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51. 发明授权

US08366870B2 Method and apparatus for plasma processing 有权
标题翻译：等离子体处理方法和装置
公开(公告)号：US08366870B2
公开(公告)日：2013-02-05
申请号：US13103666
申请日：2011-05-09
申请人： Ryoji Nishio , Tadamitsu Kanekiyo , Yoshiyuki Oota , Tsuyoshi Matsumoto
发明人： Ryoji Nishio , Tadamitsu Kanekiyo , Yoshiyuki Oota , Tsuyoshi Matsumoto
IPC分类号： C23F1/08 , H01L21/66
CPC分类号： G06F17/5081 , G06F17/5086 , H01J37/32082 , H01J37/32642 , H01J37/32935 , H01L21/67069 , H01L21/6875
摘要： The invention provides a plasma processing apparatus capable of minimizing the non-uniformity of potential distribution around wafer circumference, and providing a uniform process across the wafer surface. The apparatus is equipped with a focus ring formed of a dielectric, a conductor or a semiconductor and having RF applied thereto, the design of which is optimized for processing based on a design technique clarifying physical conditions for flattening a sheath-plasma interface above a wafer and the sheath-plasma interface above the focus ring. A surface voltage of the focus ring is determined to be not less than a minimum voltage for preventing reaction products caused by wafer processing from depositing thereon. The surface height, surface voltage, material and structure of the focus ring are optimized so that the height of an ion sheath formed on the focus ring surface is either equal or has a height difference within an appropriate tolerance range to the height of the ion sheath formed on the wafer surface. Optimization of the structure is realized by setting up an appropriate tolerance range taking into consideration the variation caused by consumption of the focus ring.
摘要翻译：本发明提供一种等离子体处理装置，其能够最小化晶片周边周围的电位分布的不均匀性，并且跨晶片表面提供均匀的工艺。该装置配备有由电介质，导体或半导体形成的并且施加RF的聚焦环，其设计被优化用于基于澄清用于使晶片上的鞘等离子体界面平坦化的物理条件的设计技术进行处理以及聚焦环上方的鞘 - 等离子体界面。聚焦环的表面电压被确定为不低于用于防止由晶片加工引起的反应产物沉积在其上的最小电压。聚焦环的表面高度，表面电压，材料和结构被优化，使得形成在聚焦环表面上的离子鞘的高度相等或具有在离子鞘高度适当的公差范围内的高度差形成在晶片表面上。通过考虑由聚焦环的消耗引起的变化，建立适当的公差范围来实现结构的优化。

52. 发明授权

US08320035B2 Micro-movable device 有权
标题翻译：微动装置
公开(公告)号：US08320035B2
公开(公告)日：2012-11-27
申请号：US12458601
申请日：2009-07-16
申请人： Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
发明人： Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G01C19/5719 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0831 , G02B6/3518
摘要： A micro-movable device includes a frame, a movable section including a body section, and a torsion coupling section for coupling the frame with the movable section to define an axis of oscillation of the movable section, wherein the frame includes a first extending portion and a second extending portion that are spaced apart from each other in a direction parallel to the axis and extend along the body section, and oppose the body section via a gap.
摘要翻译：微型可移动装置包括框架，包括主体部分的可移动部分和用于将框架与可动部分联接以限定可动部分的振动轴线的扭转联接部分，其中框架包括第一延伸部分和第二延伸部分，其在平行于轴线的方向上彼此间隔开并且沿着主体部分延伸，并且经由间隙与身体部分相对。

53. 发明申请

US20120274429A1 COIL COMPONENT 有权
标题翻译：线圈组件
公开(公告)号：US20120274429A1
公开(公告)日：2012-11-01
申请号：US13399794
申请日：2012-02-17
申请人： Hideki OGAWA , Tsuyoshi MATSUMOTO
发明人： Hideki OGAWA , Tsuyoshi MATSUMOTO
IPC分类号： H01F1/00
CPC分类号： H01F1/26 , H01F1/24 , H01F1/33 , H01F17/04 , H01F41/0246 , H01F2003/106
摘要： A coil component 10 includes: a magnetic core made of a magnetic alloy; a coil having a spiral part placed around a pillar part of the magnetic core; a magnetic sheath formed on the magnetic core in a manner covering the coil except for the bottom face of the magnetic core; and a first external terminal and second external terminal formed on the magnetic core and magnetic sheath; wherein the magnetic sheath has numerous voids inside.
摘要翻译：线圈部件10包括：由磁性合金制成的磁芯; 线圈，其具有围绕所述磁芯的柱部配置的螺旋部; 以除了磁芯的底面之外的线圈的方式形成在磁芯上的磁性护套; 以及形成在所述磁芯和磁性护套上的第一外部端子和第二外部端子; 其中磁性护套内部具有许多空隙。

54. 发明申请

US20120238422A1 KNIFE FOLDING MACHINE 审中-公开
标题翻译：刀具折叠机
公开(公告)号：US20120238422A1
公开(公告)日：2012-09-20
申请号：US13512730
申请日：2009-12-10
申请人： Shinya Watanabe , Tatsuaki Ida , Tsuyoshi Matsumoto , Takehito Yokogi
发明人： Shinya Watanabe , Tatsuaki Ida , Tsuyoshi Matsumoto , Takehito Yokogi
IPC分类号： B65H45/18 , B65H43/02 , B65H37/06 , B65H43/00
CPC分类号： B65H45/18 , B65H2511/222
摘要： In the knife folding machine of the present invention it is possible to easily adjust the stroke of the reciprocal movement of the knife blade 5. The rod 10 is reciprocated by the feed screw 12. The feed screw 12 is rotated by the servomotor 14. Thus when the knife blade 5 reciprocates between the first and second positions, the first and second positions thereof are separately adjusted by controlling the amount of the rotation of the servomotor 14.
摘要翻译：在本发明的刀具折叠机中，可以容易地调节刀片5的往复运动的行程。杆10通过进给螺杆12往复运动。进给螺杆12由伺服马达14旋转。因此当刀片5在第一位置和第二位置之间往复运动时，通过控制伺服电动机14的旋转量来分别调节其第一和第二位置。

55. 发明授权

US08259183B2 Shooting lens having vibration reducing function and camera system for same 有权
标题翻译：具有减震功能的拍摄镜头及相机系统
公开(公告)号：US08259183B2
公开(公告)日：2012-09-04
申请号：US13064323
申请日：2011-03-18
申请人： Hiroyuki Tomita , Kazutoshi Usui , Tsuyoshi Matsumoto
发明人： Hiroyuki Tomita , Kazutoshi Usui , Tsuyoshi Matsumoto
IPC分类号： H04N5/228 , G03B17/00
CPC分类号： H04N5/23248 , H04N5/23254 , H04N5/23258 , H04N5/23287
摘要： The invention includes a vibration reduction mechanism, a vibration detecting part, a reference signal generating part, a target drive position calculating part, and a driving part. The vibration reduction mechanism reduces a vibration of a subject image. The vibration detecting part outputs a vibration detection signal. The reference signal generating part estimates a reference signal of the vibration detection part. The target drive position calculating part obtains a vibration component from a difference between the vibration detection signal and the estimated reference signal to obtain a target position to which the vibration reduction mechanism is driven. The driving part controls the vibration reduction mechanism to follow the target position. Particularly, the reference signal generating part corrects the reference signal according to a motion signal obtained from a captured image. An accurate reference signal can be obtained by the correction, thereby improving the performance of the vibration reduction.
摘要翻译：本发明包括减振机构，振动检测部分，参考信号产生部分，目标驱动位置计算部分和驱动部分。减振机构减少被摄体图像的振动。振动检测部输出振动检测信号。基准信号生成部估计振动检测部的基准信号。目标驱动位置计算部分根据振动检测信号和估计的参考信号之间的差异获得振动分量，以获得驱动减振机构的目标位置。驱动部件控制减振机构跟随目标位置。特别地，参考信号生成部根据从拍摄图像获得的运动信号来校正参考信号。通过校正可以获得准确的参考信号，从而提高振动降低的性能。

56. 发明申请

US20120188040A1 COIL COMPONENT 有权
标题翻译：线圈组件
公开(公告)号：US20120188040A1
公开(公告)日：2012-07-26
申请号：US13295774
申请日：2011-11-14
申请人： Hideki Ogawa , Toshiyuki Yagasaki , Hiroya Shigemoto , Tsuyoshi Matsumoto , Hiroyuki Higuchi , Kiyoshi Tanaka
发明人： Hideki Ogawa , Toshiyuki Yagasaki , Hiroya Shigemoto , Tsuyoshi Matsumoto , Hiroyuki Higuchi , Kiyoshi Tanaka
IPC分类号： H01F27/02
CPC分类号： H01F27/027 , H01F27/266 , H01F27/292
摘要： As an embodiment, a pair of first conductive films 12, 13 are formed from the side face to the bottom face of the sheet part 11a of a magnetic core 11, and one end 14b of the conductive wire of the coil 14 and the other end 14c of the conductive wire are joined to the side faces 12a, 13a of the first conductive films 12, 13, respectively. Also, as an embodiment, the joined parts 14b1, 14c1 are sandwiched by the side faces 12a, 13a of the first conductive films 12, 13 and the part 15a of the magnetic sheath 15 covering the side face of the sheet part 11a of the magnetic core 11, wherein the parts of the magnetic sheath 15 covering the joined parts 14b1, 14c1 are sandwiched by the side faces 12a, 13a of the first conductive films 12, 13 and the side faces 16a, 17a of second conductive films 16, 17 as well as the side faces 18a, 19a of third conductive films 18, 19.
摘要翻译：作为实施例，从磁芯11的片部11a的侧面到底面形成一对第一导电膜12,13，线圈14的导线的一端14b，另一端 14c分别与第一导电膜12,13的侧面12a，13a接合。此外，作为实施例，接合部分14b1,14c1被第一导电膜12,13的侧面12a，13a和磁性护套15的覆盖磁体的片状部分11a的侧面的部分15a夹着芯11，其中覆盖接合部分14b1,14c1的磁性护套15的部分被第一导电膜12,13的侧面12a，13a和第二导电膜16,17的侧面16a，17a夹在中间以及第三导电膜18,19的侧面18a，19a。

57. 发明申请

US20120057214A1 MICRO MOVABLE ELEMENT ARRAY AND A COMMUNICATION APPARATUS 有权
标题翻译：微移动元件阵列和通讯装置
公开(公告)号：US20120057214A1
公开(公告)日：2012-03-08
申请号：US13225097
申请日：2011-09-02
申请人： Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
发明人： Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A micro movable element array includes a first frame; a second frame; a first movable part row including plural first movable parts and a second movable part row including plural second movable parts. The first movable parts include first movable main parts. The second movable parts include second movable main parts. The first and second frames are stacked such that the first and second movable part rows are opposed to each other. In the first movable part row, the first movable parts are located such that the first movable main parts are arranged in a first direction and the first movable main parts and gaps are disposed alternately. In the second movable part row, the second movable parts are located such that the second movable main parts are arranged in the first direction and the second movable main parts are opposed to the corresponding gaps.
摘要翻译：微型可移动元件阵列包括第一框架; 第二帧; 包括多个第一可移动部分的第一可移动部分行和包括多个第二可移动部分的第二可移动部分行。第一可移动部件包括第一可移动主要部件。第二可移动部件包括第二可移动主体部件。第一和第二框架被堆叠成使得第一和第二可移动部件行彼此相对。在第一可动部分行中，第一可移动部分被定位成使得第一可移动主体部分沿第一方向布置，并且第一可移动主体部分和间隙交替设置。在第二可移动部分行中，第二可移动部分被定位成使得第二可移动主体部分沿第一方向布置，并且第二可移动主体部分与相应的间隙相对。

58. 发明授权

US08083888B2 Plasma processing apparatus 有权
标题翻译：等离子体处理装置
公开(公告)号：US08083888B2
公开(公告)日：2011-12-27
申请号：US12041741
申请日：2008-03-04
申请人： Tatehito Usui , Tsuyoshi Yoshida , Tsuyoshi Matsumoto , Satoru Muto , Kenetsu Yokogawa
发明人： Tatehito Usui , Tsuyoshi Yoshida , Tsuyoshi Matsumoto , Satoru Muto , Kenetsu Yokogawa
IPC分类号： H01L21/00 , C23C14/00 , C23C16/00
CPC分类号： H01J37/32972 , G01N21/68 , H01J37/32091 , H01J37/32935
摘要： The invention provides a plasma processing apparatus for measuring the etching quantity of the material being processed and detecting the end point of etching using optical interference on the surface of a sample being processed, so as to simultaneously realize long life and ensure sufficient light to be received via a light transmitting unit, to enable long term stable operation and to improve the processing accuracy via accurate etching quantity detection. In a plasma processing apparatus for processing a sample being processed by generating plasma between a shower plate and a lower electrode, a detector for detecting light from a surface of the sample being processed via the shower plate includes a light transmitting unit composed of a light guide into which light is entered and a spectroscope for analyzing the light obtained by the light transmitting unit, wherein the end surface of the light transmitting unit through which light is entered is arranged at a distance of five times or greater of the mean free path of gas molecules within the vacuum reactor from the end surface of the shower plate facing the plasma.
摘要翻译：本发明提供了一种用于测量被处理材料的蚀刻量的等离子体处理装置，并且利用正在处理的样品表面上的光学干涉来检测蚀刻终点，以同时实现长寿命并确保足够的光被接收通过光发射单元，能够进行长期稳定的操作，并通过精确的蚀刻量检测来提高加工精度。在用于通过在淋浴板和下部电极之间产生等离子体来处理被处理样品的等离子体处理装置中，用于检测经由淋浴板处理的样品的表面的光的检测器包括：光导体，进入光的分光器和用于分析由光发射单元获得的光的分光镜，其中进入光的光透射单元的端面布置在气体的平均自由程的五倍或更大的距离真空反应器内的分子从淋浴板的端面朝向等离子体。

59. 发明申请

US20110234848A1 Sound recording device, imaging device, photographing device, optical device, and program 有权
标题翻译：录音装置，成像装置，拍摄装置，光学装置和程序
公开(公告)号：US20110234848A1
公开(公告)日：2011-09-29
申请号：US12913907
申请日：2010-10-28
申请人： Tsuyoshi MATSUMOTO , Mitsuhiro OKAZAKI
发明人： Tsuyoshi MATSUMOTO , Mitsuhiro OKAZAKI
IPC分类号： H04N5/225 , G06F17/00
CPC分类号： H04N5/2328 , H04N5/23254
摘要： A sound recording device includes an input unit, a timing detection unit, a section setting unit that sets a first section including a section in which an operation unit operates in a sound signal, a reference signal determination unit that determines, as a first reference signal, the sound signal corresponding to a second section following the first section, a signal detection unit that detects, as a second reference signal, a sound signal with the highest correlation with the first reference signal, an interpolation signal detection unit that detects, as an interpolation signal, a sound signal that follows the second reference signal detected by the signal detection unit in the sound signal and has the same time length as the first section, a signal replacement unit that replaces the sound signal in the first section with the interpolation signal, and a recording unit that records the sound signal replaced by the signal replacement unit.
摘要翻译：声音记录装置包括输入单元，定时检测单元，设置包括操作单元在声音信号中进行操作的区间的第一区间的区间设定单元，将基准信号决定单元确定为第一基准信号所述声音信号对应于在所述第一部分之后的第二部分，信号检测单元，其检测与所述第一参考信号具有最高相关性的声音信号作为第二参考信号;插值信号检测单元，插补信号，跟随由信号检测单元在声音信号中检测到的第二参考信号的声音信号，并且具有与第一部分相同的时间长度;信号替换单元，用第一部分替换第一部分中的声音信号，以及记录单元，其记录由信号更换单元替换的声音信号。

60. 发明授权

US07993201B2 Electronic game with overlay card 有权
标题翻译：电子游戏与覆盖卡
公开(公告)号：US07993201B2
公开(公告)日：2011-08-09
申请号：US11673430
申请日：2007-02-09
申请人： Tsuyoshi Matsumoto , Masaru Kuribayashi
发明人： Tsuyoshi Matsumoto , Masaru Kuribayashi
IPC分类号： A63F13/00
CPC分类号： A63F13/98 , A63F13/10 , A63F13/2145 , A63F13/42 , A63F2300/1075 , A63F2300/69
摘要： Systems and methods related to game consoles, game software and games for play on a game console having a touch screen interface. A card having a pattern defined therein is overlaid on the touch screen. The defined pattern is used to activate portions of the touch screen by guiding user interaction with a touch pad or touch screen. The activated portions of the touch pad or touch screen launch responsive activity in a computer program implemented on the game console.
摘要翻译：与具有触摸屏界面的游戏控制台，游戏软件和玩游戏有关的系统和方法。具有限定在其中的图案的卡片覆盖在触摸屏上。定义的模式用于通过引导用户与触摸板或触摸屏的交互来激活触摸屏的部分。触摸板或触摸屏的激活部分在游戏机上实现的计算机程序中启动响应活动。

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