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    • 52. 发明授权
    • Trench capacitor array having well contacting merged plate
    • 具有良好接触的合并板的沟槽电容器阵列
    • US07256439B2
    • 2007-08-14
    • US10905808
    • 2005-01-21
    • Kangguo ChengBabar A. KhanCarl J. Radens
    • Kangguo ChengBabar A. KhanCarl J. Radens
    • H01L31/119
    • H01L29/945
    • According to an aspect of the invention, a structure is provided in which an array of trench capacitors includes a well contact to a merged buried plate diffusion region. The array, which is disposed in a substrate, includes a contact for receiving a reference potential. Each trench capacitor includes a node dielectric and a node conductor formed within the trench. Buried plate (BP) diffusions extend laterally outward from a lower portion of each trench of the array, the BP diffusions merging to form an at least substantially continuous BP diffusion region across the array. An isolation region extends over a portion of the BP diffusion region. A doped well region is formed within the substrate extending from a major surface of the substrate to a depth below a top level of the substantially continuous BP diffusion region. An electrical interconnection is also provided to the well region.
    • 根据本发明的一个方面,提供了一种结构,其中沟槽电容器阵列包括与合并的掩埋板扩散区的阱接触。 布置在基板中的阵列包括用于接收参考电位的触点。 每个沟槽电容器包括形成在沟槽内的节点电介质和节点导体。 掩埋板(BP)扩散从阵列的每个沟槽的下部横向向外延伸,BP扩散合并以在阵列上形成至少基本上连续的BP扩散区域。 隔离区域在BP扩散区域的一部分上延伸。 在衬底内形成掺杂阱区,该衬底从衬底的主表面延伸至低于基本上连续的BP扩散区的顶层的深度。 还向阱区域提供电互连。