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    • 51. 发明专利
    • Cleaning treatment method for deposited film forming device and deposited film forming device
    • 用于沉积膜形成装置和沉积膜形成装置的清洁处理方法
    • JP2007119796A
    • 2007-05-17
    • JP2005309258
    • 2005-10-25
    • Canon Incキヤノン株式会社
    • YAMADA MOTOYAFURUSHIMA SATOSHIHOSOI KAZUTOOHIRA JUNSAWA MASANORI
    • C23C16/44G03G5/08
    • PROBLEM TO BE SOLVED: To provide a cleaning treatment method for a deposited film forming device where cleaning treatment for a deposited film forming device for forming a deposited film can be efficiently performed in a short time, and to provide the deposited film forming device.
      SOLUTION: Regarding the cleaning treatment method for a deposited film forming device where the inside of a deposited film forming device where a deposited film is formed on a substrate arranged in a reaction vessel capable of vacuum airtightness at least composed of side walls also used as electrodes is subjected to cleaning treatment using cleaning gas and high frequency electric power, the cleaning gas is fed at least to the outside of the space between the electrodes in the reaction vessel.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供一种沉积膜形成装置的清洁处理方法,其中可以在短时间内有效地进行用于形成沉积膜的沉积膜形成装置的清洁处理,并且提供沉积膜形成 设备。 解决方案:关于沉积膜形成装置的清洁处理方法,其中沉积膜形成装置的内部形成有布置在至少由侧壁构成的真空气密的反应容器中的基板上 作为电极使用清洁气体和高频电力进行清洗处理,清洁气体至少被供给到反应容器内的电极之间的空间的外部。 版权所有(C)2007,JPO&INPIT
    • 52. 发明专利
    • Electrophotographic photoreceptor and its manufacturing method
    • 电子照相机及其制造方法
    • JP2007078762A
    • 2007-03-29
    • JP2005263215
    • 2005-09-12
    • Canon Incキヤノン株式会社
    • OHIRA JUNUEDA SHIGENORIHOSOI KAZUTOABE YUKIHIRO
    • G03G5/08
    • PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor which can be improved in image defect level without lowering potential characteristics, and its manufacturing method.
      SOLUTION: The manufacturing method includes a process of installing a cylindrical base body having a conductive surface in a vacuum airtight filming furnace which is connected to an exhaust means and equipped with a raw material gas supply means and decomposing raw material gas with high-frequency electric power to deposit a first layer including a first lower stop layer made of a non-single-crystal material on the base body as a first step; a process of temporarily taking the base body where the first layer is laminated out of the filming furnace and polishing a first layer surface as a second step; and a process of installing the base body after the process of the second step in the vacuum airtight filming furnace which is connected to the exhaust means as the third step and equipped with the raw material gas supply means and stacking a second layer including at least a second lower stop layer made of a non-single-crystal material and a photoconductive layer.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供可以在不降低电位特性的情况下提高图像缺陷水平的电子照相感光体及其制造方法。 解决方案:制造方法包括在真空密封成膜炉中安装具有导电表面的圆筒形基体的工艺,该真空气密成型炉连接到排气装置并配备有原料气体供给装置并分解高原料气体 作为第一步骤,在基体上沉积包括由非单晶材料制成的第一下停止层的第一层的第一层; 作为第二工序,将第一层的基体暂时地从成膜炉中取出并对第一层表面进行研磨的工序; 以及在第三步骤连接到排气装置的真空密封成膜炉中的第二步骤之后安装基体的装置,并且装备有原料气体供给装置,并堆叠包括至少 由非单晶材料制成的第二下阻挡层和光电导层。 版权所有(C)2007,JPO&INPIT
    • 53. 发明专利
    • Electrophotographic photoreceptor, process cartridge having electrophotographic photoreceptor, and electrophotographic apparatus
    • 电子照相机,具有电子照相感光体的工艺盒和电子照相设备
    • JP2006235513A
    • 2006-09-07
    • JP2005053736
    • 2005-02-28
    • Canon Incキヤノン株式会社
    • KAWAHARA MASATAKAAOKI MAKOTOHOSOI KAZUTOTANAKA MASATOFUJII JUNJIISHIZUKA YUKANONAKA MASAKI
    • G03G5/14G03G5/06
    • PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor which has sufficiently high sensitivity to exposure using long wavelength light or short wavelength light, in which variation in the electric resistance of an intermediate layer is reduced even against the environmental change from a low temperature and low humidity to a high temperature and high humidity, in which the rise of a residual potential is reduced, and with which a stable quality image can be obtained even after the repeated use.
      SOLUTION: The electrophotographic photoreceptor has an intermediate layer constituted of a non-single crystalline silicon film composed of silicon prepared by including a hydrogen atom, an oxygen atom, and at least one of a hydrogen atom and halogen atom as a mother body between a support and an organic conductive layer and not doped with a phosphorus atom and boron atom, in which the content of the nitrogen atom in the intermediate layer is ≥5 to ≤50 atomic% with respect to the total of the silicon atom, the nitrogen atom, and oxygen atom in the intermediate layer, and the content of the oxygen atom in the intermediate layer is ≥0.01 to ≤10 atomic% with respect to the total of the silicon atom, nitrogen atom, and oxygen atom in the intermediate layer.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种使用长波长光或短波长光具有足够高的曝光灵敏度的电子照相感光体,其中中间层的电阻变化甚至相对于低的环境变化而降低 温度和低湿度到高温高湿,其中残留电位的上升减小,即使在重复使用之后也能获得稳定的质量图像。 解决方案:电子照相感光体具有由包含氢原子,氧原子和氢原子和卤素原子中的至少一个作为母体制成的由非硅单晶硅膜构成的中间层 在支撑体和有机导电层之间并没有掺杂磷原子和硼原子,其中中间层中的氮原子的含量相对于硅原子的总量为≥5至≤50原子%, 氮原子和氧原子,中间层中的氧原子的含量相对于中间层中的硅原子,氮原子和氧原子的总量为≥0.01〜≤10原子% 。 版权所有(C)2006,JPO&NCIPI
    • 54. 发明专利
    • Electrophotographic photoreceptor and electrophotographic apparatus using same
    • 电子照相机和使用相同的电子照相设备
    • JP2006133525A
    • 2006-05-25
    • JP2004322773
    • 2004-11-05
    • Canon Incキヤノン株式会社
    • AOKI MAKOTOFURUSHIMA SATOSHIOWAKI HIRONORIHOSOI KAZUTOOHIRA JUN
    • G03G5/08
    • G03G5/08235G03G5/08221
    • PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor which includes a photosensitive layer having high sensitivity at a wavelength of 380-500 nm or its vicinity, in which little absorption of such the wavelength is recognized, and which has notable image resolution property, good operating environmental characteristics, high safety, excellent wear resistance and easiness of manufacture, reduces optical memory, and ensures high image quality, and to provide an electrophotographic apparatus using the electrophotographic photoreceptor. SOLUTION: In the electrophotographic photoreceptor comprising a substrate, a photoconductive layer disposed on the substrate and a surface layer disposed on the photoconductive layer and comprising an amorphous material based on silicon and nitrogen atoms and containing at least oxygen atoms, the surface layer contains nitrogen atoms at an average concentration represented by the formula (1): 0.3≤N/(Si+N)≤0.7 (where N denotes the number of nitrogen atoms; and Si denotes the number of silicon atoms), and contains oxygen atoms with a maximum value Omax of the number of oxygen atoms in the thickness direction. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种电子照相感光体,其包括在380-500nm波长或其附近具有高灵敏度的感光层,其中几乎没有这种波长的吸收被识别,并且具有显着的图像分辨率 性能良好的操作环境特性,高安全性,优异的耐磨性和易制造性,减少了光学记忆,并确保了高的图像质量,并提供了使用电子照相感光体的电子照相设备。 解决方案:在包括基板的电子照相感光体中,设置在基板上的光电导层和设置在光电导层上并包含基于硅和氮原子并且至少含有氧原子的非晶材料的表面层,表面层 含有由式(1)表示的平均浓度的氮原子:0.3≤N/(Si + N)≤0.7(其中N表示氮原子数; Si表示硅原子数),并且含有氧原子 具有厚度方向上的氧原子数的最大值Omax。 版权所有(C)2006,JPO&NCIPI
    • 55. 发明专利
    • Electrophotographic photoreceptor
    • 电子照相机
    • JP2006133522A
    • 2006-05-25
    • JP2004322760
    • 2004-11-05
    • Canon Incキヤノン株式会社
    • YAMADA MOTOYAFURUSHIMA SATOSHIAOKI MAKOTOHOSOI KAZUTOOHIRA JUNOWAKI HIRONORI
    • G03G5/08
    • PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor, having a surface layer whose absorption for image exposure light having a wavelength of 380-500 nm is minimized, and having superior electrophotographic characteristics. SOLUTION: The electrophotographic photoreceptor comprises a substrate, and a photoconductive layer, an upper charge injection blocking layer and a surface layer, disposed sequentially on the substrate, wherein the upper charge injection blocking layer comprises an amorphous material, based on silicon and carbon atoms and containing a group 13 element of a periodic table, and wherein the surface layer comprises an amorphous material based on silicon and nitrogen atoms and containing oxygen and carbon atoms in ranges that satisfy Formula (1): 0.0001≤O/(Si+N+O+C)≤0.2, Formula (2): 0.0001≤C/(Si+N+O+C)≤0.1, and Formula (3): 0.3≤N/(Si+N+O+C)≤0.6. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供具有表面层的电子照相感光体,其表面层的波长为380-500nm的图像曝光光的吸收最小化,并且具有优异的电子照相特性。 解决方案:电子照相感光体包括依次设置在基底上的基片和光电导层,上电荷注入阻挡层和表面层,其中上电荷注入阻挡层包含基于硅和非晶材料的无定形材料, 碳原子并含有元素周期表的第13族元素,并且其中所述表面层包含基于硅和氮原子并且满足式(1)的范围内的氧和碳原子的无定形材料:0.0001≤O/(Si + N + O + C)≤0.2,式(2):0.0001≤C/(Si + N + O + C)≤0.1,式(3):0.3≤N/(Si + N + O + C)≤ 0.6。 版权所有(C)2006,JPO&NCIPI
    • 56. 发明专利
    • Method for manufacturing electrophotographic photoreceptor, electrophotographic photoreceptor and image forming apparatus using same
    • 用于制造电子照相光电子的方法,电子照相光电子器件和使用其的图像形成装置
    • JP2006058532A
    • 2006-03-02
    • JP2004239491
    • 2004-08-19
    • Canon Incキヤノン株式会社
    • HOSOI KAZUTOFURUSHIMA SATOSHIAOKI MAKOTOOHIRA JUN
    • G03G5/08
    • PROBLEM TO BE SOLVED: To prevent the occurrence of image defects attributed to abnormally grown parts called protrusions on a surface of an electrophotographic photoreceptor. SOLUTION: A method for manufacturing an electrophotographic photoreceptor by forming a layer comprising a non-single-crystal material in a vacuum-sealable film deposition furnace provided with an exhaust system and a raw gas feeding device comprises: a step of setting a substrate at least a surface of which is conductive in the film deposition furnace and forming a first layer comprising a non-single-crystal material on the substrate; a step of taking out the substrate, once from the film deposition furnace, on which the first layer has been deposited; a step of polishing the outermost surface of the first layer; a step of setting the substrate, again in the film deposition furnace, on which the first layer after the polishing has been deposited; a step of decomposing gas containing at least oxygen atoms with high-frequency power and subjecting the outermost surface of the first layer after the polishing to plasma treatment; and a step of depositing a second layer comprising a non-single-crystal material on the substrate after the plasma treatment. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了防止由电子照相感光体的表面上称为突起的异常生长部分引起的图像缺陷的发生。 解决方案:一种在具有排气系统和原料气体供给装置的真空密封成膜炉中形成包含非单晶材料的层的电子照相感光体的制造方法,其特征在于, 其至少表面在所述成膜炉中是导电的,并在所述衬底上形成包含非单晶材料的第一层; 从成膜炉中取出一次从其上沉积第一层的步骤; 抛光第一层的最外表面的步骤; 再次沉积在抛光后的第一层上的成膜炉中设置基板的步骤; 以高频功率分解至少含有氧原子的气体并对抛光后的第一层的最外表面进行等离子体处理的步骤; 以及在等离子体处理之后在衬底上沉积包含非单晶材料的第二层的步骤。 版权所有(C)2006,JPO&NCIPI
    • 58. 发明专利
    • Electrophotographic photoreceptor
    • 电子照相机
    • JP2005062846A
    • 2005-03-10
    • JP2004213908
    • 2004-07-22
    • Canon Incキヤノン株式会社
    • HOSOI KAZUTOMATSUOKA HIDEAKIFURUSHIMA SATOSHIEBARA TOSHIYUKI
    • G03G5/08G03G5/082
    • G03G5/08271G03G5/08221G03G5/08228G03G5/08235G03G5/08242G03G5/0825G03G5/08257G03G5/08264G03G5/08278
    • PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor of high quality having excellent image characteristics and further an electrophotographic photoreceptor which achieves an improvement in dot reproducibility, an improvement in electrostatic chargeability, a reduction of an optical memory and an increase of sensitivity. SOLUTION: The electrophotographic photoreceptor has a photoconductive layer which is formed from a non-single-crystal material constituted by at least silicon atoms as a base material, on an electrically conductive substrate, and a non-single-crystal layer constituted by silicon atoms and carbon atoms as base materials laminated on the photoconductive layer, The content distribution of the oxygen atoms to a total amount of component atoms has a peak in a thickness direction within the non-single-crystal layer region constituted by the silicon atoms and the carbon atoms as the base materials laminated on the photoconductive layer. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供具有优异图像特性的高品质的电子照相感光体和进一步提高点再现性的电子照相感光体,提高静电充电性,减少光学记忆和提高灵敏度 。 解决方案:电子照相感光体具有由导电性基板上至少以硅原子构成的非单晶材料形成的光导电层,以及由导电性基板构成的非单晶层 硅原子和碳原子作为基材层压在光导电层上。氧原子与成分原子总量的含量分布在由硅原子构成的非单晶层区域内的厚度方向上具有峰值, 作为基材的碳原子层压在光电导层上。 版权所有(C)2005,JPO&NCIPI
    • 59. 发明专利
    • Electrophotographic photoreceptor
    • 电子照相机
    • JP2004133399A
    • 2004-04-30
    • JP2003206860
    • 2003-08-08
    • Canon Incキヤノン株式会社
    • HOSOI KAZUTOFURUSHIMA SATOSHIMATSUOKA HIDEAKI
    • G03G5/08
    • PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor which can enhance electrostatic chargeability, prevents occurrence of image defects such as a flaw due to a shock applied from the outside to the photoreceptor and can supply high quality images of high image quality over a prolonged period of time.
      SOLUTION: The electrophotographic photoreceptor has at least a photoconducting layer 104 containing a silicon-base amorphous material and a layer containing a silicon-base amorphous material containing a group 13 element of a periodic table in at least a part on a conductive substrate 101. The content of the group 13 element to the total amount of constituent atoms in the amorphous material-containing layer region stacked on the photoconducting layer 104 has distribution having at least two maximum values in the thickness direction of the amorphous material-containing layer region. Electrostatic chargeability can be enhanced, the problem that image defects due to a flaw occur is solved, the service life of the amorphous silicon photoreceptor is prolonged, and a high grade electrophotographic photoreceptor giving excellent images over a prolonged period of time is obtained.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:为了提供可提高静电充电性的电子照相感光体,防止由于从外部施加到感光体的冲击引起的诸如瑕疵的图像缺陷的发生,并且可以提供高图像质量的高质量图像 一段时间。 解决方案:电子照相感光体至少具有含有硅基无定形材料的光导层104和在导电基底上至少部分含有周期表第13族元素的硅基非晶材料层 第13族元素相对于层叠在光电导层104上的含非晶质材料层的构成原子的总量的含量,在非晶质含有层的区域的厚度方向上具有至少2个以上的最大值的分布 。 可以提高静电带电性,解决了由于缺陷而产生的图像缺陷的问题,延长了非晶硅感光体的使用寿命,并且获得了在较长时间内提供优异图像的高级电子照相感光体。 版权所有(C)2004,JPO