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    • 53. 发明授权
    • Germanium photodetector
    • 锗光电探测器
    • US08614116B2
    • 2013-12-24
    • US13556597
    • 2012-07-24
    • Solomon AssefaJeehwan KimJin-Hong ParkYurii A. Vlasov
    • Solomon AssefaJeehwan KimJin-Hong ParkYurii A. Vlasov
    • H01L21/00
    • H01L31/1808H01L31/1085Y02E10/50
    • A method for forming a photodetector device includes forming an insulator layer on a substrate, forming a germanium (Ge) layer on the insulator layer and a portion of the substrate, forming a second insulator layer on the Ge layer, patterning the Ge layer, forming a capping insulator layer on the second insulator layer and a portion of the first insulator layer, heating the device to crystallize the Ge layer resulting in an single crystalline Ge layer, implanting n-type ions in the single crystalline Ge layer, heating the device to activate n-type ions in the single crystalline Ge layer, and forming electrodes electrically connected to the single crystalline n-type Ge layer.
    • 一种形成光检测器件的方法包括:在基片上形成绝缘体层,在绝缘体层和一部分基底上形成锗(Ge)层,在Ge层上形成第二绝缘层,构图Ge层,形成 在所述第二绝缘体层上的封盖绝缘体层和所述第一绝缘体层的一部分,加热所述器件以使所述Ge层结晶,得到单晶Ge层,在所述单晶Ge层中注入n型离子,将所述器件加热至 在单晶Ge层中激活n型离子,以及形成电连接到单晶n型Ge层的电极。