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51. 发明授权

US10168213B2 Spectroscopic sensor including interference filter unit having silicon oxide cavity 有权
公开(公告)号：US10168213B2
公开(公告)日：2019-01-01
申请号：US14349101
申请日：2012-09-10
申请人： Katsumi Shibayama , Takashi Kasahara
发明人： Katsumi Shibayama , Takashi Kasahara
IPC分类号： G01J3/45 , G01J3/26 , G01J3/02 , G01J3/36 , G01J3/51 , G01J3/12 , G01J3/28
摘要： A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and first and second mirror layers 22, 23 opposing each other through the cavity layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the first mirror layer 22 side, for transmitting therethrough light incident on the interference filter unit 20, a light-detecting substrate 4, arranged on the second mirror layer 23 side, for detecting the light transmitted through the interference filter unit 20, and a first coupling layer 11 arranged between the interference filter unit 20 and the light-transmitting substrate 3. The cavity layer 21 and the first coupling layer 11 are silicon oxide films.

52. 发明授权

US09222831B2 Spectroscope 有权
标题翻译：光谱仪
公开(公告)号：US09222831B2
公开(公告)日：2015-12-29
申请号：US14234663
申请日：2012-05-28
申请人： Takafumi Yokino , Katsumi Shibayama , Masaki Hirose , Katsuhiko Kato
发明人： Takafumi Yokino , Katsumi Shibayama , Masaki Hirose , Katsuhiko Kato
IPC分类号： G01J3/28 , G01J3/02 , G01J3/18 , G01J3/24
CPC分类号： G01J3/0205 , G01J3/0202 , G01J3/0256 , G01J3/0262 , G01J3/0291 , G01J3/1838 , G01J3/24 , G01J3/2803 , G01J2003/1852
摘要： A spectroscope comprises a package provided with a light entrance part, a plurality of lead pins penetrating through a support part opposing the light entrance part in the package, a light detection unit supported on the support part within the package, and a spectroscopic unit supported on the support part within the package so as to be arranged on the support part side of the light detection unit. The light detection unit has a light transmission part for transmitting therethrough light incident thereon from the light entrance part. The spectroscopic unit has a spectroscopic part for spectrally resolving the light transmitted through the light transmission part while reflecting the light to a light detection part. The lead pins are fitted into fitting parts provided with the light detection unit and electrically connected to the light detection part.
摘要翻译：分光镜包括设置有光入射部的多个引线，穿过与封装体内的光入射部相对的支撑部的多个引脚，支撑在封装内的支撑部上的光检测部，所述支撑部分在所述包装内，以布置在所述光检测单元的所述支撑部分侧上。光检测单元具有用于透射从入射部入射到其上的光的光透射部。分光单元具有分光部分，用于在将光反射到光检测部分的同时光谱分辨透过透光部分的光。导引针安装在配备有光检测单元的配件中并电连接到光检测部件。

53. 发明申请

US20140268138A1 SPECTROSCOPE 有权
公开(公告)号：US20140268138A1
公开(公告)日：2014-09-18
申请号：US14234663
申请日：2012-05-28
申请人： Takafumi Yokino , Katsumi Shibayama , Masaki Hirose , Katsuhiko Kato
发明人： Takafumi Yokino , Katsumi Shibayama , Masaki Hirose , Katsuhiko Kato
IPC分类号： G01J3/02
CPC分类号： G01J3/0205 , G01J3/0202 , G01J3/0256 , G01J3/0262 , G01J3/0291 , G01J3/1838 , G01J3/24 , G01J3/2803 , G01J2003/1852
摘要： A spectroscope comprises a package provided with a light entrance part, a plurality of lead pins penetrating through a support part opposing the light entrance part in the package, a light detection unit supported on the support part within the package, and a spectroscopic unit supported on the support part within the package so as to be arranged on the support part side of the light detection unit. The light detection unit has a light transmission part for transmitting therethrough light incident thereon from the light entrance part. The spectroscopic unit has a spectroscopic part for spectrally resolving the light transmitted through the light transmission part while reflecting the light to a light detection part. The lead pins are fitted into fitting parts provided with the light detection unit and electrically connected to the light detection part.
摘要翻译：分光镜包括设置有光入射部的多个引线，穿过与封装体内的光入射部相对的支撑部的多个引脚，支撑在封装内的支撑部上的光检测部，所述支撑部分在所述包装内，以布置在所述光检测单元的所述支撑部分侧上。光检测单元具有用于透射从入射部入射到其上的光的光透射部。分光单元具有分光部分，用于在将光反射到光检测部分的同时光谱分辨透过透光部分的光。导引针安装在配备有光检测单元的配件中并电连接到光检测部件。

54. 发明申请

US20140256079A1 PRODUCTION METHOD FOR SPECTROSCOPIC SENSOR 有权
标题翻译：光谱传感器的生产方法
公开(公告)号：US20140256079A1
公开(公告)日：2014-09-11
申请号：US14349097
申请日：2012-09-10
申请人： Katsumi Shibayama , Takashi Kasahara
发明人： Katsumi Shibayama , Takashi Kasahara
IPC分类号： H01L31/18
CPC分类号： H01L31/1896 , G01J3/02 , G01J3/0259 , G01J3/26 , G01J3/2803 , G01J3/36 , G01J2003/1234 , G02B5/28 , G02B5/284 , H01L31/0232
摘要： A method for manufacturing a spectroscopic sensor 1 comprises a first step of forming a cavity layer 21 by etching a surface layer disposed on a handle substrate, a second step of forming a first mirror layer 22 on the cavity layer 21 after the first step, a third step of joining a light-transmitting substrate 3 onto the first mirror layer 22 after the second step, a fourth step of removing the handle substrate from the cavity layer 21 after the third step, a fifth step of forming a second mirror layer 23 on the cavity layer 21 devoid of the handle substrate after the fourth step, and a sixth step of joining a light-detecting substrate 4 onto the second mirror layer after the fifth step.
摘要翻译：用于制造分光传感器1的方法包括：通过蚀刻设置在手柄基板上的表面层来形成空腔层21的第一步骤，在第一步骤之后在空腔层21上形成第一反射镜层22的第二步骤，在第二步骤之后将透光基板3接合到第一镜面层22上的第三步骤，在第三步骤之后从空腔层21去除手柄基板的第四步骤，将第二镜面层23形成在第五步骤上的第五步骤在第四步骤之后没有手柄基板的空腔层21，以及在第五步骤之后将光检测基板4接合到第二镜面层上的第六步骤。

55. 发明授权

US08477305B2 Spectroscope 有权
公开(公告)号：US08477305B2
公开(公告)日：2013-07-02
申请号：US13177804
申请日：2011-07-07
申请人： Katsumi Shibayama , Tomofumi Suzuki , Masashi Ito
发明人： Katsumi Shibayama , Tomofumi Suzuki , Masashi Ito
IPC分类号： G01J1/42 , G01J1/44
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0218 , G01J3/0259 , G01J3/0291
摘要： The spectrometer 1 is provided with a package 2 in which a light guiding portion 7 is provided, a spectroscopic module 3 accommodated inside the package 2, and a support member 29 arranged on an inner wall plane of the package 2 to support the spectroscopic module 3. The spectroscopic module 3 is provided with a body portion 11 for transmitting light made incident from the light guiding portion 7 and a spectroscopic portion 13 for dispersing light passed through the body portion 11 on a predetermined plane of the body portion 11, and the spectroscopic portion 13 is supported by the support member 29 on the predetermined plane in a state of being spaced away from the inner wall plane.

56. 发明授权

US08389322B2 Photodiode array, method of manufacturing the same, and radiation detector 有权
标题翻译：光电二极管阵列，制造方法及放射线检测器
公开(公告)号：US08389322B2
公开(公告)日：2013-03-05
申请号：US12656175
申请日：2010-01-20
申请人： Katsumi Shibayama
发明人： Katsumi Shibayama
IPC分类号： H01L21/00
CPC分类号： H01L27/14603 , H01L27/14609 , H01L27/14634 , H01L27/14658 , H01L2224/05001 , H01L2224/05008 , H01L2224/05009 , H01L2224/05024 , H01L2224/05025 , H01L2224/05027 , H01L2224/05124 , H01L2224/05155 , H01L2224/05166 , H01L2224/05169 , H01L2224/05171 , H01L2224/05568 , H01L2224/05644 , H01L2224/13 , H01L2924/00014
摘要： A theme is to prevent the generation of noise due to damage in a photodetecting portion in a mounting process in a photodiode array, a method of manufacturing the same, and a radiation detector. In a photodiode array, wherein a plurality of photodiodes (4) are formed in array form on a surface at a side of an n-type silicon substrate (3) onto which light to be detected is made incident and penetrating wirings (8), which pass through from the incidence surface side to the back surface side, are formed for the photodiodes (4), the photodiode array (1) is arranged with a transparent resin film (6), which covers the formed regions of the photodiodes (4) and transmits the light to be detected, provided at the incidence surface side.
摘要翻译：主题是为了防止由于光电二极管阵列的安装处理中的光检测部分的损坏而产生噪声，其制造方法和放射线检测器。在光电二极管阵列中，其中多个光电二极管（4）以阵列形式形成在n型硅衬底（3）的一侧的表面上，待检测的光线入射到该入射和穿透的布线（8）上，为光电二极管（4）形成从入射面侧向背面侧通过的光电二极管阵列（1），配置有透明树脂膜（6），该透明树脂膜（6）覆盖光电二极管（4）的形成区域），并且设置在入射面侧，透射被检测光。

57. 发明申请

US20110261356A1 SPECTROSCOPE 有权
公开(公告)号：US20110261356A1
公开(公告)日：2011-10-27
申请号：US13177804
申请日：2011-07-07
申请人： Katsumi Shibayama , Tomofumi Suzuki , Masashi Ito
发明人： Katsumi Shibayama , Tomofumi Suzuki , Masashi Ito
IPC分类号： G01J3/02
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0218 , G01J3/0259 , G01J3/0291
摘要： The spectrometer 1 is provided with a package 2 in which a light guiding portion 7 is provided, a spectroscopic module 3 accommodated inside the package 2, and a support member 29 arranged on an inner wall plane of the package 2 to support the spectroscopic module 3. The spectroscopic module 3 is provided with a body portion 11 for transmitting light made incident from the light guiding portion 7 and a spectroscopic portion 13 for dispersing light passed through the body portion 11 on a predetermined plane of the body portion 11, and the spectroscopic portion 13 is supported by the support member 29 on the predetermined plane in a state of being spaced away from the inner wall plane.
摘要翻译：光谱仪1设置有其中设置有导光部7的封装2，容纳在封装2内部的分光模块3和布置在封装2的内壁面上以支撑光谱模块3的支撑构件29 分光模块3设置有用于透射从导光部7入射的光的主体部11和用于将通过主体部11的光分散在主体部11的预定平面上的分光部13，部分13在与内壁平面间隔开的状态下由支撑构件29支撑在预定平面上。

58. 发明授权

US08035814B2 Spectroscopy module 有权
标题翻译：光谱模块
公开(公告)号：US08035814B2
公开(公告)日：2011-10-11
申请号：US12464273
申请日：2009-05-12
申请人： Katsumi Shibayama , Tomofumi Suzuki , Masaki Hirose
发明人： Katsumi Shibayama , Tomofumi Suzuki , Masaki Hirose
IPC分类号： G01J3/28
CPC分类号： G01J3/2803 , G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/0286 , G01J3/18
摘要： In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, on the light detecting element 5, a first convex portion 101 is formed so as to be located at least between the light detecting portion 5a and the light passing hole 50 when viewed from a direction substantially perpendicular to the front plane 2a. Thus, when the light detecting element 5 is attached to the substrate 2 via the optical resin adhesive 63, the optical resin adhesive 63 is dammed at the first convex portion 101. Thus, the optical resin adhesive 63 is prevented from penetrating into the light passing hole 50.
摘要翻译：在光谱模块1中，在光检测元件5中形成有通过向分光部4前进的光L1通过的光通过孔50.因此，能够防止光通过孔50与光检测元件5的光检测部分5a偏离。此外，光检测元件5利用光学树脂粘合剂63接合到基板2的前面2a。因此，可以减少由于光的热膨胀差而在光检测元件5上产生的应力检测元件5和基板2.此外，在光检测元件5上，当从基本上垂直的方向观察时，形成至少位于光检测部分5a和光通过孔50之间的第一凸部101 到前平面2a。因此，当光检测元件5经由光学树脂粘合剂63安装到基板2上时，光学树脂粘合剂63被阻挡在第一凸部101处。因此，防止光学树脂粘合剂63渗透到光通过孔50。

59. 发明申请

US20110164247A1 SPECTRAL MODULE 有权
标题翻译：光谱模块
公开(公告)号：US20110164247A1
公开(公告)日：2011-07-07
申请号：US12992398
申请日：2009-05-07
申请人： Katsumi Shibayama , Takafumi Yokino , Masaki Hirose , Masashi Ito
发明人： Katsumi Shibayama , Takafumi Yokino , Masaki Hirose , Masashi Ito
IPC分类号： G01J3/18 , G01J3/40
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0243 , G01J3/0256 , G01J3/0259 , G01J3/0286 , G01J3/0297 , G01J2003/1213 , G02B5/1814 , G02B5/1852 , G02B5/1861 , G02B7/025 , G02B27/4244
摘要： A spectral module 1 comprises a substrate 2 for transmitting light L1 incident thereon from a front face 2a, a lens unit 3 for transmitting the light L1 incident on the substrate 2, a spectroscopic unit 4 for reflecting and spectrally resolving the light L1 incident on the lens unit 3, and a photodetector 5 for detecting light L2 reflected by the spectroscopic unit 4. The substrate 2 is provided with a recess 19 having a predetermined positional relationship with alignment marks 12a, 12b and the like serving as a reference unit for positioning the photodetector 5, while the lens unit 3 is mated with the recess 19. The spectral module 1 achieves passive alignment between the spectroscopic unit 4 and photodetector 5 when the lens unit 3 is simply mated with the recess 19.
摘要翻译：光谱模块1包括用于透射从前面2a入射的光L1的基板2，用于透射入射到基板2上的光L1的透镜单元3，用于反射和光谱分辨入射在基板2上的光L1的分光单元4 透镜单元3和用于检测由分光单元4反射的光L2的光检测器5.基板2设置有与作为用于定位的基准单元的对准标记12a，12b等具有预定位置关系的凹部19 光电检测器5，而透镜单元3与凹槽19配合。当透镜单元3简单地与凹部19配合时，光谱模块1实现分光单元4和光电检测器5之间的无源对准。

60. 发明申请

US20110116091A1 SPECTRAL MODULE 审中-公开
标题翻译：光谱模块
公开(公告)号：US20110116091A1
公开(公告)日：2011-05-19
申请号：US12992445
申请日：2009-05-07
申请人： Katsumi Shibayama
发明人： Katsumi Shibayama
IPC分类号： G01J3/18
CPC分类号： G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0243 , G01J3/0256 , G01J3/0262 , G01J3/0286 , G01J3/18 , G01J3/2803 , G02B5/1814 , G02B5/1861 , G02B7/008
摘要： In a spectral module 1, a photodetector 5 is mounted to an intermediate substrate 81, whereby an optical resin agent 63 interposed between a front face 2a of a substrate 2 and the intermediate substrate 81 is prevented from intruding into a light transmitting hole 50 of the photodetector 5. This can prevent refraction, scattering, and the like from occurring and make light Li appropriately enter a spectroscopic unit 4. In addition, the intermediate substrate 81 has a volume smaller than that of the substrate 2, whereby the intermediate substrate 81 expands/shrinks in a state more similar to the photodetector 5 than the substrate 2 when the temperature in the surroundings of the spectral module 1 changes. Hence, bump connections of the photodetector 5 can more reliably be prevented from breaking upon changes in the temperature in the surroundings of the spectral module 1 than when the photodetector 5 is mounted to the substrate 2.
摘要翻译：在光谱模块1中，将光电检测器5安装在中间基板81上，防止插入在基板2的正面2a和中间基板81之间的光学树脂试剂63侵入到这可以防止发生折射，散射等，并使光Li适当地进入分光单元4.另外，中间基板81的体积小于基板2的体积，由此中间基板81膨胀当光谱模块1的周围的温度变化时，以比基板2更为类似于光电检测器5的状态收缩。因此，与将光检测器5安装在基板2上的情况相比，能够更可靠地防止光电检测器5的波峰连接在光谱模块1的周围温度变化时的断裂。

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