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    • 52. 发明申请
    • Diamond single crystal composite substrate and method for manufacturing the same
    • 金刚石单晶复合基板及其制造方法
    • US20050139150A1
    • 2005-06-30
    • US10980152
    • 2004-11-04
    • Kiichi MeguroYoshiyuki YamamotoTakahiro Imai
    • Kiichi MeguroYoshiyuki YamamotoTakahiro Imai
    • C01B31/06C30B25/02C30B25/18C30B25/20C30B29/04C30B23/00C30B25/00C30B28/12C30B28/14
    • C30B29/04C30B25/20
    • A diamond single crystal composite substrate which are constructed from a plurality of diamond single crystal substrates with uniform plane orientations disposed side by side and integrated overall by growing diamond single crystals thereon by vapor phase synthesis, in which the deviation of the plane orientation of the main plane of each of said plurality of diamond single crystal substrates, excluding one diamond single crystal substrate, from the {100} plane is less than 1 degree, the deviation of the plane orientation of the main plane of the excluded one substrate from the {100} plane is 1 to 8 degrees, said one diamond single crystal substrate is disposed in the outermost circumferential part when the diamond single crystal substrates are disposed side by side, and is disposed so that the direction in the main plane of said one substrate faces in the outer circumferential direction of the disposed substrates, and diamond single crystals are then grown by vapor phase synthesis so that the diamond single crystal grown from said one diamond single substrate is caused to cover the diamond single crystals grown on the other substrates, to achieve an overall integration.
    • 一种金刚石单晶复合基板,其由具有均匀平面取向的多个金刚石单晶基板构成,并且通过气相合成在其上生长金刚石单晶整体并入,其中主体的平面取向偏离 从{100}平面除去一个金刚石单晶衬底的所述多个金刚石单晶衬底中的每一个的平面的面积小于1度,排除的一个衬底的主平面的平面取向与{100 }平面为1〜8度,当金刚石单晶基板并排配置时,所述一个金刚石单晶基板配置在最外周部,并且配置成使得在所述一个的主平面中的<100>方向 衬底在所设置的衬底的外周方向上面对,然后通过气相合成生长金刚石单晶 使得从所述一个金刚石单个衬底生长的金刚石单晶被覆盖在其它衬底上生长的金刚石单晶,以实现整体的整合。