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41. 发明授权

US06597442B2 Apparatus for measuring aberration of a lens and an apparatus for adjusting a position of the lens 失效
标题翻译：用于测量透镜的像差的装置和用于调节透镜位置的装置
公开(公告)号：US06597442B2
公开(公告)日：2003-07-22
申请号：US09820284
申请日：2001-03-29
申请人： Takanori Maeda , Toshiharu Ezuka
发明人： Takanori Maeda , Toshiharu Ezuka
IPC分类号： G01B900
CPC分类号： G01M11/0271 , G01M11/0214 , G01M11/0242
摘要： An aberration detector for easily detecting aberration of a lens in a short time period by utilizing an interferometer. The aberration detector includes a laser diode, a beam splitter for dividing a light beam into two light beams, an optical system for supporting a lens and converging a light beam passing through the lens to a converging point, a spherical mirror for reflecting the light beam passing through the lens, an image pickup element for detecting an interference pattern obtained by interference of a reference light and the light reflected on the spherical mirror, and an analyzer for analyzing the interference pattern. A center of a sphere constituting the spherical mirror is arranged in a position displaced from the converging point such that a plurality of circular fringes are concentrically arranged on the interference pattern.
摘要翻译：一种用于通过利用干涉仪在短时间内容易地检测透镜的像差的像差检测器。像差检测器包括激光二极管，用于将光束分成两个光束的分束器，用于支撑透镜并将通过透镜的光束会聚到会聚点的光学系统，用于反射光束的球面镜通过透镜，用于检测通过参考光的干涉和反射在球面镜上的光获得的干涉图案的图像拾取元件和用于分析干涉图案的分析器。构成球面镜的球的中心布置在从会聚点偏移的位置，使得多个圆形条纹同心地布置在干涉图案上。

42. 发明授权

US06573986B2 Method and apparatus for self-referenced projection lens distortion mapping 有权
公开(公告)号：US06573986B2
公开(公告)日：2003-06-03
申请号：US09835201
申请日：2001-04-13
申请人： Adlai Smith , Bruce McArthur , Robert Hunter, Jr.
发明人： Adlai Smith , Bruce McArthur , Robert Hunter, Jr.
IPC分类号： G01B900
CPC分类号： G03F7/70558 , G03F7/706 , G03F7/70633 , Y10S977/887
摘要： A projection lens distortion error map is created using standard overlay targets and a special numerical algorithm. A reticle including a 2-dimensional array of standard overlay targets is exposed several times onto a photoresist coated silicon wafer using a photolithographic stepper. After exposure, the overlay targets are measured for placement error using a conventional overlay metrology tool. The resulting overlay error data is then supplied to a software program that generates a lens distortion error map for the photolithographic projection system.

43. 发明授权

US06496253B1 Method and system for automatic non-contact measurements of optical properties of optical objects 失效
标题翻译：自动非接触测量光学物体光学性质的方法和系统
公开(公告)号：US06496253B1
公开(公告)日：2002-12-17
申请号：US09588067
申请日：2000-06-06
申请人： Peter A. Vokhmin
发明人： Peter A. Vokhmin
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G01B11/2513
摘要： Automatic non-contact measuring optical properties of an optical object is performed by a system comprising a light source, a reference pattern, and an imaging and detecting means and an image processing means for producing a measurement output. At least the reference pattern and the imaging and detecting means are disposed on an optical axis of the system. The system further comprises a support for the optical object located between the reference pattern and the imaging and detecting means for disposing thereon the optical object coaxially with the pattern and the imaging and detecting means. The light source is capable of directing to the pattern an illuminating light in such a manner as to produce a plurality of illuminating light beams outcoming from each point of the pattern at different angles. The imaging and detecting means is capable of obtaining an image of the pattern through the optical objects so that each imaging beam is conjugate with only one of the illuminating beams, and of recording the image for its processing by the image processing means.
摘要翻译：通过包括光源，参考图案以及成像和检测装置的系统以及用于产生测量输出的图像处理装置来执行光学对象的自动非接触测量光学特性。至少参考图案和成像和检测装置设置在系统的光轴上。该系统还包括位于参考图案与成像之间的光学对象的支撑和用于在其上与图案同时设置光学物体的成像和检测装置的检测装置。光源能够以这样的方式将照明光引导到图案，以便以不同的角度从图案的每个点产生多个照明光束。成像和检测装置能够通过光学对象获得图案的图像，使得每个成像光束仅与一个照明光束共轭，并且由图像处理装置记录用于其处理的图像。

44. 发明授权

US06493074B1 Method and apparatus for measuring an optical transfer characteristic 失效
标题翻译：用于测量光学传递特性的方法和设备
公开(公告)号：US06493074B1
公开(公告)日：2002-12-10
申请号：US09479454
申请日：2000-01-06
申请人： Motoki Imamura , Shiro Ryu
发明人： Motoki Imamura , Shiro Ryu
IPC分类号： G01B900
CPC分类号： G01M11/332 , G01M11/335
摘要： There are provided an optical transfer characteristic measuring method and apparatus capable of measuring an optical transfer characteristic of an optical device on optical frequency axis in wide optical frequency bandwidth with high resolution. There are provided a variable wavelength sweep type light source capable of switching the wavelength of an optical signal generated therefrom stepwise and sweeping the optical frequency of the optical signal in a predetermined frequency range, and a variable wavelength reference light source capable of switching the wavelength of an optical signal generated therefrom stepwise and not capable of sweeping the optical frequency of the optical signal. Optical signals having their wavelengths sequentially switched to corresponding specified wavelengths are generated from the variable wavelength sweep type light source, and also a sweep of the optical frequency of each optical signal having the corresponding specified wavelength is carried out over the predetermined frequency range, until the number of occurrences of the optical signals reaches a preset number of times. After the measurement of the optical transfer characteristic has been completed, the measured results of the optical transfer characteristic regarding all of the specified wavelengths are concatenated on optical frequency axis, and is analyzed/displayed.
摘要翻译：提供了一种能够以高分辨率的宽光频带宽中的光频率轴上的光学装置的光传送特性来测量的光传输特性测量方法和装置。提供了一种可变波长扫描型光源，其能够逐步切换由其产生的光信号的波长，并且扫描预定频率范围内的光信号的光频率;以及可变波长参考光源，其能够切换逐步产生的光信号，不能扫描光信号的光频。从可变波长扫描型光源产生其波长顺序切换到对应的特定波长的光信号，并且在预定频率范围内执行具有相应指定波长的每个光信号的光频率扫描，直到光信号的发生次数达到预先设定的次数。在光传输特性的测量完成之后，关于所有指定波长的光传输特性的测量结果被连接在光频轴上，并进行分析/显示。

45. 发明授权

US06493073B2 System and method for measuring properties of an optical component 失效
公开(公告)号：US06493073B2
公开(公告)日：2002-12-10
申请号：US09734974
申请日：2000-12-11
申请人： Sheldon L. Epstein
发明人： Sheldon L. Epstein
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G01M11/0235 , G01M11/0242
摘要： A system for measuring properties of an optical component, such as a progressive, multifocal ophthalmic spectacle lens comprises a design having a set of concentric circles, means for recording images of the design directly and through the optical component in a computer memory, means for superimposing the images to form a moiré-effect pattern and a method for analyzing the pattern to measure a property (e.g., powers) of the optical component that includes a comparison of a portion of the pattern generated with the component with a portion of a pattern generated by a master component.

46. 发明授权

US06486942B1 Method and system for measurement of a characteristic of lens 失效
标题翻译：用于测量透镜特性的方法和系统
公开(公告)号：US06486942B1
公开(公告)日：2002-11-26
申请号：US09618274
申请日：2000-07-18
申请人： Paul Colbourne , Jian Jim Yang , Geoff Randall
发明人： Paul Colbourne , Jian Jim Yang , Geoff Randall
IPC分类号： G01B900
CPC分类号： G01M11/0228
摘要： A method and system are provided for measuring a characteristic of a lens. By directing light to a lens, and receiving reflected light from a opposite end faces of the lens on an image plane, a determination from the focused spots on the image plane can be made as to a characteristic of the lens, such as its focal length.
摘要翻译：提供了一种用于测量透镜特性的方法和系统。通过将光引导到透镜，并且在图像平面上接收来自透镜的相对端面的反射光，可以从像面上的聚焦点确定关于透镜的特征，例如其焦距。

47. 发明授权

US06442104B1 Underwater background-acoustics synthesizer system and method 失效
标题翻译：水下背景声学合成器系统及方法
公开(公告)号：US06442104B1
公开(公告)日：2002-08-27
申请号：US06407878
申请日：1982-08-13
申请人： James Jefferson Ridgell, Jr. , Henry Jay Friedman , Timothy Paul Magnani
发明人： James Jefferson Ridgell, Jr. , Henry Jay Friedman , Timothy Paul Magnani
IPC分类号： G01B900
CPC分类号： F41G7/006 , G01S7/52004
摘要： A synthesizer and method for the generation of underwater background acoustic signals employs digital signal generation and processing in a multiplexed format. The synthesized digital signals comprise components of shaped noise, simple sinusoids, or double-sideband, suppressed-carrier, modulated sinusoids, or a combination of one or more of these signal types. Among the acoustic signals which are digitally synthesized are acoustic signals generated by antisubmarine-warfare hardware such as sonobuoys and hydrophones.
摘要翻译：用于产生水下背景声信号的合成器和方法采用多路复用格式的数字信号产生和处理。合成的数字信号包括成形噪声，简单正弦波或双边带，抑制载波，调制正弦波或这些信号类型中的一个或多个的组合的分量。在数字合成的声信号中，由反潜战硬件如声波和水听器产生的声信号。

48. 发明授权

US06437858B1 Aberration measuring method, aberration measuring system and aberration measuring mask 失效
标题翻译：畸变测量方法，像差测量系统和像差测量掩模
公开(公告)号：US06437858B1
公开(公告)日：2002-08-20
申请号：US09667818
申请日：2000-09-22
申请人： Takuya Kouno , Hiroshi Nomura , Tatsuhiko Higashiki
发明人： Takuya Kouno , Hiroshi Nomura , Tatsuhiko Higashiki
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G01M11/0242 , G03F7/706
摘要： A plurality of bars-in-bars marks are formed. Each mark has four small patterns and four large patterns arranged in a direction of a straight line and a direction perpendicular thereto. The straight lines of the respective bars-in-bars marks are disposed at angles of 0°, 30° and 60°.
摘要翻译：形成多个条形棒标记。每个标记具有沿直线方向和与其垂直的方向布置的四个小图案和四个大图案。各个棒状标记的直线以0°，30°和60°的角度设置。

49. 发明授权

US06344896B1 Method and apparatus for measuring positional shift/distortion by aberration 失效
标题翻译：用于通过像差测量位置偏移/失真的方法和装置
公开(公告)号：US06344896B1
公开(公告)日：2002-02-05
申请号：US09558803
申请日：2000-04-26
申请人： Hirofumi Saito
发明人： Hirofumi Saito
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G03F7/706 , G03F7/70633
摘要： In a distortion measuring method, a mask having at least a first diffraction grating pattern having an array of a plurality of large patterns and a second diffraction grating pattern having arrays of a plurality of micropatterns spaced apart from the first diffraction grating pattern by a predetermined interval is formed. The plurality of micropatterns are arrayed in a direction perpendicular to an array direction of the second diffraction grating pattern at a predetermined pitch. At least the first and second diffraction grating patterns formed on the mask are projected on a photosensitive substrate through a lens. Distortion including a positional shift component of an image point by aberration of the lens is measured by scanning the photosensitive substrate using coherent light having a diffractable wavelength and by measuring an interval between at least the first and second diffraction grating patterns. A distortion measuring apparatus and reticle are also disclosed.
摘要翻译：在失真测量方法中，具有至少具有多个大图案的阵列的第一衍射光栅图案的掩模和具有与第一衍射光栅图案间隔开预定间隔的多个微图案的阵列的第二衍射光栅图案形成了。多个微图案沿着与第二衍射光栅图案的阵列方向垂直的方向以预定间距排列。形成在掩模上的至少第一和第二衍射光栅图案通过透镜投影在感光基板上。通过使用具有可衍射波长的相干光并且通过测量至少第一和第二衍射光栅图案之间的间隔扫描感光基板来测量包括透镜的像差的图像点的位置偏移分量的失真。还公开了一种失真测量装置和掩模版。

50. 发明授权

US06323945B1 Coma aberration automatic measuring mark and measuring method 失效
标题翻译：彗差自动测量标记和测量方法
公开(公告)号：US06323945B1
公开(公告)日：2001-11-27
申请号：US09464211
申请日：1999-12-15
申请人： Hirofumi Saito
发明人： Hirofumi Saito
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G03F7/706 , G03F7/70683
摘要： Two coma aberration automatic measuring marks M1 and M2 of a first-order diffraction grating are each composed of a plurality of elongated isosceles triangle patterns which are so arranged that the axis of symmetry passing on the center of each elongated isosceles triangle is parallel to one another, that a half P1, P2, and P3 of the elongated isosceles triangle patterns have the widths thereof which extend in a direction opposite to that of the remaining half P4, P5 and P6 of the elongated isosceles triangle patterns, and the elongated isosceles triangle patterns are located separately from one another, in a direction perpendicular to the axis of symmetry passing on the center of each elongated isosceles triangle, and at a pitch diffracting a measuring coherent light. The two first-order diffraction gratings M1 and M2 are located separately from each other in a direction of the axis of symmetry passing on the center of the elongated isosceles triangle, in such a manner that the elongated isosceles triangle patterns included in the two first-order diffraction gratings are in symmetry to each other, in connection with a line positioned between the two first-order diffraction gratings and which is perpendicular to the axis of symmetry passing on the center of the elongated isosceles triangle. The two first-order diffraction gratings are scanned by the measuring coherent light, and a relative distance R1 between diffraction lights generated by the two first-order diffraction gratings, is measured and compared with a distance R between the two first-order diffraction gratings.
摘要翻译：一级衍射光栅的两个彗形像差自动测量标记M1和M2各自由多个细长的等腰三角形图案组成，这些三角形图案被布置成使得通过每个细长等腰三角形的中心的对称轴线彼此平行伸长的等腰三角形图案的一半P1，P2和P3的宽度，其宽度与细长的等腰三角形图案的剩余半部P4，P5和P6的方向相反的方向延伸，并且细长的等腰三角形图案在垂直于每个细长等腰三角形的中心的对称轴线的方向上并且以衍射测量的相干光的间距彼此分开地定位。两个一级衍射光栅M1和M2沿着在细长的等腰三角形的中心上通过的对称轴的方向彼此分开，使得包括在两个第一级衍射光栅M1和M2中的细长的等腰三角形图案，结合位于两个一级衍射光栅之间并且垂直于细长等腰三角形的中心的对称轴线，线衍射光栅彼此对称。通过测量相干光扫描两个一级衍射光栅，测量由两个一级衍射光栅产生的衍射光之间的相对距离R1，并与两个一级衍射光栅之间的距离R进行比较。

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