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41. 发明授权

US09865427B2 User interface for an electron microscope 有权
公开(公告)号：US09865427B2
公开(公告)日：2018-01-09
申请号：US14704453
申请日：2015-05-05
申请人： FEI COMPANY
发明人： Martinus Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC分类号： H01J37/26 , H01J37/18 , H01J37/21 , H01J37/302 , H01J37/16 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/28
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

42. 发明申请

US20170212428A1 VACUUM LINEAR FEED-THROUGH AND VACUUM SYSTEM HAVING SAID VACUUM LINEAR FEED-THROUGH 有权
公开(公告)号：US20170212428A1
公开(公告)日：2017-07-27
申请号：US15481619
申请日：2017-04-07
申请人： Carl Zeiss SMT GmbH
发明人： Matthias Roos , Eugen Foca
IPC分类号： G03F7/20
CPC分类号： G03F7/70708 , G03F7/70841 , G03F7/70916 , H01J2237/022 , H01J2237/2006 , H01J2237/20221
摘要： A vacuum linear feed-through (20), e.g., for an EUV lithography system, includes: a vacuum diaphragm bellows (21), which has a first end (21a) attaching a component and a second end (21b), opposite the first end, attaching to a vacuum housing, and an actuator device (27) generating a linear reciprocating motion of the bellows. The feed-through has at least one first shield (30, 30′), connected to the bellows at the first end, and at least one second shield (31, 31′), connected to the bellows at the second end. The first and second shield annularly surround the bellows, and the first and second shield overlap in the longitudinal direction of the bellows (21). At least one first shield and at least one second shield are formed of a permanently magnetic material, and/or the feed-through has a voltage-generating device (33) generating an electric field (E) between the first shield and the second shield.

43. 发明申请

US20160155606A1 INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE 审中-公开
公开(公告)号：US20160155606A1
公开(公告)日：2016-06-02
申请号：US15014516
申请日：2016-02-03
申请人： B-NANO LTD.
发明人： Dov SHACHAL
IPC分类号： H01J37/285 , H01J37/28
CPC分类号： H01J37/28 , H01J37/06 , H01J37/20 , H01J37/285 , H01J37/301 , H01J2237/006 , H01J2237/0458 , H01J2237/15 , H01J2237/164 , H01J2237/182 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/28 , H01J2237/2801 , H01J2237/2806 , H01J2237/2807
摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

44. 发明申请

US20150255244A1 Sample Storage Container, Charged Particle Beam Apparatus, and Image Acquiring Method 有权
标题翻译：样品储存容器，带电粒子束装置和图像采集方法
公开(公告)号：US20150255244A1
公开(公告)日：2015-09-10
申请号：US14438691
申请日：2013-10-29
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yusuke Ominami , Shinsuke Kawanishi , Hiroyuki Suzuki
IPC分类号： H01J37/16 , H01J37/28 , H01J37/20
CPC分类号： H01J37/16 , H01J37/20 , H01J37/28 , H01J2237/164 , H01J2237/182 , H01J2237/188 , H01J2237/2003 , H01J2237/2006 , H01J2237/20221 , H01J2237/20235 , H01J2237/28
摘要： A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.
摘要翻译：本发明的样品储存容器包括：储存容器（100），其在不同于外部气氛的气氛下存储样品（6）; 带电粒子束穿过或透过的隔膜（10）; 布置在储存容器（100）的内部并且能够在大气压下沿水平方向和垂直方向将样品（6）的相对位置移动到隔膜（10）的样品台（103）存储容器内部和储存容器外的大气状态彼此不同; 以及从所述存储容器（100）的外部移动所述样品台（103）的操作部（104），其中，所述样本收纳容器被设定为将样品（6）储存在所述储存容器带电粒子束装置。

45. 发明授权

US08779358B2 Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope 有权
标题翻译：界面，在非真空环境中观察物体的方法和扫描电子显微镜
公开(公告)号：US08779358B2
公开(公告)日：2014-07-15
申请号：US13449392
申请日：2012-04-18
申请人： Dov Shachal
发明人： Dov Shachal
IPC分类号： G01N23/00
CPC分类号： H01J37/285 , H01J37/06 , H01J37/20 , H01J37/28 , H01J37/301 , H01J2237/006 , H01J2237/0458 , H01J2237/15 , H01J2237/164 , H01J2237/182 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/28 , H01J2237/2801 , H01J2237/2806 , H01J2237/2807
摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.
摘要翻译：接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

46. 发明申请

US20140158907A1 Specimen Positioning Device, Charged Particle Beam System, and Specimen Holder 有权
标题翻译：标本定位装置，带电粒子束系统和标本支架
公开(公告)号：US20140158907A1
公开(公告)日：2014-06-12
申请号：US14101460
申请日：2013-12-10
申请人： JEOL Ltd.
发明人： Mitsuru Hamochi
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/26 , H01J2237/0216 , H01J2237/2006 , H01J2237/202 , H01J2237/204
摘要： A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The second portion (24) supports the first portion (22) via a resilient member (34).
摘要翻译：一种试样定位装置（100）用于具有试样室（1）的带电粒子束系统中或与其一起使用，具有：具有与试样室（1）可操作连通的孔（12）的基座（10） ; 可移动地安装在孔（12）中并且具有第一部分（22）和第二部分（24）的样本保持器（20）; 以及支撑所述标本室（1）中的所述第一部分（22）的第一部分支撑部分（40）。第二部分（24）经由弹性构件（34）支撑第一部分（22）。

47. 发明申请

US20120241608A1 INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE 有权
标题翻译：界面，用于观察非真空环境中的对象和扫描电子显微镜的方法
公开(公告)号：US20120241608A1
公开(公告)日：2012-09-27
申请号：US13449392
申请日：2012-04-18
申请人： Dov Shachal
发明人： Dov Shachal
IPC分类号： H01J37/28
CPC分类号： H01J37/285 , H01J37/06 , H01J37/20 , H01J37/28 , H01J37/301 , H01J2237/006 , H01J2237/0458 , H01J2237/15 , H01J2237/164 , H01J2237/182 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/28 , H01J2237/2801 , H01J2237/2806 , H01J2237/2807
摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.
摘要翻译：接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

48. 发明申请

US20100230590A1 Compact Scanning Electron Microscope 审中-公开
标题翻译：紧凑型扫描电子显微镜
公开(公告)号：US20100230590A1
公开(公告)日：2010-09-16
申请号：US12303711
申请日：2007-06-07
申请人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
发明人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC分类号： H01J37/28 , H01J37/143
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A compact electron microscope is robust, simple to operate, and preferably requires no special utilities. Imaging can begin shortly after a sample is inserted. A preferred simplified design includes permanent magnets for focusing, lack a vacuum controller and vacuum gauge, and uses a backscattered electron detector and no secondary electron detector.
摘要翻译：紧凑的电子显微镜是坚固的，操作简单，并且优选不需要特殊的用途。插入样品后即可开始成像。优选的简化设计包括用于聚焦的永磁体，缺少真空控制器和真空计，并且使用背散射电子检测器并且不使用二次电子检测器。

49. 发明授权

US07381971B2 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope 有权
标题翻译：用于在带电粒子束显微镜内进行原位探针尖端置换的方法和装置
公开(公告)号：US07381971B2
公开(公告)日：2008-06-03
申请号：US11186073
申请日：2005-07-21
申请人： Thomas M. Moore , Lyudmilla Zaykova-Feldman
发明人： Thomas M. Moore , Lyudmilla Zaykova-Feldman
IPC分类号： G21K7/00
CPC分类号： H01J37/20 , H01J37/26 , H01J2237/2005 , H01J2237/2006 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/208 , H01J2237/26 , H01J2237/262 , H01J2237/31745 , H01J2237/31749
摘要： We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there.Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.
摘要翻译：我们公开了一种夹具和相关的装置和方法，用于在真空室内输送纳米机械手探针尖端。夹具包括管; 压缩缸内部并与管同轴; 以及与压缩圆筒相邻的至少一个弹性环。存在与压缩筒同轴的真空密封件，用于接收和密封探针尖端。致动器连接到压缩气缸，用于压缩弹性环并使其夹持探针尖端。因此，探针尖端可以被夹持，转移到真空室中的不同位置，并在那里释放。附接到探针尖端的样品将转移到TEM样品保持器，如几个实施方案中所示，其包括具有相对端的棒; 连接到杆的每个相对端的臂; 用于接收探针尖端的一个或多个狭槽; 并且每个狭槽具有内部部分和外部部分，其中内部部分小于外部部分。刚刚描述的TEM样品架被插入到载体盒中。用于转移一个或多个TEM样品保持器的盒子包括平台; 从平台向上延伸的至少一个杆; 该棒具有用于容纳和保持TEM样品保持器的凹槽。一个可旋转刀库可容纳一个或多个探针尖端并选择性地释放尖端。该盒包括具有多个用于接收探针尖端并分配探针尖端的多个纵向开口的盒。

50. 发明申请

US20070210253A1 Methods for SEM inspection of fluid containing samples 有权
公开(公告)号：US20070210253A1
公开(公告)日：2007-09-13
申请号：US11798231
申请日：2007-05-11
申请人： Vered Behar , Amotz Nechushtan , Yossef Kliger , Opher Gileadi , David Sprinzak , Ory Zik , Yiftuh Karni
发明人： Vered Behar , Amotz Nechushtan , Yossef Kliger , Opher Gileadi , David Sprinzak , Ory Zik , Yiftuh Karni
IPC分类号： G01N23/00
CPC分类号： B01L3/50855 , B01L3/508 , B01L2200/0689 , B01L2300/042 , B01L2300/0654 , B01L2300/0829 , G01N1/36 , H01J37/20 , H01J37/244 , H01J2237/2003 , H01J2237/2006 , H01J2237/201 , H01J2237/2608
摘要： A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning electron microscope, thereby visualizing the sample.

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