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51. 发明专利

JPS6485584A COMPOSITE TYPE PIEZOELECTRIC MOTOR 失效
公开(公告)号：JPS6485584A
公开(公告)日：1989-03-30
申请号：JP23872387
申请日：1987-09-25
申请人： HITACHI LTD
发明人： TAKADA KEIJI , HOSOKI SHIGEYUKI , HOSAKA SUMIO , KOMODA TSUTOMU
IPC分类号： H02N2/00 , H01L41/09 , H02N2/08 , H02N2/16
摘要： PURPOSE:To improve the efficiency of driving force and output efficiency of an apparatus and to miniaturize and simplify the structure thereof by increasing the area of contact between a mover and a stator. CONSTITUTION:A mover composed of a vibrator 1 and piezoelectric bodies 2, 3 bonded to the under surface thereof is placed on a plate 4 of earth potential. Voltage is applied to said vibrator 1 by an AC power 5 in the same direction as the direction of polarization, and the vibrator 1 is excited at a frequency where the half-wavelength of a lengthwise vibration coincides with the length of said vibrator 1 taken in the longer direction. The positions of the node and antinode of said vibration are fitted with the piezoelectric bodies 2, 3 and an electric field is applied by the voltage of an electrode 6 perpendicularly to the direction of polarization so as to repeat a shearing deformation. The mover composed of said vibrator 1 and piezoelectric bodies 2, 3 moves at a speed corresponding to the amplitude of voltage applied to the electrode 6.

52. 发明专利

JPS6482541A METHOD AND DEVICE FOR MEASURING SEMICONDUCTOR SURFACE 失效
公开(公告)号：JPS6482541A
公开(公告)日：1989-03-28
申请号：JP23872687
申请日：1987-09-25
申请人： HITACHI LTD
发明人： NISHIMATSU SHIGERU , MIZUTANI TATSUMI , TSUJII KANJI , HARUTA AKIRA , MUNAKATA TADASUKE , HOSOKI SHIGEYUKI
IPC分类号： G01R31/26 , G01N27/00 , G01N27/22 , G01N27/24 , G01R27/26 , G01R29/12 , G01R29/14 , G01R29/24 , H01L21/66
摘要： PURPOSE:To obtain charge distribution in an insulating film on a semiconductor surface without step-etching by forming an electrode capable of varying an air gap with the semiconductor surface. CONSTITUTION:An silicon oxide film 2 is formed onto silicon 1, the wafer is installed onto a sample base, and an air gap in an electrode 3 is brought to 0.5mum or less by a movable mechanism 4. A distance from a semiconductor surface can be acquired by measuring capacitance in the air-gap electrode, there are charges in a delta-function manner on the interface with a semiconductor and an outermost surface in an electric field in SiO2, and each charge can be obtained by altering the gap of the air-gap electrode and conducting C-V measurement at three points when the uniform distribution of charges in the film is assumed.

53. 发明专利

JPS6415602A MEASURING APPARATUS FOR FORCE OF MINUTE PART AND MEASURING APPARATUS FOR SHAPE 失效
公开(公告)号：JPS6415602A
公开(公告)日：1989-01-19
申请号：JP17094287
申请日：1987-07-10
申请人： HITACHI LTD
发明人： HOSAKA SUMIO , HOSOKI SHIGEYUKI , TAKADA KEIJI
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q20/00 , G01Q20/02 , G01Q60/10 , G01Q60/24
摘要： PURPOSE:To detect a force of a minute part with high precision by fixing both ends of a beam, by setting a probe in the central part thereof and also by using a non-contact displacement measuring means having a large measuring area. CONSTITUTION:When a sample 3 is brought as close as about several angstroms to a probe 1 by a rough motion mechanism 11, a force acts between the nearest surface atoms of the probe and the sample, so as to cause the displacement of a beam 2, which is detected by a non-contact displacement measuring means. A Z-axis piezo element 9 is driven by a control unit 12 so that this displacement may be fixed, and thereby a gap between the probe 1 and the sample 3 is kept fixed. When two-dimensional scanning is conducted by X-axis and Y-axis piezo elements 7 and 8 while the above state is maintained, the Z-axis piezo element shows a change on the basis of the shape of the surface of the sample 3, the three-dimensional shape of the surface of the sample is obtained therefrom, and the minute structure thereof can be displayed in a display unit 13. In this way, the beam 2 supported both ends has a freedom in the axial direction of the probe 1, and a motion such as torsion can be prevented.

54. 发明专利

JPS6415601A SCAN-TYPE TUNNEL ELECTRON MICROSCOPE 失效
公开(公告)号：JPS6415601A
公开(公告)日：1989-01-19
申请号：JP17094087
申请日：1987-07-10
申请人： HITACHI LTD
发明人： TAKADA KEIJI , HOSOKI SHIGEYUKI , HOSAKA SUMIO
IPC分类号： G01N23/00 , G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q60/10 , H01J37/28
摘要： PURPOSE:To prevent the damage of a sample and a probe due to their collision and to bring them close to each other in a short time, by moving a rough motion mechanism until a tunnel current is detected when the sample is brought close to the probe. CONSTITUTION:Simultaneously when a voltage is impressed between a sample 11 and a probe 10 by a current detector 12, a voltage is impressed on a Z-axis piezoelectric element 6 by the working of a feedback function of a Z-axis control circuit 6 so as to make a certain set current flow between the probe 10 and the sample 11, and thereby the probe 10 is brought close to the sample 11. A rough motion mechanism and the probe 10 supported thereby are stopped by the start of a servo circuit 2 when the current flowing between the sample 11 and the probe 10 is detected. After the fixation by a fixing mechanism 4 is released, the servo circuit 2 is turned OFF. Thereby the rough motion mechanism is made to stand still, and an image of the sample is obtained by the working of a scanning mechanism 8, the Z-axis control circuit 6, etc.

55. 发明专利

JPS6352006A MOVING MECHANISM FOR SCANNING TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPS6352006A
公开(公告)日：1988-03-05
申请号：JP19537486
申请日：1986-08-22
申请人： HITACHI LTD
发明人： TAKADA KEIJI , HOSOKI SHIGEYUKI , HOSAKA SUMIO
IPC分类号： G12B5/00 , G01B21/00 , G01N37/00 , G01Q10/02 , G01Q60/10 , H01J37/28
摘要： PURPOSE:To realize high-accuracy, stable fixation by fixing and unfixing a terminal part of a piezoelectric element for movement by a a piezoelectric element for fixing and unfixing by pressing with the elastic force of a spring, etc. CONSTITUTION:Terminals 8 and 9 are fitted to both ends of the piezoelectric element 1 for movement, and a sample base 14 is fixed to the terminal 8. The terminals 8 and 9 are fixed to a pedestal 17 by fixers 6 and 7 with the forces of tension coil springs 4 and 5. Piezoelectric elements 2 and 3 for unfixing are fitted to the fixers 6 and 7 and their other-end sides can be pressed by; screw 12 and 13. Then when a voltage is impressed to the element 3, the fixer 7 leaves the terminal 9 and is released from the elasticity. Further a voltage is impressed to the element 1 to extend the element 1 based on the side of the terminal 8. Then the voltage impressed to the element 3 is removed and the terminal 9 is fixed. A voltage is impressed to the element 2 to release the terminal 8 and then the voltage impressed to the element 1 is ceased and the voltage to the element 2 is removed thereafter. This operation is repeated to move the base 14 by optional distance.

56. 发明专利

JPS62223602A SURFACE MEASURING INSTRUMENT 失效
公开(公告)号：JPS62223602A
公开(公告)日：1987-10-01
申请号：JP6563786
申请日：1986-03-26
申请人： HITACHI LTD
发明人： HOSOKI SHIGEYUKI , TAKADA KEIJI , HOSAKA SUMIO , AIDA TOSHIYUKI
IPC分类号： G01B7/34 , G01B7/00 , G01B7/28 , G01B15/00 , G01B15/08 , G01N23/00 , G01N27/66 , G01Q60/00 , G01Q60/10 , H01J37/26 , H01J37/28
摘要： PURPOSE:To improve resolution to a large vacuum gap by establishing a magnetic field in the axial direction of a pointed stylus and converging electric field emission electrons from the pointed stylus. CONSTITUTION:A supporting rod 9 for the pointed stylus 1 is provided to the center part of a permanent magnet 10 and coupled with a pointed stylus driving device 3 composed of a piezoelectric element. Further, a magnetic pole 11 which is made of a ferromagnetic body such as 'Permalloy(R)' so that it is conic on the side in contact with a sample 2 on a sample table 13 and cylindrical on the opposite side and a coil 12 made of an insulation coated conductor are arranged. Electricity is fed to the coil 12 to produce a magnetic field by the magnetic pole 11 at right angles to the surface of the sample 2. At this time, the electricity is so fed that the stylus-side magnetic pole of the magnet 10 and the magnetic pole at the cylindrical tip part of the magnetic pole 11 have the mutually opposite polarities. Then, a voltage from a power source 5 is impressed between the stylus 1 and sample 2 to emit electric field emission electrons and then the magnetic flux from the magnet 10 is converged on the conic tip part of the magnetic pole 11, so electrons striking on the surface of the sample 2 is converged more and more toward the surface 2.

57. 发明专利

JPS62140333A FIELD EMISSION CATHODE 失效
公开(公告)号：JPS62140333A
公开(公告)日：1987-06-23
申请号：JP28092485
申请日：1985-12-16
申请人： HITACHI LTD
发明人： HOSOKI SHIGEYUKI , KAGA HIROYASU , TAKADA KEIJI , ICHIHASHI MIKIO , KURODA KATSUHIRO
IPC分类号： H01J9/02 , H01J1/30 , H01J1/304 , H01J37/073
摘要： PURPOSE:To make it possible to emit a low energy electron beam without reducing the velocity of the electron beam and at low field emission voltage, by keeping the distance between a cathode and an anode small using a specified work method. CONSTITUTION:It is possible to decrease a field emission voltage required for obtaining the density of a constant field emission current by shortening distance between a cathode 1 and an anode 9. A tungsten single crystal wire 6 is welded on the top position of a V-shaped welded tungsten filament 5, and fixed on an anode cylinder 10 through a support stem 7, insulation glass 8 and a pressure ring 11. A platinum disc 9 with a small hole in its center is placed at the aperture part of the anode cylinder 10. A minute distance is formed by electropolishing between plate 9 and cathode 1 after polishing wire 6, under such a condition that wire 6 is isolated from the edge of the hole of plate 9. Because of this distance, the electron beam with low energy can be emitted at a low voltage.

58. 发明专利

JPS60193247A Dot-like gas ion source 失效
标题翻译：类似气体源
公开(公告)号：JPS60193247A
公开(公告)日：1985-10-01
申请号：JP2623985
申请日：1985-02-15
申请人： Hitachi Ltd
发明人： FUTAMOTO MASAAKI , HOSOKI SHIGEYUKI , YUHITOU ISAMU , KAWABE USHIO
IPC分类号： H01J27/08 , H01J27/26 , H01J37/08
CPC分类号： H01J27/08 , H01J37/08 , H01J2237/0807
摘要： PURPOSE:To obtain a dot-like gas ion source with a simple structure by installing an ion production needle-like chip in at least one part of an electric conductive pipe and supplying ionization gas through the root of the needle-like chip. CONSTITUTION:Gas is passed through a pipe 6 and then supplied to the pointed end of a needle-like chip 5 through the hole 8 of the pipe 6 located at the root of the chip 5. Since the flow of the gas is restricted to around the chip 5, the gas can be effectually ionized. A high-melting metal such as W, Mo or Ir or a high-melting compound such as TiC, HfC or TiN can be favorably used as the chip 5. It is recommended to use Ta, Pt or a stainless steel for the pipe 6.
摘要翻译：目的：通过在导电管的至少一部分安装离子生成针状芯片，并通过针状芯片的根部供给电离气体，从而获得结构简单的点状气体离子源。构成：气体通过管道6，然后通过位于芯片5的根部处的管道6的孔8提供给针状芯片5的尖端。由于气体的流动被限制在周围芯片5，气体可以被有效地电离。诸如W，Mo或Ir的高熔点金属或诸如TiC，HfC或TiN的高熔点化合物可以有利地用作芯片5.建议对管6使用Ta，Pt或不锈钢。

59. 发明专利

JPS6079636A THERMOELECTRIC FIELD EMISSION CATHODE AND APPLIED DEVICE 失效
公开(公告)号：JPS6079636A
公开(公告)日：1985-05-07
申请号：JP18672883
申请日：1983-10-07
申请人： HITACHI LTD
发明人： HONDA YUKIO , HOSOKI SHIGEYUKI
IPC分类号： H01J37/06 , H01J1/304 , H01J29/04
摘要： PURPOSE:To obtain a plurality of electric field emission beams having high luminance and high stability simultaneously from a single electric field emission chip, by taking out a plurality of electric field emission beams with restricted, radiant angle of W(100) plane from a single sharp needle. CONSTITUTION:A wire of W having axial bearings of such as 0.1- 0.15mm. in diameter is spot welded to the top end of a heating element 11 of W formed to V-shape, and the tip of the wire is sharp-pointed by electrolytic grinding by using such as aqueous solution of KOH to make a sharp needle 12. Subsequently, Ti is adhered to the V-shaped tip of the heating element 11 and a Ti supply source 13 is formed by passing a heating current to the heating element 11 in a vacuum. At the tip of the sharp needle 12, atmospheric oxygen is taken in and an absorption layer of Ti and oxygen is formed thereon. When a high voltage is applied to an opposing anode 14 in this condition, the work function on the (100) crystal plane of the sharp needle 12 of W having axial bearings of decreases, and two electric field emission beams 15a, 15b having high luminance with restricted radiant angles to bearings of are obtained.

60. 发明专利

JPS59155941A Electron-beam inspection device 失效
标题翻译：电子束检测装置
公开(公告)号：JPS59155941A
公开(公告)日：1984-09-05
申请号：JP2950383
申请日：1983-02-25
申请人： Hitachi Ltd
发明人： HOSOKI SHIGEYUKI , ICHIHASHI MIKIO , WADA YASUO , MUNAKATA TADASUKE , HONDA YUKIO
IPC分类号： G01B15/00 , G01B15/08 , H01J37/28 , H01L21/66
CPC分类号： H01L22/00 , H01L2924/0002 , H01L2924/00
摘要： PURPOSE:To inspect the size and number of a film defect by providing a focusing means, a defelection means, a deceleration means decelerating an insulating film up to a value which does not transmit the insulating film equivalently, an information signal display means corresponding to the defect, etc. when the insulating film of a minute pattern formed on a metal or a semiconductor substrate is inspected by using electron beams. CONSTITUTION:An electric field-radiation cathode 11 is mounted into an electrooptic system mirror body 16 with an evacuating means 17, and electron beams from the cathode 11 are passed in a beam focusing means 13 through a diaphragm hole 12a formed to an anode 12, and irradiated onto an insulating film 2 of minute patterns on a sample 32 placed on a sample base 43. An auxiliary electrode 9 consisting of a metallic mesh is fitted on the sample 32 at that time, and fixed voltage is applied to the auxiliary electrode to decelerate the speed of beams up to a predetermined value. A pointed needle 11a consisting of a single crystal W wire and a filament 11b are fitted to the cathode 11, field radiation at low voltage is enabled, and secondary electrons are detected by a detector 22 and a defect is displayed to a pattern generator 31.
摘要翻译：目的：通过提供聚焦装置来检查胶片缺陷的尺寸和数量，失败装置，减速装置将绝缘膜减速至等于不传输绝缘膜的值，对应于信息信号显示装置通过使用电子束检查在金属或半导体基板上形成的微小图案的绝缘膜时的缺陷等。构成：将电场辐射阴极11安装在具有排气装置17的电光系统镜体16中，并且来自阴极11的电子束通过形成在阳极12上的隔膜孔12a通过光束聚焦装置13，并照射到放置在样品基体43上的试样32上的微小图案的绝缘膜2.此时，由金属网构成的辅助电极9配合在样品32上，向辅助电极施加固定电压将光束的速度减速到预定值。将由单晶W线和灯丝11b构成的尖针11a嵌入阴极11，能够进行低电压的场辐射，二次电子被检测器22检测出，故障被显示给图案发生器31。

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