栅极电极层上的栅极绝缘层,栅极绝缘层上的源极电极层和漏极电极层,源电极层上的缓冲层和 漏极电极层和缓冲层上的半导体层。 与栅电极层重叠的半导体层的一部分与栅极绝缘层相接触并且设置在源极电极层和漏极电极层之间。 半导体层是含有铟,镓和锌的氧化物半导体层。 缓冲层含有具有n型导电性的金属氧化物。 半导体层和源极和漏极电极层通过缓冲层彼此电连接。
    • 57. 发明申请
    • METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20120058598A1
    • 2012-03-08
    • US13211588
    • 2011-08-17
    • Shunpei YAMAZAKI
    • Shunpei YAMAZAKI
    • H01L21/34
    • H01L21/02565H01L21/02488H01L21/02554H01L21/02631H01L21/283H01L29/66969H01L29/78603H01L29/7869
    • Electrical characteristics of transistors using an oxide semiconductor are greatly varied in a substrate, between substrates, and between lots, and the electrical characteristics are changed due to heat, bias, light, or the like in some cases. In view of the above, a semiconductor device using an oxide semiconductor with high reliability and small variation in electrical characteristics is manufactured. In a method for manufacturing a semiconductor device, hydrogen in a film and at an interface between films is removed in a transistor using an oxide semiconductor. In order to remove hydrogen at the interface between the films, the substrate is transferred under a vacuum between film formations. Further, as for a substrate having a surface exposed to the air, hydrogen on the surface of the substrate may be removed by heat treatment or plasma treatment.
    • 使用氧化物半导体的晶体管的电气特性在基板,基板之间和批次之间变化很大,并且电特性在某些情况下由于热,偏压,光等而改变。 鉴于上述,制造了使用具有高可靠性和小的电特性变化的氧化物半导体的半导体器件。 在制造半导体器件的方法中,使用氧化物半导体在晶体管中去除膜中的膜和膜之间的界面处的氢。 为了在膜之间的界面处除去氢,基板在膜形成之间在真空下转移。 此外,对于具有暴露于空气的表面的基板,可以通过热处理或等离子体处理来去除基板表面上的氢。