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    • 57. 发明申请
    • FILM FORMING APPARATUS, FILM FORMING METHOD AND STORAGE MEDIUM
    • 电影成型设备,成膜方法和储存介质
    • US20100119727A1
    • 2010-05-13
    • US12593502
    • 2008-03-13
    • Toshio Takagi
    • Toshio Takagi
    • B29C71/04C23C16/56
    • C23C16/45565C23C16/45521C23C16/45574C23C16/4586H01L21/3141H01L21/31641
    • A film forming apparatus includes a processing chamber, and a mounting table disposed in the processing chamber to mount a substrate thereon. The film forming apparatus further includes a gas shower head having gas supply holes and including a central region facing a central portion of the substrate and a peripheral region facing a peripheral portion of the substrate, a first processing gas supply unit for supplying a first processing gas to the central region, a second processing gas supply unit for supplying a second processing gas to the central region, an energy supply unit for supplying energy to react the first processing gas with the second processing gas on the substrate, and a purge gas supply unit for supplying a purge gas to the central region and the peripheral region when one of the first and the second processing gas is switched by the other.
    • 成膜装置包括处理室和设置在处理室中以在其上安装基板的安装台。 所述成膜装置还包括具有气体供给孔的气体喷淋头,所述气体喷头包括面向所述基板的中心部分的中心区域和与所述基板的周边部分相对的周边区域;第一处理气体供给单元, 向所述中央区域供给用于向所述中央区域供给第二处理气体的第二处理气体供给单元,供给能够使所述第一处理气体与所述基板上的所述第二处理气体反应的能量供给单元,以及净化气体供给单元 用于当第一和第二处理气体中的一个被另一个切换时,向中心区域和周边区域提供净化气体。
    • 60. 发明授权
    • Optical module
    • 光模块
    • US07255491B2
    • 2007-08-14
    • US10902260
    • 2004-07-30
    • Toshio Takagi
    • Toshio Takagi
    • G02B6/42
    • G02B6/4225
    • One object of the present invention is to provide a new arrangement for an optical module that enables to align the optical fiber with the semiconductor optical device in active alignment technique. The optical module of the present invention includes a container, a base and a ferrule assembly. The ferrule assembly integrates the optical fiber, the ferrule and the holder, in which the ferrule secures the optical fiber in a center thereof and the holder having a V-groove secures the ferrule in the V-groove. The container has a depression, one end of which is opened, for receiving the ferrule therein. The semiconductor optical device is mounted on a region opposite to the open of the depression of the container. Both sides of the depression are regions on a primary surface of the container, and, when the holder is placed on these two regions, the ferrule is set within the depression with gaps against side surfaces of the depression. Thus, by sliding the holder on the container, the optical fiber can be actively aligned with the semiconductor optical device mounted on the container in directions parallel to the optical axis and within the primary surface of the container.
    • 本发明的一个目的是提供一种用于光学模块的新装置,其能够使主动对准技术中的光纤与半导体光学装置对准。 本发明的光学模块包括容器,基座和套圈组件。 套圈组件将光纤,套管和保持器集成在一起,其中套圈将光纤固定在其中心,并且具有V形槽的保持器将套圈固定在V形槽中。 容器具有一个开口的凹部,用于在其中容纳套圈。 半导体光学器件安装在与容器的凹部的开口相对的区域上。 凹陷的两侧是容器的主表面上的区域,并且当保持器被放置在这两个区域上时,套圈被设置在具有与凹部的侧表面相对的间隙的凹陷内。 因此,通过使容器上的保持器滑动,光纤可以与安装在容器上的半导体光学装置主动对齐,该方向平行于光轴并且在容器的主表面内。