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    • 44. 发明申请
    • Magnetic head having short pole yoke length and method for fabrication thereof
    • 具有短极轭长度的磁头及其制造方法
    • US20050157432A1
    • 2005-07-21
    • US10758428
    • 2004-01-16
    • Richard HsiaoEdward Lee
    • Richard HsiaoEdward Lee
    • G11B5/187G11B5/31
    • G11B5/3133G11B5/3163Y10T29/49021Y10T29/49032Y10T29/49043Y10T29/4906Y10T29/49062
    • The induction coil of the magnetic head of the present invention is fabricated in a patterned electrical insulation material, preferably utilizing reactive ion etch (RIE) techniques. The electrical insulation material is particularly patterned such that it is formed away from the ABS surface and in the location of the induction coil. A fill layer is deposited around the patterned electrical insulation material layer, such that the fill layer is disposed at the ABS surface. In a preferred embodiment, the patterned electrical insulation material is initially fabricated from hard baked photoresist and subsequent to the deposition of the fill layer the hard baked photoresist material is removed and replaced by SiO2. The SiO2 is thereby located away from the ABS surface and the induction coil is subsequently fabricated within the SiO2 material.
    • 本发明的磁头的感应线圈以图案化的电绝缘材料制成,优选利用反应离子蚀刻(RIE)技术。 电绝缘材料被特别图案化,使得其形成为远离ABS表面并且在感应线圈的位置。 填充层沉积在图案化的电绝缘材料层周围,使得填充层设置在ABS表面。 在优选实施例中,图案化电绝缘材料最初由硬烘焙光致抗蚀剂制造,并且在沉积填充层之后,去除硬烘烤的光致抗蚀剂材料并用SiO 2替代。 因此,SiO 2 2位于离开ABS表面的位置,随后在SiO 2材料内制造感应线圈。