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51. 发明授权

US07829870B2 Method and apparatus for in-situ sample preparation 有权
标题翻译：用于原位样品制备的方法和装置
公开(公告)号：US07829870B2
公开(公告)日：2010-11-09
申请号：US11925595
申请日：2007-10-26
申请人： Juergen Frosien
发明人： Juergen Frosien
IPC分类号： A61N5/00 , G21G5/00 , G21K5/10 , H01J37/08 , H01J27/00
CPC分类号： H01J37/3056 , H01J2237/0245 , H01J2237/057 , H01J2237/0805 , H01J2237/20207 , H01J2237/31732 , H01J2237/3174 , H01J2237/31749
摘要： An apparatus for in-situ specimen preparation is described. The apparatus includes an ion beam column 21 including at least: an liquid metal alloy ion source 56 including a first element for providing a light ion species with a mass of 10 g/mol to 60 g/mol and a second element for providing a heavy ions species with a mass of 150 g/mol or higher, a mass separator 58 for selectively separating the light ion species and the heavy ion species, and a focusing element for focusing the ion beam on a specimen. The apparatus further includes a specimen-beam-tilt unit for tilting the ion beam with respect to the specimen.
摘要翻译：描述了用于原位样品制备的装置。该装置包括离子束柱21，其至少包括：液态金属合金离子源56，其包括用于提供质量为10g / mol至60g / mol的轻离子物质的第一元素和用于提供重的质量为150g / mol以上的离子物质，用于选择性分离轻离子物质和重离子物质的质量分离器58，以及用于将离子束聚焦在样品上的聚焦元件。该装置还包括用于相对于样本倾斜离子束的样本束倾斜单元。

52. 发明申请

US20100187436A1 HIGH RESOLUTION GAS FIELD ION COLUMN 有权
标题翻译：高分辨气体场离子柱
公开(公告)号：US20100187436A1
公开(公告)日：2010-07-29
申请号：US12691932
申请日：2010-01-22
申请人： Juergen Frosien , Dieter Winkler
发明人： Juergen Frosien , Dieter Winkler
IPC分类号： H01J27/02 , H01J27/00
CPC分类号： H01J37/05 , H01J37/12 , H01J37/153 , H01J37/28 , H01J37/285 , H01J2237/04756 , H01J2237/04924 , H01J2237/053 , H01J2237/057 , H01J2237/0805 , H01J2237/0807 , H01J2237/1534 , H01J2237/28
摘要： An ion beam apparatus and a method for providing an energy-filtered primary ion beam are described. Therein, a primary ion beam having an asymmetric first energy distribution is generated by means of an ion source. The primary ion beam is energy filtered using, for example, a retarding lens.
摘要翻译：描述了用于提供能量过滤的一次离子束的离子束装置和方法。其中，通过离子源产生具有不对称的第一能量分布的一次离子束。使用例如延迟透镜对初级离子束进行能量过滤。

53. 发明授权

US07663102B2 High current density particle beam system 有权
标题翻译：高电流密度粒子束系统
公开(公告)号：US07663102B2
公开(公告)日：2010-02-16
申请号：US10593246
申请日：2005-02-17
申请人： Juergen Frosien
发明人： Juergen Frosien
IPC分类号： H01J37/09
CPC分类号： H01J37/09 , H01J2237/0453 , H01J2237/153
摘要： The present invention relates to charged particle beam devices. The devices comprise an emitter for emitting charged particles; an aperture arrangement with at least two apertures for separating the emitted charged particles into at least two independent charged particle beams; and an objective lens for focusing the at least two independent charged particle beams, whereby the independent charged particle beams are focused onto the same location within the focal plane.
摘要翻译：本发明涉及带电粒子束装置。这些装置包括用于发射带电粒子的发射器; 具有至少两个孔的孔布置，用于将发射的带电粒子分离成至少两个独立的带电粒子束; 以及用于聚焦至少两个独立带电粒子束的物镜，由此独立带电粒子束聚焦到焦平面内的相同位置上。

54. 发明授权

US07629578B2 Charged particle beam device 有权
标题翻译：带电粒子束装置
公开(公告)号：US07629578B2
公开(公告)日：2009-12-08
申请号：US11675260
申请日：2007-02-15
申请人： Juergen Frosien , Yacov Elgar
发明人： Juergen Frosien , Yacov Elgar
IPC分类号： H01J37/26
CPC分类号： H01J37/026 , B82Y10/00 , B82Y40/00 , H01J37/26 , H01J37/3174 , H01J2237/004 , H01J2237/022 , H01J2237/2809 , H01J2237/2817
摘要： The invention provides a charged particle beam device for irradiating a specimen, comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen and an ozone unit for reducing the charging and/or contamination of the specimen. The ozone unit comprises a supply of ozone and a specimen nozzle unit for directing an ozone gas flow to the specimen. Further, the invention provides a charged particle beam device for irradiating a specimen comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen, a detector and a gas unit for reducing the charging and/or contamination of the detector. The gas unit comprises a supply of gas and a detector nozzle unit for directing a gas flow to the detector. Further, the present invention provides methods for operating charged particle beam devices according to the present invention.
摘要翻译：本发明提供了一种用于照射样本的带电粒子束装置，包括用于提供带电粒子束的粒子源，用于将带电粒子束引导到样本上的光学装置和用于减少充电和/或污染的臭氧单元的样本。臭氧单元包括臭氧供应源和用于将臭氧气体流引导到样品的样本喷嘴单元。此外，本发明提供了一种用于照射包括用于提供带电粒子束的粒子源的样本的带电粒子束装置，用于将带电粒子束引导到样本上的光学装置，用于减少充电的检测器和气体单元和/或检测器的污染。气体单元包括气体供应源和用于将气流引导到检测器的检测器喷嘴单元。此外，本发明提供了用于操作根据本发明的带电粒子束装置的方法。

55. 发明申请

US20070194228A1 CHARGED PARTICLE BEAM DEVICE 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20070194228A1
公开(公告)日：2007-08-23
申请号：US11675260
申请日：2007-02-15
申请人： Juergen Frosien , Yacov Elgar
发明人： Juergen Frosien , Yacov Elgar
IPC分类号： G21K7/00
CPC分类号： H01J37/026 , B82Y10/00 , B82Y40/00 , H01J37/26 , H01J37/3174 , H01J2237/004 , H01J2237/022 , H01J2237/2809 , H01J2237/2817
摘要： The invention provides a charged particle beam device for irradiating a specimen, comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen and an ozone unit for reducing the charging and/or contamination of the specimen. The ozone unit comprises a supply of ozone and a specimen nozzle unit for directing an ozone gas flow to the specimen. Further, the invention provides a charged particle beam device for irradiating a specimen comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen, a detector and a gas unit for reducing the charging and/or contamination of the detector. The gas unit comprises a supply of gas and a detector nozzle unit for directing a gas flow to the detector. Further, the present invention provides methods for operating charged particle beam devices according to the present invention.
摘要翻译：本发明提供了一种用于照射样本的带电粒子束装置，包括用于提供带电粒子束的粒子源，用于将带电粒子束引导到样本上的光学装置和用于减少充电和/或污染的臭氧单元的样本。臭氧单元包括臭氧供应源和用于将臭氧气体流引导到样品的样本喷嘴单元。此外，本发明提供了一种用于照射包括用于提供带电粒子束的粒子源的样本的带电粒子束装置，用于将带电粒子束引导到样本上的光学装置，用于减少充电的检测器和气体单元和/或检测器的污染。气体单元包括气体供应源和用于将气流引导到检测器的检测器喷嘴单元。此外，本发明提供了用于操作根据本发明的带电粒子束装置的方法。

56. 发明授权

US07227155B2 Electrostatic deflection system with impedance matching for high positioning accuracy 失效
标题翻译：静电偏转系统具有阻抗匹配，定位精度高
公开(公告)号：US07227155B2
公开(公告)日：2007-06-05
申请号：US11241789
申请日：2005-09-30
申请人： Benyamin Buller , William J. Devore , Juergen Frosien , Eugene Mirro, Jr. , Henry Pearce-Percy , Dieter Winkler
发明人： Benyamin Buller , William J. Devore , Juergen Frosien , Eugene Mirro, Jr. , Henry Pearce-Percy , Dieter Winkler
IPC分类号： H01J37/147
CPC分类号： H01J37/147 , B82Y10/00 , B82Y40/00 , H01J37/045 , H01J37/24 , H01J37/3174 , H01J2237/0432 , H01J2237/1504 , H01J2237/28
摘要： An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.
摘要翻译：一种高精度高通量偏转电子束的装置和方法。偏转电容器的至少一个电极通过同轴电缆连接到信号源。终端电阻器还连接到同轴电缆和在同轴电缆和电极的接头处的电极。终端电阻器具有与同轴电缆的阻抗匹配的电阻，并且电极具有与同轴电缆的阻抗的一半相匹配的阻抗。本发明的偏转电容器由于涡电流而具有最小的精度损失。与现有技术的系统相比，偏转电容器中的电极间距减小约2倍。

57. 发明申请

US20060255268A1 Charged particle beam device with detection unit switch and method of operation thereof 有权
标题翻译：带检测单元开关的带电粒子束装置及其操作方法
公开(公告)号：US20060255268A1
公开(公告)日：2006-11-16
申请号：US10550177
申请日：2004-03-18
申请人： Juergen Frosien
发明人： Juergen Frosien
IPC分类号： G21K7/00
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/147 , H01J37/28 , H01J37/3174
摘要： The invention provides a charged particle beam device and a method of operation thereof. An emitter (2) emits a primary charged particle beam (12). Depending on the action of a deflection system, which comprises at least three deflection stages (14), it can be switched between at least two detection units (16, 44). Further, beam shaping means (15; 41) is provided and a lens for focusing at the primary charged particle beam on a specimen.
摘要翻译：本发明提供一种带电粒子束装置及其操作方法。发射器（2）发射初级带电粒子束（12）。根据包括至少三个偏转级（14）的偏转系统的动作，它可以在至少两个检测单元（16,44）之间切换。此外，提供光束整形装置（15; 41）和用于在初级带电粒子束聚焦在样本上的透镜。

58. 发明授权

US4785176A Electrostatic-magnetic lens for particle beam apparatus 失效
标题翻译：用于粒子束装置的静电磁透镜
公开(公告)号：US4785176A
公开(公告)日：1988-11-15
申请号：US30964
申请日：1987-03-27
申请人： Juergen Frosien , Erich Plies
发明人： Juergen Frosien , Erich Plies
IPC分类号： H01J37/12 , G01Q30/02 , H01J37/10 , H01J37/141 , H01J37/145 , H01J49/06
CPC分类号： H01J37/10 , H01J37/145
摘要： An electrostatic-magnetic lens is provided having either a symmetrical or asymmetrical magnetic lens which is overlaid with an electrostatic immersion lens. One electrode of the immersion lens is formed as a hollow cylinder, which is within an upper pole piece of the magnetic lens concentrically relative to the axis of symmetry thereof and extending into the region of the pole piece gap. The lower pole piece of the magnetic lens is preferably at a ground potential and clad with the beam guiding tube for protection against contamination and forming the lower electrode of the electrostatic immersion lens.
摘要翻译：提供具有与静电浸没透镜重叠的对称或非对称磁性透镜的静电磁透镜。浸没透镜的一个电极形成为中空圆柱体，其位于磁性透镜的上极片内，相对于其对称轴线同心并延伸到极片间隙的区域中。磁透镜的下极片优选为接地电位，并与光束引导管一起包围以防止污染并形成静电浸没透镜的下电极。

59. 发明授权

US4238680A Method and device for setting and correcting errors of an electron optical condenser of a microprojector 失效
标题翻译：用于设置和校正微型喷射器的电子光学冷凝器的误差的方法和装置
公开(公告)号：US4238680A
公开(公告)日：1980-12-09
申请号：US39878
申请日：1979-05-17
申请人： Klaus Anger , Juergen Frosien , Burkhard Lischke
发明人： Klaus Anger , Juergen Frosien , Burkhard Lischke
IPC分类号： H01J37/153 , H01J37/21 , H01J37/30 , H01L21/027 , G01K1/08
CPC分类号： H01J37/153 , H01J37/21 , H01J37/3007
摘要： A method and device for correcting errors and setting the focus of an electron optical condenser of a microprojector which condenser produces a bundle of axially parallel electron rays for illuminating a large surface transmission mask to create an image which is projected by means of an electron optical lens system on a surface of a wafer characterized by placing an annular field stop or diaphragm which passes a bundle of rays having a ring-shaped or annular cross section and recording the image in a plane preferably adjacent the surface of the wafer. The recording can be accomplished by utilizing a photographic plate or by utilizing a detector arrangement. When the image on the recording unit is the same size and shape as the annular field stop, then the electron optical condenser has the correct focal length and the source is disposed on the front focal plane.
摘要翻译：一种用于校正误差并设置微型喷射器的电子光学冷凝器的焦点的方法和装置，该冷凝器产生一束轴向平行的电子射线，用于照射大的表面透射掩模以产生通过电子光学透镜投影的图像系统，其特征在于放置通过具有环形或环形横截面的一束光线的环形场阻挡件或隔膜，并将图像记录在优选地邻近晶片表面的平面中。记录可以通过利用照相板或利用检测器装置来实现。当记录单元上的图像与环形场停止的尺寸和形状相同时，电子光学聚光器具有正确的焦距，并且源设置在前焦平面上。

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