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    • 41. 发明专利
    • Heat type radiation detector
    • 热式辐射探测器
    • JP2003014538A
    • 2003-01-15
    • JP2001199225
    • 2001-06-29
    • Nikon Corp株式会社ニコン
    • SUZUKI JUNJI
    • G01J1/02G01J5/40
    • PROBLEM TO BE SOLVED: To achieve a signal processing for reducing the influence of environmental temperature, a signal processing for reducing the influence of the variation of light quantity of a light source, image correction processing, and the like.
      SOLUTION: A heat type radiation detection effective element 101 and a heat type radiation detection reactive element 102 are provided on a substrate 1. The effective element 101 has a section to be supported. The section to be supported comprises an infrared ray absorption section for receiving infrared rays and for converting them to heat, a displacement section that is displaced to the substrate 1 according to heat that is generated at the infrared ray absorption section, and a reflection plate used for obtaining a specific change according to displacement being generated at the displacement section. The reactive element 102 essentially has the same structure as the effective element 102, and it is constituted so that it does not respond to incident infrared rays.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了实现减少环境温度影响的信号处理,减少光源光量变化的影响的信号处理,图像校正处理等。 解决方案:在基板1上设置热型辐射检测有效元件101和热型辐射检测反应元件102.有效元件101具有待支撑的部分。 要支撑的部分包括用于接收红外线并将其转换成热的红外线吸收部分,根据在红外线吸收部分产生的热量向基板1移位的位移部分和使用的反射板 用于根据在位移部分产生的位移来获得特定的变化。 电抗元件102基本上具有与有效元件102相同的结构,并且其被构造成使得其不响应入射的红外线。
    • 50. 发明专利
    • DE60112236T2
    • 2006-04-13
    • DE60112236
    • 2001-09-03
    • NIKON CORP
    • ISHIZUYA TOHRUSUZUKI JUNJI
    • G01J1/02G01J5/40B81B3/00G01J5/48H01L27/148
    • A thermal displacement element comprises a substrate, and a supported member supported on the substrate. The supported member includes first and second displacement portions, a heat separating portion exhibiting a high thermal resistance and a radiation absorbing portion receiving the radiation and converting it into heat. Each of the first and second displacement portions has at least two layers of different materials having different expansion coefficients and stacked on each other. The first displacement portion is mechanically continuous to the substrate without through the heat separating portion. The radiation absorbing portion and the second displacement portion are mechanically continuous to the substrate through the heat separating portion and the first displacement portion. The second displacement portion is thermally connected to the radiation absorbing portion. A radiation detecting device comprises a thermal displacement element and a displacement reading member fixed to the second displacement portion of the thermal displacement element and used for obtaining a predetermined change corresponding to a displacement in the second displacement portion.