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41. 发明授权

US6159756A Method of testing semiconductor device 失效
标题翻译：半导体器件测试方法
公开(公告)号：US6159756A
公开(公告)日：2000-12-12
申请号：US235756
申请日：1999-01-25
申请人： Yoshiaki Yamada
发明人： Yoshiaki Yamada
IPC分类号： H01L21/3205 , H01L21/66 , H01L23/52 , H01L23/544
CPC分类号： H01L22/14 , H01L22/12 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device is tested without destroying a substrate immediately after a formation of a metal film and before patterning the metal film.To this end, the substrate is first divided into a product region and a test pattern region. Next, an insulating film is formed on the substrate. Thereafter, openings are formed in the insulating film and on the product region and the test pattern region. Subsequently, the metal film is formed in the openings and on the insulating film. Finally, the metal film is patterned to form a wiring pattern.Under these circumstances, a forming state of the metal film in the opening on the test pattern region is actually tested. Specifically, the presence or absence of a void is checked. In accordance with this test result, a forming state of the metal film in the opening in the product region is evaluated.
摘要翻译：在形成金属膜之后并且在图案化金属膜之前，测试半导体器件而不破坏基板。为此，首先将基板分成产品区域和测试图案区域。接下来，在基板上形成绝缘膜。此后，在绝缘膜和产品区域和测试图案区域上形成开口。接着，在开口部和绝缘膜上形成金属膜。最后，将金属膜图案化以形成布线图案。在这些情况下，实际上测试了测试图案区域中的开口中的金属膜的形成状态。具体地说，检查是否存在空隙。根据该测试结果，评估产品区域中的开口中的金属膜的形成状态。

42. 发明授权

US6106782A Chromatograph 失效
标题翻译：色谱仪
公开(公告)号：US6106782A
公开(公告)日：2000-08-22
申请号：US20703
申请日：1998-02-09
申请人： Yoshiaki Yamada , Kiyotoshi Mori
发明人： Yoshiaki Yamada , Kiyotoshi Mori
IPC分类号： G01N30/86 , G01N30/00 , B01D15/08 , G06F13/00
CPC分类号： G01N30/8651
摘要： A chromatograph is provided for accurately identifying components of a sample even with the use of a moving average method for noise reduction. A eluding solution is supplied to a column by a pump. In a sample injector, the sample injected into the column is separated into components by the column, and converted to an electric signal by a detector. A detected output signal is subjected to data processing in a data processor. The output signal is sampled at regular intervals and subjected to moving average processing in the detector. A sample injection signal from the sample injector is sent to the detector which generates a data processing start signal that is delayed by a time equal to a delay resulting from the moving average processing for the signal. The data processing start signal is sent to the data processor which starts the data processing in response to this signal.
摘要翻译：提供了一种用于精确地识别样品组分的色谱仪，即使使用移动平均方法进行降噪。通过泵将一个排出的溶液供应到塔中。在样品注射器中，注入到柱中的样品被柱分离成组分，并通过检测器转化成电信号。检测到的输出信号在数据处理器中进行数据处理。以规则的间隔对输出信号进行采样，并在检测器中进行移动平均处理。来自样品注射器的样品注入信号被发送到检测器，其产生延迟等于由信号的移动平均处理导致的延迟的时间的数据处理开始信号。数据处理开始信号被发送到响应于该信号开始数据处理的数据处理器。

43. 发明授权

US08585523B2 Power transmitting mechanism for hybrid vehicle 失效
标题翻译：混合动力汽车动力传递机构
公开(公告)号：US08585523B2
公开(公告)日：2013-11-19
申请号：US13320979
申请日：2009-11-18
申请人： Yoshiaki Yamada
发明人： Yoshiaki Yamada
IPC分类号： F16H3/72
CPC分类号： B60K6/387 , B60K6/365 , B60K6/48 , B60K2006/381 , B60K2006/4825 , F16H3/724 , Y02T10/6221 , Y02T10/6252
摘要： A proposition is to provide a power transmitting mechanism for a hybrid vehicle having improved energy utilization efficiency. A power transmitting mechanism for the hybrid vehicle using powers of the engine and the motor/generator in a combined manner, the mechanism includes an engine drive shaft coupled to an engine output shaft via a main clutch; a motor output shaft of a motor/generator rotatably supported separately from the engine drive shaft; a drive shaft brake releasing/fixing the engine drive shaft; a motor-brake releasing/fixing the motor output shaft; and a planetary gear mechanism.
摘要翻译：提出一种具有提高的能量利用效率的混合动力车辆的动力传递机构。一种用于混合动力车辆的动力传递机构，其以组合的方式使用发动机和电动机/发电机的动力，该机构包括经由主离合器联接到发动机输出轴的发动机驱动轴; 与发动机驱动轴分开旋转地支撑的电动机/发电机的电动机输出轴; 驱动轴制动器释放/固定发动机驱动轴; 释放/固定马达输出轴的马达制动器; 和行星齿轮机构。

44. 发明授权

US08376637B2 Photoresist coating and developing apparatus, substrate transfer method and interface apparatus 有权
标题翻译：光刻胶涂布和显影装置，基片转印方法和界面装置
公开(公告)号：US08376637B2
公开(公告)日：2013-02-19
申请号：US12940101
申请日：2010-11-05
申请人： Yoshiaki Yamada , Yuichi Yamamoto , Hitoshi Kosugi , Seiji Fujimoto
发明人： Yoshiaki Yamada , Yuichi Yamamoto , Hitoshi Kosugi , Seiji Fujimoto
IPC分类号： G03D5/00
CPC分类号： H01L21/67109 , H01L21/67196 , H01L21/67201
摘要： A photoresist coating and developing apparatus 1 includes a photoresist film forming unit that forms a photoresist film on a substrate; a heat treatment unit that heats the substrate on which the photoresist film is formed by the photoresist film forming unit; a cooling unit that cools the substrate, on which the photoresist film is formed and which is heated by the heat treatment unit, to normal temperature; a heating unit 61 that heats the substrate, which is cooled to normal temperature by the cooling unit, to a predetermined temperature; a load-lock chamber L1 that unloads the substrate under depressurized atmosphere to expose the photoresist film; and a transfer device 62 that transfers the substrate from the heating unit 61 to the load-lock chamber L1.
摘要翻译：光致抗蚀剂涂层显影装置1包括在基板上形成光致抗蚀剂膜的光致抗蚀剂膜形成单元; 热处理单元，其通过光致抗蚀剂膜形成单元加热其上形成有光致抗蚀剂膜的基板; 冷却单元，其将形成有光致抗蚀剂膜的基板和由热处理单元加热的基板冷却至常温; 加热单元61，其通过冷却单元将被冷却至常温的基板加热到预定温度; 负载锁定室L1，其在减压气氛下卸载基板以露出光致抗蚀剂膜; 以及将基板从加热单元61传递到加载锁定室L1的转移装置62。

45. 发明申请

US20120251957A1 SUBSTRATE TRANSFER METHOD FOR PERFORMING PROCESSES INCLUDING PHOTOLITHOGRAPHY SEQUENCE 有权
标题翻译：用于执行包括光刻机序列的处理的基板传输方法
公开(公告)号：US20120251957A1
公开(公告)日：2012-10-04
申请号：US13495611
申请日：2012-06-13
申请人： Yuichi Yamamoto , Tadayuki Yamaguchi , Yasuhito Saiga , Yoshiaki Yamada
发明人： Yuichi Yamamoto , Tadayuki Yamaguchi , Yasuhito Saiga , Yoshiaki Yamada
IPC分类号： H01L21/677 , G03F7/20
CPC分类号： H01L21/67225 , G03F7/70525 , G03F7/7075 , G03F7/70991 , H01L21/67727 , H01L21/67733 , Y10S414/135
摘要： A substrate transfer method for transferring target substrates proceeds in a substrate processing system for performing processes including a photolithography sequence on the target substrates. The system includes a first automated substrate transfer line configured to transfer the target substrates among a plurality of process sections for respectively performing processes on the target substrates, and a second automated substrate transfer line of a cyclical type dedicated to a plurality of process apparatuses of a photolithography process section, which are configured to perform a series of processes in the photolithography sequence, the second automated substrate transfer line being located relative to the first automated substrate transfer line so as for the target substrates to be transferred therebetween. The method includes, in order to proceed with the photolithography sequence, transferring the target substrates among the process apparatuses in the photolithography process section by use of the second automated substrate transfer line.
摘要翻译：用于转移目标衬底的衬底转移方法在用于在目标衬底上执行包括光刻序列的处理的衬底处理系统中进行。该系统包括：第一自动化基板传送线，其被配置为在用于分别在目标基板上执行处理的多个处理部中传送目标基板;以及专用于多个处理装置的循环型第二自动基板传送线光刻处理部分，被配置为在光刻序列中执行一系列处理，第二自动化基板传送线相对于第一自动基板传送线定位，以使目标基板在其间传输。该方法包括为了继续进行光刻顺序，通过使用第二自动基板传送线在光刻处理部中的处理装置之间传送目标基板。

46. 发明授权

US08236132B2 Substrate processing system and substrate transfer method 有权
标题翻译：基板处理系统和基板转印方法
公开(公告)号：US08236132B2
公开(公告)日：2012-08-07
申请号：US12302853
申请日：2007-06-15
申请人： Yuichi Yamamoto , Tadayuki Yamaguchi , Yasuhito Saiga , Yoshiaki Yamada
发明人： Yuichi Yamamoto , Tadayuki Yamaguchi , Yasuhito Saiga , Yoshiaki Yamada
IPC分类号： B65G49/07
CPC分类号： H01L21/67225 , G03F7/70525 , G03F7/7075 , G03F7/70991 , H01L21/67727 , H01L21/67733 , Y10S414/135
摘要： A substrate processing system (100) includes a first automated substrate transfer line or main transfer line (20) configured to transfer wafers (W) over the entire system and to transfer wafers to and from respective process sections, and a second automated substrate transfer line or auxiliary transfer line (30) configured to transfer wafers (W) inside a photolithography process section (1a). The auxiliary transfer line (30) is disposed as a transfer mechanism independent of the main transfer line (20). An OHT (31) is configured to travel around on the auxiliary transfer line (30) having a loop shape, so as to transfer wafers (W) to and from and among the respective process apparatuses in the photolithography process section (1a).
摘要翻译：衬底处理系统（100）包括第一自动化衬底传送线或主传输线（20），其被配置为在整个系统上传送晶片（W）并将晶片传送到相应工艺部分和从相应工艺部分传送晶片，以及第二自动衬底传送线或辅助传输线（30），其配置成在光刻工艺部分（1a）内转移晶片（W）。辅助传输线（30）被设置为独立于主传输线（20）的传送机构。 OHT（31）构造成在具有环形的辅助传输线（30）周围行进，以便在光刻处理部分（1a）中将晶片（W）传送到各自的处理装置之间和从各个处理装置传送晶片（W）。

47. 发明申请

US20120115659A1 POWER TRANSMISSION MECHANISM FOR PARALLEL HYBRID VEHICLE 失效
标题翻译：用于并联混合动力车辆的动力传动机构
公开(公告)号：US20120115659A1
公开(公告)日：2012-05-10
申请号：US13318612
申请日：2009-11-18
申请人： Yoshiaki Yamada , Kunihiko Hikiri , Shuichi Nakamura , Kouichi Itani
发明人： Yoshiaki Yamada , Kunihiko Hikiri , Shuichi Nakamura , Kouichi Itani
IPC分类号： F16H3/72
CPC分类号： B60K6/48 , B60K6/365 , B60K6/387 , B60K6/547 , B60K2006/381 , B60L7/18 , B60L7/26 , B60L11/14 , B60L2200/26 , B60L2270/145 , Y02T10/6221 , Y02T10/70 , Y02T10/7077
摘要： A proposition is to provide a power transmission mechanism for parallel hybrid vehicle that is capable of smoothly combining/separating input/output powers of a motor and an engine, and is applicable to a large hybrid vehicle by ensuring sufficient strength of a mechanism for combining and separating the input/output powers.It is characterized by including a motor output shaft of the motor/generator rotatable separately from an engine drive shaft system extending from a main clutch to a transmission, a motor-brake mounted on one end side of the motor output shaft to release/fix the motor output shaft, and a planetary gear mechanism mounted between another end side of the motor output shaft and the engine drive shaft system and including a sun gear provided on the other end side of the motor output shaft, an outer gear provided on the engine drive shaft system and having a gear ratio to the sun gear of 1:1, a plurality of planetary gears with which the sun gear and the outer gear are engaged, and a planetary carrier picking up orbital motions of the planetary gears, and a gear brake mounted on one end side of the planetary carrier to release/fix the planetary carrier.
摘要翻译：提出一种能够平滑地组合/分离电动机和发动机的输入/输出功率的并联混合动力车辆的动力传递机构，并且通过确保用于组合的机构的足够的强度和适用于大型混合动力车辆，分离输入/输出功率。其特征在于包括：电动机/发电机的电动机输出轴，其与从主离合器延伸到变速器的发动机驱动轴系分开旋转;电动制动器，其安装在电动机输出轴的一端侧以释放/固定电动机输出轴和安装在电动机输出轴的另一端侧与发动机驱动轴系之间的行星齿轮机构，并且包括设置在电动机输出轴的另一端侧的太阳齿轮，设置在发动机驱动器上的外齿轮轴系，并具有1：1的太阳齿轮的传动比，与太阳齿轮和外齿轮接合的多个行星齿轮和行星齿轮架拾取行星齿轮的轨道运动，齿轮制动器安装在行星齿轮架的一端侧，以释放/固定行星架。

48. 发明授权

US07901149B2 Substrate processing method, program, computer-readable recording medium, and substrate processing system 有权
标题翻译：基板处理方法，程序，计算机可读记录介质和基板处理系统
公开(公告)号：US07901149B2
公开(公告)日：2011-03-08
申请号：US12307936
申请日：2007-07-19
申请人： Yoshiaki Yamada , Tadayuki Yamaguchi , Yuuichi Yamamoto , Yasuhito Saiga
发明人： Yoshiaki Yamada , Tadayuki Yamaguchi , Yuuichi Yamamoto , Yasuhito Saiga
IPC分类号： G03B13/00 , G03D5/00
CPC分类号： H01L21/0274 , G03F7/2022 , G03F7/38 , H01L21/3086 , H01L21/3088 , H01L21/67748
摘要： A substrate on which a resist film has been formed is transferred to an aligner and subjected to exposure processing. The substrate is then subjected to post-exposure baking in a second processing system. The substrate is then transferred again to the aligner and subjected to exposure processing. The substrate for which exposure processing for the second time has been finished is transferred to a first processing system and again subjected to post-exposure baking. The time periods from the ends of the exposure processing to the starts of the post-exposure baking for the first time and the second time are controlled to be equal. In pattern forming processing in which exposure processing is performed a plurality of times between the resist film forming processing and the developing treatment, a pattern with a desired dimension can be finally formed.
摘要翻译：其上形成有抗蚀剂膜的基板被转印到对准器并进行曝光处理。然后在第二处理系统中对基板进行曝光后烘烤。然后将衬底再次转移到对准器并进行曝光处理。第二次曝光处理已完成的基板被转印到第一处理系统，并再次进行曝光后烘烤。从曝光处理结束到第一次和第二次的曝光后烘烤开始的时间段被控制为相等。在抗蚀剂膜形成处理和显影处理之间进行多次曝光处理的图案形成处理中，可以最终形成具有期望尺寸的图案。

49. 发明申请

US20080131603A1 Color display substrate, color filter substrate, color luminescent substrate, manufacturing method of color display substrate, electro-optical apparatus, electronic device, film-forming method, film-forming apparatus, and display motherboard 审中-公开
标题翻译：彩色显示基板，滤色器基板，彩色发光基板，彩色显示基板的制造方法，电光装置，电子装置，成膜方法，成膜装置，显示主板
公开(公告)号：US20080131603A1
公开(公告)日：2008-06-05
申请号：US11979212
申请日：2007-10-31
申请人： Hisashi Aruga , Satoru Katagami , Yoshiaki Yamada , Hiroshi Kiguchi
发明人： Hisashi Aruga , Satoru Katagami , Yoshiaki Yamada , Hiroshi Kiguchi
IPC分类号： B05D5/00 , B05C5/00
CPC分类号： G02F1/133514 , G02F1/133516 , H01L27/3211 , H01L27/322 , H01L27/3295 , H01L51/5284
摘要： The invention provides a color display substrate having plural color display elements arranged in a matrix pattern, and a manufacturing method to efficiently obtain a color filter substrate and color luminescent substrate, for example. A manufacturing method of a color display substrate includes the step of forming plural color dots by selectively ejecting liquid droplets from nozzles in accordance with input data. The plural color dots constitute plural pixels, which constitute plural color filter elements arranged in a matrix pattern. The plural color dots have a first dot pitch in a direction perpendicular to a first base line. Each of the plural color dots is formed to lie at a distance of at least substantially an integral multiple of the first dot pitch from the first base line.
摘要翻译：本发明提供一种彩色显示基板，具有以矩阵图案排列的多个彩色显示元件，以及例如有效地获得滤色器基板和彩色发光基板的制造方法。彩色显示基板的制造方法包括根据输入数据从喷嘴选择性地喷射液滴而形成多个彩色点的步骤。多个彩色点构成多个像素，其构成以矩阵图案排列的多个滤色器元件。多个彩色点在垂直于第一基线的方向上具有第一点间距。多个彩色点中的每一个被形成为距离第一基线至少基本上是第一点间距的整数倍的距离。

50. 发明申请

US20060250077A1 Ejecting method and ejecting apparatus 审中-公开
标题翻译：喷射方法和喷射装置
公开(公告)号：US20060250077A1
公开(公告)日：2006-11-09
申请号：US11484694
申请日：2006-07-12
申请人： Shinichi Nakamura , Yoshiaki Yamada , Tsuyoshi Kitahara , Satoru Katagami
发明人： Shinichi Nakamura , Yoshiaki Yamada , Tsuyoshi Kitahara , Satoru Katagami
IPC分类号： H01J1/62 , B05B7/06
CPC分类号： H01L51/0005 , B41J2/145 , B41J2202/09 , B41J2202/20
摘要： In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.
摘要翻译：在用于制造滤色器1的喷墨装置中，具有多个喷嘴27的喷墨头22以线性方式设置。滤芯元件从多个喷嘴27喷射到母板12四次，以形成预定厚度的过滤元件3。通过这样做，可以防止多个滤光元件3的厚度差异，并平滑地均匀化透光性。因此，在喷射装置中，可以以更低成本和更有效地以更常见的方式形成滤色器。此外，可以提供一种可以使电光学构件的电光特性，液晶装置的显色特性和EL表面的照明特性等因素均衡的喷射装置。

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