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    • 60. 发明专利
    • SOLID-STATE IMAGE PICKUP ELEMENT
    • JPH04287581A
    • 1992-10-13
    • JP5219591
    • 1991-03-18
    • HITACHI LTD
    • HIROSHIMA MINORUSUZUKI TOSHIKIITAGAKI TATSUONAKAI MASAAKIFURUHASHI SHOJITAKIGAWA OSAMU
    • H04N5/217H04N5/335H04N5/357H04N5/369H04N5/3728
    • PURPOSE:To reduce production of a high temperature white spot by setting a depletion voltage up to a specific multiple number of a saturation signal quantity set by a solid-state image pickup element comprising plural photodiodes. CONSTITUTION:When a voltage is fed to a 1st layer transfer electrode 30B, an N-channel inversion layer is formed on the surface of a Pchannel diffusion layer 26 just below the electrode 30B to make an N-channel diffusion layer 23 being a component of a photodiode 20 and an N-channel diffusion layer 25 (charge transfer path) of a vertical shift register conductive. Then a 2nd layer transfer electrode 30A is formed in partly duplicate with the electrode 30B. The electrode 30A is an electrode to transfer the charge read from the diode 20 in a direction of the vertical register. Then a depletion voltage of the diode 20 is changed depending on ion implantation dose at forming of the diffusion layer 23, diffusion time after implantation, ion implantation dose at the forming of a high concentration P-channel diffusion layer 24, and heat treatment temperature of the electrodes 30A, 30B. Then high temperature spot number is reduced by setting the depletion voltage within a range up to a multiple of 1.4 of the saturation signal quantity of the solid-state image pickup element.