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51. 发明专利

JP2005101993A Logic circuit 有权
标题翻译：逻辑电路
公开(公告)号：JP2005101993A
公开(公告)日：2005-04-14
申请号：JP2003334368
申请日：2003-09-25
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YAMASHITA HIROKI , KOYAMA AKIO , AIDA SHINYO , ITO ATSUSHI , SONEHARA MICHIHITO
IPC分类号： H03K19/086 , H03F1/30 , H03F3/45 , H03K5/22 , H03K19/003 , H03K19/0944
CPC分类号： H03K19/00369 , H03F1/301 , H03K19/09448
摘要： PROBLEM TO BE SOLVED: To cut dependence on a power supply voltage of a current switch current and to lower the power supply voltage.
SOLUTION: The logic circuit includes an emitter-coupled logic circuit 118 and a reference voltage generating circuit 119 which generates a reference voltage VCSC for controlling a drain current (= current switch current ICS) of an n-type MOS transistor 110 for a current generator. The emitter-coupled logic circuit 118 includes a current switch which is composed of an emitter-coupled pair of bipolar transistors 106 and 107, the n-type MOS transistor 110 for a current generator which is connected in series with the current switch and resistor means 108 and 109 which are respectively connected in series with the bipolar transistor 106 and 107 for taking out an output voltage. The reference voltage generating circuit 119 includes an n-type MOS transistor 111, a bipolar transistor 112 which determines the drain voltage of the n-type MOS transistor 111 and a control circuit 120 which controls the drain current of the n-type MOS transistor 111.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：减少对电流开关电流的电源电压的依赖性并降低电源电压。解决方案：逻辑电路包括发射极耦合逻辑电路118和参考电压产生电路119，其产生用于控制n型MOS晶体管110的漏极电流（=电流开关电流ICS）的参考电压VCSC，用于电流发生器。发射极耦合逻辑电路118包括由发射极耦合的双极晶体管106和107组成的电流开关，用于与电流开关串联连接的电流发生器的n型MOS晶体管110和电阻器装置 108和109分别与双极晶体管106和107串联连接以取出输出电压。参考电压发生电路119包括n型MOS晶体管111，确定n型MOS晶体管111的漏极电压的双极晶体管112和控制n型MOS晶体管111的漏极电流的控制电路120 （C）2005，JPO＆NCIPI

52. 发明专利

JP2004247741A Substrate processing apparatus and method to process substrate 有权
公开(公告)号：JP2004247741A
公开(公告)日：2004-09-02
申请号：JP2004043759
申请日：2004-02-20
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KATO SHIGEKAZU , NISHIHATA KOJI , TSUBONE TSUNEHIKO , ITO ATSUSHI
IPC分类号： H01L21/3065 , H01L21/02 , H01L21/205 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a vacuum treatment and a vacuum treatment method to realize a high production efficiency.
SOLUTION: The substrate processing apparatus comprises a cassette table that keeps a substrate mounted on a cassette 1 horizontal, a primary transport device 13 arranged to be able to access multiple units of the cassettes 1 on the cassette table 2 and a substrate receiving room 5 or a substrate ejecting room 6, a transfer room 16 configured to be able to access multiple vacuum treatment rooms 11 around the substrate together with the substrate receiving room 5 and the substrate ejecting room 6, and a secondary treatment device arranged to be able to access all of the substrate receiving room 5 and the substrate ejecting room 6 arranged in the transfer room 16, and the multiple vacuum treatment rooms 11.
COPYRIGHT: (C)2004,JPO&NCIPI

53. 发明专利

JP2004228922A Optical communication equipment 审中-公开
公开(公告)号：JP2004228922A
公开(公告)日：2004-08-12
申请号：JP2003014171
申请日：2003-01-23
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： ITO ATSUSHI
IPC分类号： H04J3/00 , H04L7/00
摘要： PROBLEM TO BE SOLVED: To provide optical communication equipment for which performance is improved in simple constitution. SOLUTION: A timing deviation between the serial input data of two or more systems is adjusted with a reference signal as a reference in a deskew circuit, two or more pieces of input data corresponding to the two or more systems for which timing adjustment is executed are received parallel and converted to serial signals to be transmitted to an optical transmission line by a multiplexer and the deskew circuit and the multiplexer are constituted as a semiconductor device turned to one sealed body. COPYRIGHT: (C)2004,JPO&NCIPI

54. 发明专利

JP2003067201A Controller and operating system 审中-公开
标题翻译：控制器和操作系统
公开(公告)号：JP2003067201A
公开(公告)日：2003-03-07
申请号：JP2001261469
申请日：2001-08-30
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： SUZUKI SHOJI , TSUNETOMI KUNIHIKO , FUNAKI SATORU , SAITO MASAHIKO , KOJIMA YASUYUKI , YOKOYAMA TAKANORI , ITO ATSUSHI
IPC分类号： G06F9/46 , G05B19/042 , G05B19/05
CPC分类号： G05B19/042
摘要： PROBLEM TO BE SOLVED: To ensure real-time property of control processing and throughput of network communication processing on a single information processing means.
SOLUTION: Plural tasks 51-57 are managed by dividing into a communication task group (the communication task group 13), a control task group (the control task group 141), and a management task group (the management task group 142) for carrying out the management. The execution sequence of the plural tasks is switched for the each group, and in response to the switched task group, a CPU 100 carries out the processing of the information obtained from LAN 40 or the information obtained from the devices 301-30n.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：确保单一信息处理手段对网络通信处理的控制处理和吞吐量的实时性。解决方案：通过分为通信任务组（通信任务组13），控制任务组（控制任务组141）和用于承载的管理任务组（管理任务组142）来管理多个任务51-57 管理。对于每个组切换多个任务的执行顺序，并且响应于切换的任务组，CPU 100执行从LAN 40获得的信息的处理或从设备301-30n获得的信息。

55. 发明专利

JP2001350435A LIGHT EMITTING DIODE MOUNTING AND DISPLAYING DEVICE 失效
公开(公告)号：JP2001350435A
公开(公告)日：2001-12-21
申请号：JP2000174213
申请日：2000-06-06
申请人： HITACHI LTD
发明人： KANDA KAZUYOSHI , ITO ATSUSHI
IPC分类号： G09F9/33 , G09F13/20
摘要： PROBLEM TO BE SOLVED: To provide a light emitting diode mounting and displaying device which has a degree of freedom in mounting of light emitting diodes and displays the magnitude of signals in a visually easily understandable manner. SOLUTION: The light of the plural monochromatic light emitting diodes 12 which are packaged on a printed circuit board 11 and vary in colors is displayed in multiple colors through a light transmission tube 15 having flexibility.

56. 发明专利

JP2000339008A PROGRAMMABLE CONTROLLER 失效
公开(公告)号：JP2000339008A
公开(公告)日：2000-12-08
申请号：JP14766099
申请日：1999-05-27
申请人： HITACHI LTD
发明人： SEKI KENJI , ITO ATSUSHI
IPC分类号： G05B19/05 , G05B19/02 , G05B19/042 , G05B19/048
摘要： PROBLEM TO BE SOLVED: To provide a programmable controller which can easily correct a program, can easily deal with increase and decrease of the number of intelligent modules and also excels in the working efficiency of its maintenance by deciding via a CPU whether an inputted user program is an instruction that should be processed by a CPU module or an intelligent module. SOLUTION: An arithmetic unit 2 of a CPU module 1 decides whether an inputted user program is an instruction that should be processed by the module 1 or an intelligent module 5. A user performs the processing via the software to decide whether a common program 12 stored in an instruction box 11 should be executed by the module 5. If it is decided that the program 12 should be executed by the module 5, the corresponding part of the user program is transferred to the module 5 and processed by an arithmetic unit 8 of the module 5.

57. 发明专利

JP2000223550A METHOD OF PROCESSING SUBSTRATE IN VACUUM PROCESSING APPARATUS 失效
公开(公告)号：JP2000223550A
公开(公告)日：2000-08-11
申请号：JP2000054452
申请日：2000-02-25
申请人： HITACHI LTD
发明人： KATO SHIGEKAZU , NISHIHATA KOJI , TSUBONE TSUNEHIKO , ITO ATSUSHI
IPC分类号： H01L21/302 , B01J3/02 , H01L21/205 , H01L21/3065 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To prevent contamination of a product due to occurrence of contaminant, residual gas and the like by processing a substrate within a cassette in any vacuum processing chamber, dry-cleaning the inside of the vacuum processing chamber and processing a substrate within a cassette in the dry- cleaned vacuum processing chamber. SOLUTION: A load-lock chamber 5 as vacuum processing chamber is evacuated to a prescribed pressure after closing a separate valve 12a, and then a substrate 20 is carried to each of etching chambers 11a, 11b and 11c by means of a vacuum carrier provided in a carrying chamber 16 after opening a separate valve 12b. The substrate 20 carried in each of the etching chambers 11a, 11b and 11c is etched under a prescribed condition. Subsequently, the load-lock chamber 5 is dry-cleaned, a substrate 20 in another cassette 1a not yet processed is carried in the dry-cleaned load-lock chamber 5, and the substrate 20 in the cassette 1a is processed.

58. 发明专利

JP2000216211A SUBSTRATE TRANSFER SYSTEM FOR VACUUM TREATMENT DEVICE 失效
公开(公告)号：JP2000216211A
公开(公告)日：2000-08-04
申请号：JP2000054449
申请日：2000-02-25
申请人： HITACHI LTD
发明人： KATO SHIGEKAZU , NISHIHATA KOJI , TSUBONE TSUNEHIKO , ITO ATSUSHI
IPC分类号： H01L21/302 , B01J3/02 , H01L21/205 , H01L21/3065 , H01L21/67 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a substrate transfer system for a vacuum treatment device which realizes high production efficiency. SOLUTION: Cassette tables 2 are provided for keeping substrates horizontal in loaded cassettes 1 (1a to 1c), a first transfer device 13 disposed to enable access to a plurality of cassettes 1 on the cassette tables 2 (2a to 2c) and the substrate receiving chamber 5 or the substrate fetch out chamber 6, a transfer chamber 16 constituted to enable connection with the substrate receiving chamber 5 and the substrate ejecting chamber 6, as well as a plurality of vacuum treatment chambers 11 (11a to 11c) therearound and a second transfer device, which is provided in the transportation chamber 16 and disposed to enable access to all of the substrate receiving chamber 5, the substrate ejecting chamber 6 and the plurality of vacuum treatment chambers 11.

59. 发明专利

JPH10313040A SPECIMEN CARRYING IN AND OUT DEVICE 失效
公开(公告)号：JPH10313040A
公开(公告)日：1998-11-24
申请号：JP10435098
申请日：1998-04-15
申请人： HITACHI LTD
发明人： TSUBONE TSUNEHIKO , TAMURA NAOYUKI , KATO SHIGEKAZU , NISHIHATA KOJI , ITO ATSUSHI
IPC分类号： B01J3/02 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To make feasible of a plurality of continuous processings in excellent maintainability avoiding the mutual pollution in respective processing chambers, by carrying in and out the specimens passing through an aperture between a first and a second opening and closing parts to a closed vessel by opening the first and the second opening and closing parts. SOLUTION: Within a vacuum moving device 2, a vacuum chamber is composed of a moving vacuum chamber 4 and holding the specimens in the vacuum state and a gate valve 5a opening in the case of load unload time of the specimens. A specimen loading device 10 operating in the case of carrying in and out is fitted in the chamber 4. Besides, a moving device 1 is provided to move the device 2 between a load unload device 1 and respective processing modules 3 in the chamber 4, as well as a coupling device 9 for connecting a lock chamber 6a provided in the chamber 4 to another lock chamber 6b in the vacuum chamber of the processing modules 3, or load unload device 1 is provided in the chamber 4. Through these procedures, the problem of mutual pollution between respective vacuum chambers is settled and respective modules 3 are separated, thereby enabling the maintainability of the specimen carrying in and out device to be enhanced.

60. 发明专利

JPH10252688A CENTRIFUGAL COMPRESSOR DEVICE AND OPERATION METHOD THEREFOR 失效
公开(公告)号：JPH10252688A
公开(公告)日：1998-09-22
申请号：JP6043097
申请日：1997-03-14
申请人： HITACHI LTD
发明人： ITO ATSUSHI , SAKASHITA HIROYASU
IPC分类号： F04D29/04 , F04D17/12 , F04D29/056
摘要： PROBLEM TO BE SOLVED: To reduce the size of an oil film seal type shaft seal device used in a multistage centrifugal compressor and to improve reliability of the device. SOLUTION: Shaft seal devices 31 to prevent leakage of working gas is arranged at the two end parts of a centrifugal compressor body. Shaft seal oil a flow rate of which is regulated by a regulation valve 4 is fed from an oil reservoir tank 16 to the shaft seal device 31. A shaft seal device 31 is coupled to the upper part of a seal oil head tank 13 and meanwhile, the lower part of the tank 13 is coupled through a shield valve 12 to the outlet side of a regulation valve 4 through a piping 18. When the temperature of exhaust oil discharged from the shaft seal device 31 exceeds a threshold, working gas is pushed back by utilizing a head of shaft seal oil in the head tank 13, and leakage of working gas from a compressor body is prevented from occurring.

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