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    • 43. 发明授权
    • Scanning atomic force microscope
    • 扫描原子力显微镜
    • US5567872A
    • 1996-10-22
    • US399521
    • 1995-03-07
    • Masafumi KyogakuKiyoshi Takimoto
    • Masafumi KyogakuKiyoshi Takimoto
    • G01B11/30B82B1/00G01B5/28G01B11/00G01B21/30G01Q20/02G01Q60/24
    • G01Q20/02B82Y35/00G01Q60/38Y10S977/87
    • A scanning atomic force microscope includes a probe arranged near a sample surface to oppose the sample surface, a support device for supporting the prove, a moving mechanism for moving the probe relative to the sample, and a signal detector for detecting a signal corresponding to a structure of the sample surface obtained by the probe. The signal detector includes a laser beam oscillator for oscillating a laser beam, and a laser beam receiving device for receiving the laser beam which is emitted from the laser beam oscillator and is reflected by the support device. The scanning atomic force microscope is further provided with a laser beam output device which has a function of controlling the laser beam oscillator to discontinuously emit the laser beam.
    • 扫描原子力显微镜包括布置在样品表面附近以与样品表面相对的探针,用于支撑证明的支撑装置,用于相对于样品移动探针的移动机构,以及用于检测对应于 通过探针获得的样品表面的结构。 信号检测器包括用于振荡激光束的激光束振荡器和用于接收从激光束振荡器发射并被支撑装置反射的激光束的激光束接收装置。 扫描原子力显微镜还设置有具有控制激光束振荡器以不连续地发射激光束的功能的激光束输出装置。