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41. 发明申请

WO2012008836A2 INSPECTION APPARATUS AND REPLACEABLE DOOR FOR A VACUUM CHAMBER OF SUCH AN INSPECTION APPARATUS AND A METHOD FOR OPERATING AN INSPECTION APPARATUS 审中-公开
标题翻译：这种检查装置的真空室的检查装置和可更换的门以及操作检查装置的方法
公开(公告)号：WO2012008836A2
公开(公告)日：2012-01-19
申请号：PCT/NL2011050513
申请日：2011-07-14
申请人： DELMIC B V , KRUIT PIETER , HOOGENBOOM JACOB PIETER , ZONNEVYLLE AERNOUT CHRISTIAAN
发明人： KRUIT PIETER , HOOGENBOOM JACOB PIETER , ZONNEVYLLE AERNOUT CHRISTIAAN
IPC分类号： H01J37/22 , G01N21/00 , G01N23/225 , H01J37/256 , H01J37/28
CPC分类号： H01J37/22 , G01N21/62 , G01N2021/625 , H01J37/226 , H01J37/228 , H01J37/256 , H01J37/26 , H01J37/28 , H01J2237/204 , H01J2237/2445 , H01J2237/2482 , H01J2237/2808
摘要： An inspection apparatus is provided comprising in combination at least an optical microscope and an ion- or electron microscope equipped with a source for emitting a primary beam of radiation to a sample in a sample holder. The apparatus may comprise a detector for detection of secondary radiation backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device to receive in use luminescence light emitted by the sample and to focus it on a photon-detector.
摘要翻译：提供一种检查装置，其至少包括光学显微镜和配备有用于向样品保持器中的样品发射主要辐射源的离子或电子显微镜。该装置可以包括检测器，用于检测从样品反向散射并由主光束引起的二次辐射。该光学显微镜配备有一个光收集装置，以便在使用中接收样品发射的发光并将其聚焦在光子检测器上。

42. 发明申请

WO2011148073A1 SYSTEME DE DETECTION DE CATHODOLUMINESCENCE REGLABLE ET MICROSCOPE METTANT EN OEUVRE UN TEL SYSTEME 审中-公开
标题翻译：可调式阴离子荧光检测系统和使用这种系统的显微镜
公开(公告)号：WO2011148073A1
公开(公告)日：2011-12-01
申请号：PCT/FR2011/050987
申请日：2011-04-29
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , KOCIAK, Mathieu , ZAGONEL, Luiz Fernando , TENCE, Marcel , MAZZUCCO, Stefano
发明人： KOCIAK, Mathieu , ZAGONEL, Luiz Fernando , TENCE, Marcel , MAZZUCCO, Stefano
IPC分类号： H01J37/02 , H01J37/244 , H01J37/256
CPC分类号： G01N23/2254 , G01N2201/08 , H01J37/228 , H01J37/244 , H01J37/261 , H01J37/28 , H01J2237/024 , H01J2237/063 , H01J2237/24475 , H01J2237/2448 , H01J2237/24485 , H01J2237/2602 , H01J2237/2802 , H01J2237/2808
摘要： Système de détection de cathodoluminescence comprenantune optique de collection (112) collectant un rayonnement lumineux provenant d'un échantillon (éclairé par un faisceau de particules chargées et renvoyant ledit rayonnement lumineux vers des moyens d'analyse, caractérisé en ce qu'il comprend des moyens (606,614-618) de positionnement de ladite optique de collection (112) sur au moins une dimension.
摘要翻译：阴极发光检测系统，包括收集光学器件（112），用于收集来自由带电粒子束照射的样本的光辐射并将所述光辐射反射到分析装置上，其特征在于，其包括用于定位所述收集物的装置（606,614-618）沿着至少一个维度的光学元件（112）。

43. 发明申请

WO2006093966A2 SEM CATHODOLUMINESCENT IMAGING USING UP-CONVERTING NANOPHOSPHORS 审中-公开
标题翻译：使用上转换纳米磷光体的SEM阴极射线成像
公开(公告)号：WO2006093966A2
公开(公告)日：2006-09-08
申请号：PCT/US2006/007095
申请日：2006-02-28
申请人： THE TRUSTEES OF PRINCETON UNIVERSITY , AUSTIN, Robert , LIM, Shuang, Fang , RIEHN, Robert
发明人： AUSTIN, Robert , LIM, Shuang, Fang , RIEHN, Robert
CPC分类号： A61K49/0067 , H01J2237/2808
摘要： Methods for high resolution tissue imaging in which a tissue to be imaged is labeled with UCP' s coupled to probes that bind specifically to biological markers on the tissue; the UCP's are then excited with electrons so that the UCP's emit cathodoluminescent photons; after which the photon emission is converted to a visible image. Methods for measuring water content, blood content or blood oxygenation in tumor tissue are also disclosed.
摘要翻译：用于高分辨率组织成像的方法，其中待成像的组织用与特异性结合组织上的生物学标记的探针偶联的UCP标记; 然后UCP被电子激发，使得UCP发射阴极发光光子; 之后将光子发射转换成可见光。还公开了测量肿瘤组织中含水量，血液含量或血氧饱和度的方法。

44. 发明授权

EP2622330B1 DECONVOLUTION OF TIME-GATED CATHODOLUMINESCENCE IMAGES 有权
标题翻译：时间选通阴极发光图像的去卷积
公开(公告)号：EP2622330B1
公开(公告)日：2014-12-17
申请号：EP11760455.3
申请日：2011-09-16
申请人： Attolight SA
发明人： BERNEY, Jean
IPC分类号： G01N23/225 , H01J37/22
CPC分类号： G21K1/00 , G01N23/2254 , H01J37/222 , H01J37/28 , H01J2237/06333 , H01J2237/226 , H01J2237/2611 , H01J2237/2808 , H01J2237/30472

45. 发明公开

EP2419215A1 OPTICAL PROBING IN ELECTRON MICROSCOPES 有权转让
标题翻译： OPTICAL PROBING在电子显微镜
公开(公告)号：EP2419215A1
公开(公告)日：2012-02-22
申请号：EP10764742.2
申请日：2010-04-15
申请人： Nanofactory Instruments AB
发明人： DANILOV, Andrey , OLIN, Håkan , ANGENETE, Johan
IPC分类号： B01J37/20 , B25J7/00 , H01J37/26
CPC分类号： H01J37/228 , H01J37/20 , H01J2237/2808
摘要： The present invention relates to an optical arrangement and in particular to an optical arrangement for use in electron microscopy applications. This is used for sample characterization with simultaneous measurement with the electron microscopy of the sample and measurements with an optical setup and/or using a manipulator for probing of a light source or a scanning probe device.

46. 发明公开

EP2108947A2 Apparatus and method for inspection 有权
标题翻译： Vorrichtung und Verfahren zur Inspektion
公开(公告)号：EP2108947A2
公开(公告)日：2009-10-14
申请号：EP08254165.7
申请日：2008-12-24
申请人： JEOL Ltd.
发明人： Nishiyama, Hidetoshi
IPC分类号： G01N23/22
CPC分类号： G01N23/2204 , H01J37/20 , H01J37/228 , H01J37/28 , H01J2237/208 , H01J2237/2608 , H01J2237/2808
摘要： Inspection method and apparatus capable of observing or inspecting a liquid sample (20) well. An optical image of the sample and an image using a primary beam such as an electron beam (7) or charged particle beam can be obtained at the same time. The inspection apparatus has a film (32) including a first surface (32a) on which the liquid sample is held, a vacuum chamber (11) for reducing the pressure of an ambient in contact with a second surface (32b) of the film, primary beam irradiation means (1) connected with the vacuum chamber and irradiating the sample with a primary beam via the film, signal detection means (4) for detecting a secondary signal produced from a specimen (38) contained in the sample in response to the primary beam irradiation, and optical image acquisition means (27) for obtaining an optical image of the specimen. The primary beam irradiation means and optical image acquisition means are located on opposite sides of the film that acts to block the light.
摘要翻译：能够很好地观察或检查液体样品（20）的检查方法和装置。可以同时获得样品的光学图像和使用诸如电子束（7）或带电粒子束的主光束的图像。该检查装置具有：膜（32），其具有保持液体试样的第一表面（32a），用于降低与膜的第二表面（32b）接触的环境的压力的真空室（11）一次束照射装置（1），与真空室连接，并通过该膜用一次束照射样品;信号检测装置（4），用于检测由样品中包含的试样（38）产生的二次信号，一次束照射和用于获得样本的光学图像的光学图像获取装置（27）。主光束照射装置和光学图像获取装置位于胶片的阻挡光线的两侧。

47. 发明公开

EP2105727A1 Scanning electron microscope comprising a film for holding a sample and a dish for receiving sample material from a damaged film 有权
标题翻译：扫描型电子显微镜用薄膜作为样品保持器和用于受损膜的样品材料的收集碗
公开(公告)号：EP2105727A1
公开(公告)日：2009-09-30
申请号：EP09250792.0
申请日：2009-03-20
申请人： JEOL Ltd.
发明人： Nishiyama, Hidetoshi , Koizumi, Mitsuru
IPC分类号： G01N23/225 , H01J37/20 , H01J37/26 , H01J37/28
CPC分类号： G01N23/2251 , G01N23/2204 , G01N2223/307 , G01N2223/612 , G01N2223/637 , H01J37/20 , H01J37/228 , H01J37/265 , H01J37/28 , H01J2237/182 , H01J2237/2004 , H01J2237/244 , H01J2237/2808
摘要： Method and apparatus capable of well observing or inspecting a liquid sample (20). The apparatus, for example a scanning electrode microscope, can be maintained and serviced better than heretofore. The apparatus has a film (32) including a first surface (32a) to hold the liquid sample (20) thereon, a vacuum chamber (11) for reducing the pressure of an ambient in contact with a second surface (32b) of the film (32), primary beam irradiation means (1) connected with the vacuum chamber (11) and irradiating the sample with a primary beam (7) via the film (32), signal detection means (4) for detecting a secondary signal produced from the sample (20) in response to the beam irradiation (7), a partitioning plate (14) for partially partitioning off the space between the film (32) and the primary beam irradiation means (1) in the vacuum chamber (11), and a vacuum gauge (15) for detecting the pressure inside the vacuum chamber (11).
Damage to the film is detected by a pressure increase inside the vacuum chamber. After detecting such a pressure increase the partitioning member is moved in the path of the irradiating beam in order to prevent sample material to spill into the irradiation means.
摘要翻译：方法和能够很好观察或检查的液体样品（20）装置。的装置，例如扫描电极显微镜，可以维护和服务比以前更好。该装置具有一个膜（32）包括第一表面（32A）以保持液体样品（20）在其上，在真空室（11），用于与膜的第二面（32B）减少接触的环境的压力（32），主光束照射单元（1）与所述真空室（11）连接，并且经由膜照射主光束（7）的样品（32）中，信号检测器，用于检测从产生的次级信号的装置（4）响应于所述光束照射（7）的样品（20），分隔板（14），用于在真空室中部分分隔从薄膜（32）和初级束照射设备（1）之间的空间（11），和真空计（15），用于检测所述真空室（11）内的压力。损坏膜是通过在真空室内部的压力增加来检测。检测寻求的压力增加分隔构件设置在照射光束的路径移动，以防止样品材料溢出到照射装置之后。

48. 发明公开

EP1412796A1 ELECTRON MICROSCOPE AND SPECTROSCOPY SYSTEM 审中-公开
标题翻译：电子和光谱系统
公开(公告)号：EP1412796A1
公开(公告)日：2004-04-28
申请号：EP02753135.9
申请日：2002-08-05
申请人： Renishaw plc
发明人： BENNETT, Robert , WOOLFREY, Andrew Mark , DAY, John Charles Clifford,University of Bristol , BEWICK, Angus,University of Bristol
IPC分类号： G02B7/00 , G02B21/06
CPC分类号： H01J37/228 , G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0216 , G01J3/0243 , H01J37/256 , H01J2237/2445 , H01J2237/2808
摘要： An electron microscope (10) is adapted to enable spectroscopic analysis of a sample (16). A parabolic mirror (18) has a central aperture (20) through which the electron beam can pass. The mirror (18) focuses laser illumination from a transverse optical path (24) onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system (30). The mirror (18) is retractable (within the vacuum of the electron microscope) by a sliding arm assembly (22). An adjustable kinematic mount (44) defines the inserted position of the parabolic mirror (18). A second parabolic mirror (104) is provided to direct the scattered or generated light towards an optical analyser. The parabolic mirrors are positioned in an aberration cancelling orientation and such that they compensate for inaccuracies in the position of the sliding arm assembly (22).

49. 发明公开

EP0306790A2 Kathodolumineszenzdetektor 无效
公开(公告)号：EP0306790A2
公开(公告)日：1989-03-15
申请号：EP88114026.3
申请日：1988-08-27
申请人： Firma Carl Zeiss
发明人： Schäfer, Norbert, Dipl.-Ing. , Eppli, Bernd, Dipl.-Ing. , Weimer, Eugen, Dr. Dipl.-Phys. , Rossow, Eberhard, Ing.(grad) , Gross, Herbert, Dipl.-Phys.
IPC分类号： G01N23/225 , G02B5/10
CPC分类号： H01J37/228 , G01N23/2254 , H01J37/244 , H01J2237/2445 , H01J2237/2808
摘要： Es wird ein Detektor beschrieben, der aus einem elliptischen Hohlspiegel (12h) und einem Rohr (13r) mit reflektierender Innenfläche zur Weiterleitung des Lichtes besteht. Das Vakuumfenster (13v) sitzt am äußeren Ende des Rohres (13r) unmittelbar vor dem Empfänger.
摘要翻译：描述了一种探测器，其由椭圆形凹面镜（12h）和具有用于透射光的反射内表面的管（13r）组成。真空窗（13v）位于接收器前面的管（13r）的外端。

50. 发明专利

NL2005080C INSPECTION APPARATUS AND REPLACEABLE DOOR FOR A VACUUM CHAMBER OF SUCH AN INSPECTION APPARATUS. 未知
公开(公告)号：NL2005080C
公开(公告)日：2012-01-17
申请号：NL2005080
申请日：2010-07-14
申请人： UNIV DELFT TECH
发明人： KRUIT PIETER , HOOGENBOOM JACOB PIETER , ZONNEVYLLE AERNOUT CHRISTIAAN
IPC分类号： H01J37/22 , H01J37/256 , H01J37/28
CPC分类号： H01J37/22 , G01N21/62 , G01N2021/625 , H01J37/226 , H01J37/228 , H01J37/256 , H01J37/26 , H01J37/28 , H01J2237/204 , H01J2237/2445 , H01J2237/2482 , H01J2237/2808

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