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    • 56. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPH08148616A
    • 1996-06-07
    • JP28805894
    • 1994-11-22
    • MITSUBISHI HEAVY IND LTD
    • KURODA YOSHIKATSUISHII SHIGERU
    • H01L23/34
    • PURPOSE: To realize a compact, lightweight semiconductor having a high radiation hardening ability by providing a heater circuit inside a substrate and by forming a package material for semiconductor device with a tungsten alloy or a ceramic material. CONSTITUTION: A semiconductor 1 and electronic parts are mounted on a multi- layer substrate 3 with a built-in heater inside a radiation shielding device covered with a tungsten alloy package 7 and a tungsten alloy package cover 11 sealed with solder 10. Specially, a heater circuit 4 is provided inside the multi- layer substrate 3 with a built-in heater. Also, the package material of the semiconductor device is made of a tungsten alloy. In this way, a device for removing the influence of the radiation is added to the inside of the circuit substrate 3, thereby permitting a configuration of a compact, lightweight semiconductor device. Also, the inside of the semiconductor is activated and an electric charge generated during irradiation is decreased, thereby permitting great enhancement in radiation hardening ability.
    • 59. 发明专利
    • SEMICONDUCTOR RADIATION DETECTING ELEMENT
    • JPH10311878A
    • 1998-11-24
    • JP12224697
    • 1997-05-13
    • DORYOKURO KAKUNENRYOMITSUBISHI HEAVY IND LTD
    • WADA TAKAOISHIBASHI YUZOISHII SHIGERUKURODA YOSHIKATSU
    • G01T1/24G01T1/26H01L31/09H01L31/115
    • PROBLEM TO BE SOLVED: To perform a precise detection without being influenced by the temperature fluctuation of a detecting element by detecting radiation dose on the basis of the ratio of resistance values of a plurality of semiconductors having the same temperature dependency of resistance value change ratio and differed in thickness. SOLUTION: When a radiation is absorbed, a fixed positive charge of a quantity according to the radiation total dose is generated in an insulating layer 12 and an insulating film 14. This fixed positive charge increases the resistance values of the parts contact with the insulating layer 12 and the insulating film 14 in p-type Si layers 13a, 13b. The respective resistance value change ratios of the p-type Si layers 13a, 13b are differed depending on thickness. The output value of an electrode 15b in which the voltage applied to an electrode 15a is partially divided by the p-type Si layers 13a, 13b is detected according to the difference in resistance value change ratio between the p-type Si layers 13a, 13b, whereby the radiation total dose can be measured. Since the p-type Si layers 13a, 13b of this detecting element can be formed in the same manufacturing process, a precise detection can be performed with being hardly influenced by the error by temperature fluctuation of the detecting element itself.
    • 60. 发明专利
    • SEMICONDUCTOR VESSEL AND DEVICE
    • JPH0817956A
    • 1996-01-19
    • JP14311494
    • 1994-06-24
    • MITSUBISHI HEAVY IND LTD
    • SHIBAYAMA NAOKIKURODA YOSHIKATSU
    • H01L23/28H01L23/02H01L23/06H01L23/08H01L23/24H01L23/29H01L23/31
    • PURPOSE:To obtain a semiconductor vessel and device having optimum shielding capacity from the radiation e.g. gamma ray, neutron, etc., by a method wherein a material powder comprising graphite, cadmium oxide, etc., and iron powder/or lead powder are mixed with each other at a specific volume percentage to be pressure molded. CONSTITUTION:A substrate 19 mounted with a semiconductor chip 18 is arranged in a semiconductor vessel 11. In this semiconductor vessel 11, the material powder is composed of a mixture of a neutron moderator comprising graphite, a neutron absorbent comprising cadmium oxide and a gamma ray shielding material comprising tungsten oxide. Next, this material powder are evenly mixed with iron powder and/or lead powder to be pressure molded at a temperature exceeding the melting point of iron and/or lead. At this time, mixing ratio of the material powder and iron powder and/or lead powder is specified to be 90-95% of the material powder and 10-5% of iron powder and/or lead powder in the volume percentage. Through these procedures, the semiconductor vessel 11 having optimum shielding capacity from the radiation e.g. gamma ray, neutron, etc., can be obtained.